Takaba; Hiroyuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Takaba; Hiroyuki.The latest application filed is for "plasma processing apparatus and plasma processing method".

Company Profile

0.11.13

Takaba; Hiroyuki - Miyagi JP
Takaba; Hiroyuki - Portland OR US
Takaba; Hiroyuki - Tokyo JP
Takaba; Hiroyuki - Hillsboro OR
Takaba; Hiroyuki - Nirasaki-Shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Etching method for substrate to be processed and plasma-etching device Grant 9,721,803 - Takaba August 1, 2	2017-08-01
Plasma Processing Apparatus And Plasma Processing Method App 20150294839 - TAKABA; Hiroyuki ; et al.	2015-10-15
Etching Method For Substrate To Be Processed And Plasma-etching Device App 20150118858 - Takaba; Hiroyuki	2015-04-30
Method For Etching Organic Film And Plasma Etching Device App 20150064924 - Takaba; Hiroyuki ; et al.	2015-03-05
Method of depositing dielectric films using microwave plasma Grant 8,962,454 - Takaba February 24, 2	2015-02-24
Plasma treatment method Grant 8,778,810 - Takaba July 15, 2	2014-07-15
Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method Grant 8,419,859 - Fukiage , et al. April 16, 2	2013-04-16
Method of depositing highly conformal amorphous carbon films over raised features Grant 8,399,366 - Takaba March 19, 2	2013-03-19
Method Of Depositing Highly Conformal Amorphous Carbon Films Over Raised Features App 20130052808 - Takaba; Hiroyuki	2013-02-28
Plasma Processing Method App 20130034970 - Takaba; Hiroyuki	2013-02-07
Method Of Depositing Dielectric Films Using Microwave Plasma App 20120115334 - Takaba; Hiroyuki	2012-05-10
Plasma Treatment Method App 20120098147 - Takaba; Hiroyuki	2012-04-26
Semiconductor device and manufacturing method of the same Grant 7,820,503 - Nabatame , et al. October 26, 2	2010-10-26
Method Of Cleaning Plasma-treating Apparatus, Plasma-treating Apparatus Where The Cleaning Method Is Practiced, And Memory Medium Memorizing Program Executing The Cleaning Method App 20100175713 - Fukiage; Noriaki ; et al.	2010-07-15
Semiconductor device and manufacturing method of the same Grant 7,511,338 - Nabatame , et al. March 31, 2	2009-03-31
Semiconductor device and manufacturing method of the same App 20080293229 - Nabatame; Toshihide ; et al.	2008-11-27
Semiconductor device and manufacturing method of the same App 20070096157 - Nabatame; Toshihide ; et al.	2007-05-03
Film forming method and fabrication process of semiconductor device App 20070054503 - Takaba; Hiroyuki ; et al.	2007-03-08

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