Patent | Date |
---|
Adjustment method and electron beam device Grant 11,217,421 - Hayashi , et al. January 4, 2 | 2022-01-04 |
Adjustment Method And Electron Beam Device App 20210012997 - HAYASHI; Takehide ;   et al. | 2021-01-14 |
Electron Beam Irradiation Apparatus App 20200411275 - TAJIMA; Ryo | 2020-12-31 |
Electron Beam Irradiation Apparatus And Electron Beam Alignment Method App 20200273658 - WATANABE; Kenji ;   et al. | 2020-08-27 |
Deflection sensitivity calculation method and deflection sensitivity calculation system Grant 10,707,048 - Tajima | 2020-07-07 |
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus Grant 10,446,404 - Tajima , et al. Oc | 2019-10-15 |
Deflection Sensitivity Calculation Method And Deflection Sensitivity Calculation System App 20190237293 - TAJIMA; Ryo | 2019-08-01 |
Electron-beam Irradiated Area Adjustment Method And Adjustment System, Electron-beam Irradiated Region Correction Method, And Electron Beam Irradiation Apparatus App 20180233374 - TAJIMA; Ryo ;   et al. | 2018-08-16 |
Inspection device Grant 10,002,740 - Hatakeyama , et al. June 19, 2 | 2018-06-19 |
Inspection Device App 20180040452 - HATAKEYAMA; Masahiro ;   et al. | 2018-02-08 |
Surface processing apparatus Grant 9,852,878 - Hatakeyama , et al. December 26, 2 | 2017-12-26 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 9,406,480 - Noji , et al. August 2, 2 | 2016-08-02 |
Surface Processing Apparatus App 20150371813 - HATAKEYAMA; Masahiro ;   et al. | 2015-12-24 |
Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded Grant 9,105,445 - Tajima , et al. August 11, 2 | 2015-08-11 |
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20150122993 - Noji; Nobuharu ;   et al. | 2015-05-07 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,946,631 - Noji , et al. February 3, 2 | 2015-02-03 |
Inspection System, Inspection Image Data Generation Method, Inspection Display Unit, Defect Determination Method, And Storage Medium On Which Inspection Display Program Is Recorded App 20140291515 - TAJIMA; Ryo ;   et al. | 2014-10-02 |
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20140158885 - Noji; Nobuharu ;   et al. | 2014-06-12 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,742,341 - Noji , et al. June 3, 2 | 2014-06-03 |
Embroidery Sewing Machine App 20120234224 - TAJIMA; Ryo | 2012-09-20 |
Embroidery sewing machine and control method therefor Grant 8,256,362 - Tajima , et al. September 4, 2 | 2012-09-04 |
Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same Grant 8,013,315 - Watanabe , et al. September 6, 2 | 2011-09-06 |
Sewing machine capable of sewing sequins and method for setting sequin feed amount therefor Grant 7,934,461 - Tajima May 3, 2 | 2011-05-03 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20100237243 - Noji; Nobuharu ;   et al. | 2010-09-23 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,741,601 - Noji , et al. June 22, 2 | 2010-06-22 |
Semiconductor Devices And Method Of Testing Same App 20090152595 - Kaga; Toru ;   et al. | 2009-06-18 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20090101816 - Noji; Nobuharu ;   et al. | 2009-04-23 |
Embroidery Sewing Machine And Control Method Therefor App 20080302287 - TAJIMA; Ryo ;   et al. | 2008-12-11 |
Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same App 20080099697 - Watanabe; Kenji ;   et al. | 2008-05-01 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,365,324 - Noji , et al. April 29, 2 | 2008-04-29 |
Sewing Machine Capable Of Sewing Sequins And Method For Setting Sequin Feed Amount Therefor App 20070119357 - TAJIMA; Ryo | 2007-05-31 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,138,629 - Noji , et al. November 21, 2 | 2006-11-21 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20060169900 - Noji; Nobuharu ;   et al. | 2006-08-03 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20050045821 - Noji, Nobuharu ;   et al. | 2005-03-03 |