Tajika; Atsushi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tajika; Atsushi.The latest application filed is for "phase shift mask blank, phase shift mask, and method of manufacture".
- Tajika; Atsushi - Niigata-ken JP
| Patent | Date |
|---|---|
| Phase shift mask blank, phase shift mask, and method of manufacture Grant 7,179,567 - Inazuki , et al. February 20, 2 | 2007-02-20 |
| Phase shift mask blank, phase shift mask, and method of manufacture App 20030235767 - Inazuki, Yukio ; et al. | 2003-12-25 |
| Phase shift mask blank, phase shift mask, and method of manufacture App 20030025216 - Inazuki, Yukio ; et al. | 2003-02-06 |
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