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Patent applications and USPTO patent grants for Taira; Yuki.The latest application filed is for "method of manufacturing semiconductor device, substrate processing apparatus, and recording medium".
Patent | Date |
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Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,786,493 - Ueda , et al. October 10, 2 | 2017-10-10 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20160284532 - UEDA; Tatsushi ;   et al. | 2016-09-29 |
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,441,294 - Yamamoto , et al. September 13, 2 | 2016-09-13 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20150325434 - YAMAMOTO; Katsuhiko ;   et al. | 2015-11-12 |
Ultraviolet Generating Device And Lighting Device Using The Same App 20110025221 - Matsumoto; Kazunori ;   et al. | 2011-02-03 |
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