Patent | Date |
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Partial solution replacement in recyclable persulfuric acid cleaning systems Grant 9,165,801 - Henry , et al. October 20, 2 | 2015-10-20 |
Partial solution replacement in recyclable persulfuric acid cleaning systems Grant 8,992,691 - Henry , et al. March 31, 2 | 2015-03-31 |
Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid Grant 8,828,143 - Simons , et al. September 9, 2 | 2014-09-09 |
Partial Solution Replacement In Recyclable Persulfuric Acid Cleaning Systems App 20140060596 - Henry; Richard O. ;   et al. | 2014-03-06 |
Apparatus And Method For The Rapid Thermal Control Of A Work Piece In Liquid Or Supercritical Fluid App 20130210235 - Simons; John P. ;   et al. | 2013-08-15 |
Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid Grant 8,388,758 - Simons , et al. March 5, 2 | 2013-03-05 |
Partial Solution Replacement In Recyclable Persulfuric Acid Cleaning Systems App 20120255577 - Henry; Richard O. ;   et al. | 2012-10-11 |
Apparatus And Method For The Rapid Thermal Control Of A Work Piece In Liquid Or Supercritical Fluid App 20090235955 - Simons; John P. ;   et al. | 2009-09-24 |
Dielectric material Grant 7,485,964 - Cotte , et al. February 3, 2 | 2009-02-03 |
Variable exhaust static pressure management apparatus Grant 7,354,874 - Biagetti , et al. April 8, 2 | 2008-04-08 |
Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition Grant 7,332,436 - Cotte , et al. February 19, 2 | 2008-02-19 |
Method for the rapid thermal control of a work piece in liquid or supercritical fluid Grant 7,288,155 - Simons , et al. October 30, 2 | 2007-10-30 |
Variable Exhaust Static Pressure Management Apparatus App 20070071655 - Biagetti; Michael R. ;   et al. | 2007-03-29 |
Dielectric material App 20060180922 - Cotte; John M. ;   et al. | 2006-08-17 |
Method to build a microfilter Grant 7,081,208 - McCullough , et al. July 25, 2 | 2006-07-25 |
Process of insulating a semiconductor device using a polymeric material Grant 7,056,837 - Cotte , et al. June 6, 2 | 2006-06-06 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid Grant 6,997,197 - Simons , et al. February 14, 2 | 2006-02-14 |
Process of removing residue from a precision surface using liquid or supercritical critical carbon dioxide composition App 20050224748 - Cotte, John Michael ;   et al. | 2005-10-13 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid App 20050211269 - Simons, John P. ;   et al. | 2005-09-29 |
Method of in situ monitoring of supercritical fluid process conditions Grant 6,927,393 - Cotte , et al. August 9, 2 | 2005-08-09 |
Process of removing residue material from a precision surface Grant 6,890,855 - Cotte , et al. May 10, 2 | 2005-05-10 |
Solid CO2 cleaning Grant 6,875,286 - Cotte , et al. April 5, 2 | 2005-04-05 |
Liquid or supercritical carbon dioxide composition Grant 6,838,015 - Cotte , et al. January 4, 2 | 2005-01-04 |
Check valve for micro electro mechanical structure devices Grant 6,834,671 - Cotte , et al. December 28, 2 | 2004-12-28 |
Sample holding chuck for use in reactor and reactor using same Grant 6,821,488 - McCullough , et al. November 23, 2 | 2004-11-23 |
Check valve for micro electro mechanical structure devices App 20040134538 - Cotte, John Michael ;   et al. | 2004-07-15 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid App 20040112402 - Simons, John P. ;   et al. | 2004-06-17 |
Solid CO2 cleaning App 20040112406 - Cotte, John M. ;   et al. | 2004-06-17 |
Method of insitu monitoring of supercritical fluid process conditions App 20040113079 - Cotte, John M. ;   et al. | 2004-06-17 |
Method to build a microfilter App 20040112865 - McCullough, Kenneth J. ;   et al. | 2004-06-17 |
Apparatus for cleaning filters Grant 6,739,346 - Cotte , et al. May 25, 2 | 2004-05-25 |
Turbine part mount for supercritical fluid processor Grant 6,736,906 - Cotte , et al. May 18, 2 | 2004-05-18 |
Topcoat process to prevent image collapse App 20040038155 - Simons, Jphn P. ;   et al. | 2004-02-26 |
Process of removing ion-implanted photoresist from a workpiece Grant 6,683,008 - Cotte , et al. January 27, 2 | 2004-01-27 |
Supercritical fluid(SCF) silylation process Grant 6,673,521 - Moreau , et al. January 6, 2 | 2004-01-06 |
Topcoat process to prevent image collapse Grant 6,656,666 - Simons , et al. December 2, 2 | 2003-12-02 |
Process of providing a semiconductor device with electrical interconnection capability Grant 6,653,233 - Cotte , et al. November 25, 2 | 2003-11-25 |
Dielectric material and process of insulating a semiconductor device using same App 20030211312 - Cotte, John M. ;   et al. | 2003-11-13 |
Process and apparatus for contacting a precision surface with liquid or supercritical carbon dioxide App 20030196679 - Cotte, John Michael ;   et al. | 2003-10-23 |
Turbine part mount for supercritical fluid processor App 20030192575 - Cotte, John M. ;   et al. | 2003-10-16 |
Electromechanical device and a process of preparing same Grant 6,622,507 - Cotte , et al. September 23, 2 | 2003-09-23 |
Apparatus and method for wet cleaning Grant 6,584,989 - Taft , et al. July 1, 2 | 2003-07-01 |
Apparatus and method for increasing throughput in fluid processing Grant 6,561,220 - McCullough , et al. May 13, 2 | 2003-05-13 |
Liquid or supercritical carbon dioxide composition and process of removing residue from a precision surface using same App 20030045117 - Cotte, John Michael ;   et al. | 2003-03-06 |
Supercritical fluid(SCF) silylation process App 20030036023 - Moreau, Wayne M. ;   et al. | 2003-02-20 |
Check valve for micro electro mechanical structure devices App 20030019528 - Cotte, John Michael ;   et al. | 2003-01-30 |
Electromechanical device and a process of preparing same App 20030019540 - Cotte, John Michael ;   et al. | 2003-01-30 |
Process of drying a cast polymeric film disposed on a workpiece Grant 6,509,136 - Goldfarb , et al. January 21, 2 | 2003-01-21 |
Fixtures for processing a workpiece in a supercritical fluid App 20030010363 - Cotte, John Michael ;   et al. | 2003-01-16 |
Dielectric material and process of insulating a semiconductor device using same App 20030008129 - Cotte, John M. ;   et al. | 2003-01-09 |
Process Of Drying A Cast Polymeric Film Disposed On A Workpiece App 20030008238 - Goldfarb, Dario L. ;   et al. | 2003-01-09 |
Process of removing residue material from a precision surface App 20030003762 - Cotte, John Michael ;   et al. | 2003-01-02 |
Apparatus for cleaning filters App 20030000556 - Cotte, John Michael ;   et al. | 2003-01-02 |
Process of providing a semiconductor device with electrical interconnection capability App 20030003746 - Cotte, John Michael ;   et al. | 2003-01-02 |
Apparatus and method for increasing throughput in fluid processing App 20020179155 - McCullough, Kenneth J. ;   et al. | 2002-12-05 |
Apparatus and method for wet cleaning App 20020148485 - Taft, Charles J. ;   et al. | 2002-10-17 |
Process for depositing a film on a nanometer structure Grant 6,451,375 - Cotte , et al. September 17, 2 | 2002-09-17 |
Process for removing chemical mechanical polishing residual slurry Grant 6,425,956 - Cotte , et al. July 30, 2 | 2002-07-30 |
Process For Removing Chemical Mechanical Polishing Residual Slurry App 20020088477 - Cotte, John Michael ;   et al. | 2002-07-11 |
Process For Depositing A Film On A Nanometer Structure App 20020090458 - Cotte, John Michael ;   et al. | 2002-07-11 |
Topcoat process to prevent image collapse App 20020081533 - Simons, John P. ;   et al. | 2002-06-27 |
Process of drying semiconductor wafers using liquid or supercritical carbon dioxide Grant 6,398,875 - Cotte , et al. June 4, 2 | 2002-06-04 |