| Patent | Date |
|---|
Semiconductor wafer processing chamber
Grant 11,342,215 - Breingan , et al. May 24, 2 | 2022-05-24 |
System and method for self-cleaning wet treatment process
Grant 11,232,958 - Nulman , et al. January 25, 2 | 2022-01-25 |
Apparatus and method for the minimization of undercut during a UBM etch process
Grant 11,069,583 - Taddei , et al. July 20, 2 | 2021-07-20 |
Apparatus And Method For Die Stack Flux Removal
App 20210202272 - Taddei; John ; et al. | 2021-07-01 |
Apparatus and method for the minimization of undercut during a UBM etch process
Grant 11,004,755 - Taddei , et al. May 11, 2 | 2021-05-11 |
Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle
Grant 10,707,099 - Breingan , et al. | 2020-07-07 |
Semiconductor Wafer Processing Chamber
App 20200161146 - Goldberg; David ; et al. | 2020-05-21 |
Apparatus and Method for the Minimization of Undercut During a UBM Etch Process
App 20200091014 - Taddei; John ; et al. | 2020-03-19 |
Two-level tape frame rinse assembly
Grant 10,559,488 - Breingan , et al. Feb | 2020-02-11 |
Two etch method for achieving a wafer thickness profile
Grant 10,553,502 - Mauer , et al. Fe | 2020-02-04 |
Apparatus and method for wafer thinning in advanced packaging applications
Grant 10,541,180 - Mauer , et al. Ja | 2020-01-21 |
System And Method For Self-cleaning Wet Treatment Process
App 20200013641 - NULMAN; Kenji Michael ; et al. | 2020-01-09 |
Apparatus and Method for the Minimization of Undercut During a UBM Etch Process
App 20190393108 - Taddei; John ; et al. | 2019-12-26 |
Apparatus and method for metals free reduction and control of resistivity of deionized water
Grant 10,503,182 - Taddei , et al. Dec | 2019-12-10 |
Apparatus and method to control etch rate through adaptive spiking of chemistry
Grant 10,446,387 - Mauer , et al. Oc | 2019-10-15 |
Apparatus and method to control properties of fluid discharge via refrigerative exhaust
Grant 10,443,943 - Taddei , et al. Oc | 2019-10-15 |
Apparatus and method to remove solids from material lift off post process solvents
Grant 10,413,850 - Taddei , et al. Sept | 2019-09-17 |
Apparatus and Method for Mixing Fluids with Degradational Properties
App 20190168178 - Taddei; John ; et al. | 2019-06-06 |
Apparatus and method to reduce and control resistivity of deionized water
Grant 10,294,132 - Taddei , et al. | 2019-05-21 |
Apparatus and method for mixing fluids with degradational properties
Grant 10,239,031 - Taddei , et al. | 2019-03-26 |
Semiconductor Wafer Processing Chamber
App 20180308718 - Breingan; William Gilbert ; et al. | 2018-10-25 |
Configurable High Temperature Chuck For Use In A Semiconductor Wafer Processing System
App 20180308741 - Breingan; William Gilbert ; et al. | 2018-10-25 |
System And Method For Performing A Wet Etching Process
App 20180294196 - Mauer; Laura ; et al. | 2018-10-11 |
Apparatus And Method For Wafer Thinning In Advanced Packaging Applications
App 20180254221 - Mauer; Laura ; et al. | 2018-09-06 |
Apparatus And Method To Remove Solids From Material Lift Off Post Process Solvents
App 20180207562 - Taddei; John ; et al. | 2018-07-26 |
Method of etching the back of a wafer to expose TSVs
Grant 10,026,660 - Mauer , et al. July 17, 2 | 2018-07-17 |
Two-level Tape Frame Rinse Assembly
App 20180047612 - Breingan; William Gilbert ; et al. | 2018-02-15 |
Collection Chamber Apparatus To Separate Multiple Fluids During The Semiconductor Wafer Processing Cycle
App 20170294324 - Breingan; William Gilbert ; et al. | 2017-10-12 |
Apparatus and Method to Control Properties of Fluid Discharge Via Refrigerative Exhaust
App 20170284752 - Taddei; John ; et al. | 2017-10-05 |
Apparatus and Method to Improve Plasma Dicing and Backmetal Cleaving Process
App 20170287768 - Mauer; Laura ; et al. | 2017-10-05 |
Apparatus And Method To Control Etch Rate Through Adaptive Spiking Of Chemistry
App 20170287793 - Mauer; Laura ; et al. | 2017-10-05 |
System and method for flux coat, reflow and clean
Grant 9,694,436 - Breingan , et al. July 4, 2 | 2017-07-04 |
System and method for performing a wet etching process
Grant 9,698,062 - Mauer , et al. July 4, 2 | 2017-07-04 |
Apparatus and method for removing challenging polymer films and structures from semiconductor wafers
Grant 9,541,837 - Taddei , et al. January 10, 2 | 2017-01-10 |
Apparatus and Method for Mixing Fluids with Degradational Properties
App 20160288070 - Taddei; John ; et al. | 2016-10-06 |
Apparatus And Method For Metals Free Reduction And Control Of Resistivity Of Deionized Water
App 20160139610 - Taddei; John ; et al. | 2016-05-19 |
Apparatus And Method To Reduce And Control Resistivity Of Deionized Water
App 20160137534 - Taddei; John ; et al. | 2016-05-19 |
Apparatus and method to remove undissolved solids from post process dry film strip solvents
Grant 9,333,446 - Taddei , et al. May 10, 2 | 2016-05-10 |
System And Method For Performing A Wet Etching Process
App 20160126148 - Mauer; Laura ; et al. | 2016-05-05 |
System And Method For Flux Coat, Reflow And Clean
App 20150122876 - Breingan; William Gilbert ; et al. | 2015-05-07 |
Apparatus and Method for Removing Challenging Polymer Films and Structures from Semiconductor Wafers
App 20140377951 - Taddei; John ; et al. | 2014-12-25 |
Apparatus And Method To Remove Undissolved Solids From Post Process Dry Film Strip Solvents
App 20140305886 - Taddei; John ; et al. | 2014-10-16 |
System And Method For Performing A Wet Etching Process
App 20140242731 - Mauer; Laura ; et al. | 2014-08-28 |
Wet etching the edge and bevel of a silicon wafer
App 20060172538 - Itzkowitz; Herman ; et al. | 2006-08-03 |
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