| Patent | Date |
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Plasma processing apparatus and plasma processing method
Grant 8,513,137 - Ohmi , et al. August 20, 2 | 2013-08-20 |
Method Of Manufacturing A Transparent Member And Plastic Member
App 20120237684 - OHMI; Tadahiro ; et al. | 2012-09-20 |
Plasma Processing Method And Plasma Processing Apparatus
App 20120234491 - OHMI; Tadahiro ; et al. | 2012-09-20 |
Plasma processing method and plasma processing apparatus
Grant 8,198,195 - Ohmi , et al. June 12, 2 | 2012-06-12 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 8,047,225 - Ohmi , et al. November 1, 2 | 2011-11-01 |
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
Grant 8,030,182 - Ohmi , et al. October 4, 2 | 2011-10-04 |
Bonding Method And Resin Member Bonded Thereby
App 20110139334 - OHMI; TADAHIRO ; et al. | 2011-06-16 |
Method of Manufacturing a Transparent Member and Plastic Member
App 20100221495 - Ohmi; Tadahiro ; et al. | 2010-09-02 |
Method of Manufacturing Semiconductor Device and Semiconductor Manufacturing Apparatus
App 20100173477 - Ohmi; Tadahiro ; et al. | 2010-07-08 |
Vapor Deposition Apparatus
App 20100166956 - OHMI; Tadahiro ; et al. | 2010-07-01 |
Athmosphere-Controlled Bonding Apparatus, Bonding Method, and Electronic Device
App 20090272721 - Ohmi; Tadahiro ; et al. | 2009-11-05 |
Reduced Pressure Deposition Apparatus and Reduced Pressure Deposition Method
App 20090263566 - Ohmi; Tadahiro ; et al. | 2009-10-22 |
Semiconductor Device Manufacturing Method and Semiconductor Manufacturing Apparatus
App 20090162995 - Ohmi; Tadahiro ; et al. | 2009-06-25 |
Plasma Processing Method and Plasma Processing Apparatus
App 20090134120 - Ohmi; Tadahiro ; et al. | 2009-05-28 |
Fluorine-containing carbon film forming method
Grant 7,538,012 - Ohmi , et al. May 26, 2 | 2009-05-26 |
Plasma process apparatus and its processor
Grant 7,478,609 - Yamamoto , et al. January 20, 2 | 2009-01-20 |
Mask making method, mask making device, and mask drawing device
Grant 7,474,383 - Ohmi , et al. January 6, 2 | 2009-01-06 |
Apparatus for Producing Electronic Device Such as Display Device, Method of Producing Electronic Device Such as Display Device, and Electronic Device Such as Display Device
App 20080315201 - Ohmi; Tadahiro ; et al. | 2008-12-25 |
Data analysis device and data recognition device
Grant 7,436,999 - Ohmi , et al. October 14, 2 | 2008-10-14 |
Film-Forming Apparatus And Film-Forming Method
App 20080241587 - Ohmi; Tadahiro ; et al. | 2008-10-02 |
Substrate Processing Apparatus, Substrate Processing Method, And Substrate Planarization Method
App 20080220592 - Ohmi; Tadahiro ; et al. | 2008-09-11 |
Semiconductor device formed on (111) surface of a Si crystal and fabrication process thereof
App 20080128758 - Ohmi; Tadahiro ; et al. | 2008-06-05 |
Organic El Light Emitting Element, Manufacturing Method Thereof, and Display Device
App 20080054795 - Ohmi; Tadahiro ; et al. | 2008-03-06 |
Substrate processing method and substrate processing apparatus
Grant 7,329,609 - Ohmi , et al. February 12, 2 | 2008-02-12 |
Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system
App 20080003441 - Ohmi; Tadahiro ; et al. | 2008-01-03 |
Thin film transistor integrated circuit device, active matrix display device, and manufacturing methods of the same
App 20070222933 - Ohmi; Tadahiro | 2007-09-27 |
Circuit Board, Method Of Manufacturing Circuit Board, And Display Device Having Circuit Board
App 20070209200 - Ohmi; Tadahiro ; et al. | 2007-09-13 |
Complementary MIS device
App 20070096175 - Ohmi; Tadahiro ; et al. | 2007-05-03 |
Semiconductor device and method of manufacturing the same
App 20070023780 - Ohmi; Tadahiro ; et al. | 2007-02-01 |
Method of cleaning substrate processing apparatus
App 20060281323 - Ohmi; Tadahiro ; et al. | 2006-12-14 |
Vacuum treatment apparatus and vapor deposition apparatus
App 20060278162 - Ohmi; Tadahiro ; et al. | 2006-12-14 |
Substrate processing method and substrate processing apparatus
App 20060261037 - Ohmi; Tadahiro ; et al. | 2006-11-23 |
Electron beam exposure device and exposure method
App 20060252160 - Ohmi; Tadahiro ; et al. | 2006-11-09 |
Visible light-reflecting member
App 20060215409 - Ohmi; Tadahiro ; et al. | 2006-09-28 |
Semiconductor device and process for producing the same
App 20060214224 - Ohmi; Tadahiro ; et al. | 2006-09-28 |
Atmosphere-controlled resin-bonding apparatus, bonding method and resin member bonded thereby
App 20060196593 - Ohmi; Tadahiro ; et al. | 2006-09-07 |
Resin molding machine and member for resin molding machine having film in passive state
App 20060193940 - Ohmi; Tadahiro ; et al. | 2006-08-31 |
Plasma processing device
Grant 7,097,735 - Ohmi , et al. August 29, 2 | 2006-08-29 |
Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system for supplying fluid and exhausting gas
App 20060174977 - Ohmi; Tadahiro ; et al. | 2006-08-10 |
Diaphragm valve for the vacuum evacuation system
App 20060175573 - Ohmi; Tadahiro ; et al. | 2006-08-10 |
Circuit board, electronic device employing circuit board, and mehtod of producing circuit board
App 20060158865 - Ohmi; Tadahiro ; et al. | 2006-07-20 |
Pump
App 20060127245 - Ohmi; Tadahiro ; et al. | 2006-06-15 |
Antenna for portable terminal and portable terminal using same
App 20060119518 - Ohmi; Tadahiro ; et al. | 2006-06-08 |
Mask repeater and mask manufacturing method
App 20060104413 - Ohmi; Tadahiro ; et al. | 2006-05-18 |
Fluorescent lamp and method of manufacturing same
App 20060097641 - Ohmi; Tadahiro ; et al. | 2006-05-11 |
Data analysis device and data recognition device
App 20060088212 - Ohmi; Tadahiro ; et al. | 2006-04-27 |
Reactor for generating moisture
Grant 7,008,598 - Ohmi , et al. March 7, 2 | 2006-03-07 |
Flash memory device and fabrication process thereof, method of forming a dielectric film
Grant 7,001,855 - Ohmi , et al. February 21, 2 | 2006-02-21 |
Flash memory device and a fabrication process thereof, method of forming a dielectric film
Grant 6,998,355 - Ohmi , et al. February 14, 2 | 2006-02-14 |
Semiconductor Device And Its Manufacturing Method
App 20050272266 - Ohmi, Tadahiro ; et al. | 2005-12-08 |
Plasma device
App 20050250338 - Ohmi, Tadahiro ; et al. | 2005-11-10 |
Fluid coupling
App 20050225084 - Ohmi, Tadahiro ; et al. | 2005-10-13 |
Plasma processing method
Grant 6,893,970 - Kanetsuki , et al. May 17, 2 | 2005-05-17 |
Long life welding electrode and its fixing structure, welding head , and welding method
App 20050098543 - Ohmi, Tadahiro ; et al. | 2005-05-12 |
Semiconductor device formed on (111) surface of a Si crystal and fabrication process thereof
App 20050087831 - Ohmi, Tadahiro ; et al. | 2005-04-28 |
Vacuum apparatus
App 20040191079 - Ohmi, Tadahiro ; et al. | 2004-09-30 |
Flash memory device and a fabrication process thereof, method of forming a dielectric film
App 20040171216 - Ohmi, Tadahiro ; et al. | 2004-09-02 |
Flash memory device and a fabrication process thereof, method of forming a dielectric film
App 20040150031 - Ohmi, Tadahiro ; et al. | 2004-08-05 |
Flash memory device and a fabrication process thereof, method of forming a dielectric film
App 20040121538 - Ohmi, Tadahiro ; et al. | 2004-06-24 |
Semiconductor device and method of manufacturing the same
App 20040108575 - Ohmi, Tadahiro ; et al. | 2004-06-10 |
Fluid control apparatus
Grant 6,615,871 - Ohmi , et al. September 9, 2 | 2003-09-09 |
Method for forming oxidation-passive layer, fluid-contacting part, and fluid feed/discharge system
Grant 6,612,898 - Ohmi , et al. September 2, 2 | 2003-09-02 |
Air cooling device and air cooling method
App 20030150234 - Ohmi, Tadahiro ; et al. | 2003-08-14 |
Fluid control device
App 20020124894 - Ohmi, Tadahiro ; et al. | 2002-09-12 |
Fluid control device
Grant 6,408,879 - Ohmi , et al. June 25, 2 | 2002-06-25 |
Plasma process device
Grant 6,286,454 - Hirayama , et al. September 11, 2 | 2001-09-11 |
Fluid supply apparatus
Grant 6,178,995 - Ohmi , et al. January 30, 2 | 2001-01-30 |
Semiconductor devices utilizing silicide reaction
Grant 6,051,851 - Ohmi , et al. April 18, 2 | 2000-04-18 |
System for supervising piping work
Grant 6,018,136 - Ohmi , et al. January 25, 2 | 2000-01-25 |
Shutoff-opening device
Grant 5,988,217 - Ohmi , et al. November 23, 1 | 1999-11-23 |
Chemical mechanical polishing apparatus
Grant 5,931,722 - Ohmi , et al. August 3, 1 | 1999-08-03 |
Cleaning method for peeling and removing photoresist
Grant 5,858,106 - Ohmi , et al. January 12, 1 | 1999-01-12 |
Semiconductor integrated data matching circuit
Grant 5,661,421 - Ohmi , et al. August 26, 1 | 1997-08-26 |
Draft chamber
Grant 4,976,815 - Hiratsuka , et al. December 11, 1 | 1990-12-11 |
Process gas supply piping system
Grant 4,917,136 - Ohmi , et al. April 17, 1 | 1990-04-17 |
Cylinder cabinet piping system
Grant 4,869,301 - Ohmi , et al. September 26, 1 | 1989-09-26 |
Semiconductor memory
Grant 4,408,304 - Nishizawa , et al. October 4, 1 | 1983-10-04 |
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