TACHINO; Yusuke

Patent Applications and Registrations

Patent applications and USPTO patent grants for TACHINO; Yusuke.The latest application filed is for "metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor".

Company Profile

1.3.9

TACHINO; Yusuke - Nirasaki City JP
Tachino; Yusuke - Nirasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Metal Contamination Prevention Method and Apparatus, and Substrate Processing Method Using the Same and Apparatus Therefor App 20200040463 - TAKEZAWA; Yoshihiro ; et al.	2020-02-06
Method of controlling gas supply apparatus and substrate processing system Grant 9,758,867 - Nakajima , et al. September 12, 2	2017-09-12
Film forming method, film forming apparatus, and storage medium Grant 9,640,448 - Ikegawa , et al. May 2, 2	2017-05-02
Film Forming Method, Film Forming Apparatus, and Storage Medium App 20160284613 - IKEGAWA; Hiroaki ; et al.	2016-09-29
Heat treatment method Grant 9,422,624 - Nakajima , et al. August 23, 2	2016-08-23
Method of Forming Titanium Carbonitride Film and Film Formation Apparatus Therefor App 20150259792 - NAKAJIMA; Shigeru ; et al.	2015-09-17
Gas Supply Method And Thermal Treatment Method App 20150221529 - FURUYA; Haruhiko ; et al.	2015-08-06
Vertical Heat Treatment Apparatus, Heat Treatment Method And Storage Medium App 20150211113 - NAKAJIMA; Shigeru ; et al.	2015-07-30
Method Of Controlling Gas Supply Apparatus And Substrate Processing System App 20140290577 - NAKAJIMA; Shigeru ; et al.	2014-10-02
Gas Supply Apparatus And Film Forming Apparatus App 20130340678 - WAMURA; Yu ; et al.	2013-12-26
Gas Supply Apparatus And Heat Treatment Apparatus App 20130205611 - WAMURA; Yu ; et al.	2013-08-15
Gas Supply Apparatus, Thermal Treatment Apparatus, Gas Supply Method, And Thermal Treatment Method App 20120288625 - FURUYA; Haruhiko ; et al.	2012-11-15

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