Tabuchi; Hiroki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tabuchi; Hiroki.The latest application filed is for "method for forming a fine resist pattern".
- Tabuchi; Hiroki - Nara JP
| Patent | Date |
|---|---|
| Method for forming a fine resist pattern Grant 5,480,047 - Tanigawa , et al. January 2, 1 | 1996-01-02 |
| Lithographic process for producing small mask apertures and products thereof Grant 5,403,685 - Vidusek , et al. April 4, 1 | 1995-04-04 |
| Defect inspection system for phase shift masks Grant 5,353,116 - Tanigawa , et al. October 4, 1 | 1994-10-04 |
| Method for forming resist mask pattern by light exposure having a phase shifter pattern comprising convex forms in the resist Grant 5,330,862 - Tabuchi , et al. July 19, 1 | 1994-07-19 |
| Moisture-sensitive device Grant 5,048,336 - Sugihara , et al. September 17, 1 | 1991-09-17 |
| Sensor Grant 4,928,513 - Sugihara , et al. May 29, 1 | 1990-05-29 |
| Method of manufacturing platinum resistance thermometer Grant 4,805,296 - Jinda , et al. February 21, 1 | 1989-02-21 |
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