Tabata; Mitsuo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tabata; Mitsuo.The latest application filed is for "method of adjusting the level of a specimen surface".

Company Profile

0.11.3

Tabata; Mitsuo - Yokohama JP
Tabata, Mitsuo - Yokohama-shi JP
Tabata; Mitsuo - Kawasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Pattern inspection apparatus Grant 7,068,364 - Sugihara , et al. June 27, 2	2006-06-27
Pattern inspection apparatus and pattern inspection method Grant 6,909,501 - Ogawa , et al. June 21, 2	2005-06-21
Method of adjusting the level of a specimen surface App 20040114824 - Ogawa, Riki ; et al.	2004-06-17
Pattern inspection apparatus App 20040070753 - Sugihara, Shinji ; et al.	2004-04-15
Pattern inspection apparatus and pattern inspection method App 20020037099 - Ogawa, Riki ; et al.	2002-03-28
Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof Grant 5,744,381 - Tabata , et al. April 28, 1	1998-04-28
Pattern evaluation apparatus and a method of pattern evaluation Grant 5,602,645 - Tabata , et al. February 11, 1	1997-02-11
Method and system for generating a bit pattern Grant 5,404,410 - Tojo , et al. April 4, 1	1995-04-04
Method for aligning first and second objects relative to each other and apparatus for practicing this method Grant 4,811,062 - Tabata , et al. March 7, 1	1989-03-07
Position detector by vibrating a light beam for averaging the reflected light Grant 4,698,513 - Tojo , et al. October 6, 1	1987-10-06
Position detecting method for detecting the relative positions of the first and second members Grant 4,642,468 - Tabata , et al. February 10, 1	1987-02-10
Electron beam pattern transfer system having an autofocusing mechanism Grant 4,572,956 - Tojo , et al. February 25, 1	1986-02-25
Image processing system Grant 4,545,068 - Tabata , et al. October 1, 1	1985-10-01
Image memory device Grant 4,326,202 - Kidode , et al. April 20, 1	1982-04-20

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