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Patent applications and USPTO patent grants for Tabata; Masahiro.The latest application filed is for "apparatus for processing substrate".
Patent | Date |
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Apparatus For Processing Substrate App 20220293428 - Tabata; Masahiro ;   et al. | 2022-09-15 |
Workpiece Processing Method App 20220254635 - TABATA; Masahiro | 2022-08-11 |
Method of processing target object Grant 11,380,551 - Tabata , et al. July 5, 2 | 2022-07-05 |
Plasma Processing Method And Plasma Processing Apparatus App 20220165579 - TABATA; Masahiro | 2022-05-26 |
Workpiece processing method Grant 11,322,354 - Tabata May 3, 2 | 2022-05-03 |
Plasma Processing Method And Plasma Processing Apparatus App 20220115241 - Tabata; Masahiro ;   et al. | 2022-04-14 |
Plasma processing method and plasma processing apparatus Grant 11,289,339 - Tabata March 29, 2 | 2022-03-29 |
Plasma processing method and plasma processing apparatus Grant 11,239,090 - Tabata , et al. February 1, 2 | 2022-02-01 |
Method And Apparatus For Etching Target Object App 20220005700 - Kumakura; Sho ;   et al. | 2022-01-06 |
Film Etching Method For Etching Film App 20210384039 - HOSHI; Takayuki ;   et al. | 2021-12-09 |
Method For Processing Workpiece App 20210327719 - TABATA; Masahiro ;   et al. | 2021-10-21 |
Method and apparatus for etching target object Grant 11,145,518 - Kumakura , et al. October 12, 2 | 2021-10-12 |
Method of processing target object Grant 11,139,175 - Kihara , et al. October 5, 2 | 2021-10-05 |
Workpiece processing method Grant 11,133,192 - Tabata , et al. September 28, 2 | 2021-09-28 |
Film etching method for etching film Grant 11,127,598 - Hoshi , et al. September 21, 2 | 2021-09-21 |
Method for processing workpiece Grant 11,081,360 - Tabata , et al. August 3, 2 | 2021-08-03 |
Substrate And Substrate Processing Method App 20210050219 - Tabata; Masahiro ;   et al. | 2021-02-18 |
Plasma processing method Grant 10,923,332 - Asako , et al. February 16, 2 | 2021-02-16 |
Processing method and plasma processing apparatus Grant 10,916,420 - Tabata , et al. February 9, 2 | 2021-02-09 |
Apparatus For Processing Substrate App 20210025060 - TABATA; Masahiro | 2021-01-28 |
Method for etching organic region Grant 10,903,085 - Asako , et al. January 26, 2 | 2021-01-26 |
Apparatus For Substrate Processing App 20200381265 - Tabata; Masahiro ;   et al. | 2020-12-03 |
Method Of Processing Target Object App 20200381263 - Tabata; Masahiro ;   et al. | 2020-12-03 |
Workpiece Processing Method App 20200343091 - TABATA; Masahiro | 2020-10-29 |
Method and apparatus for processing substrate Grant 10,781,519 - Tabata Sept | 2020-09-22 |
Method of processing substrate Grant 10,777,425 - Tabata , et al. Sept | 2020-09-15 |
Film Forming Method App 20200273699 - Kumakura; Sho ;   et al. | 2020-08-27 |
Etching method and plasma processing apparatus Grant 10,755,944 - Tabata , et al. A | 2020-08-25 |
Workpiece processing method Grant 10,748,766 - Tabata A | 2020-08-18 |
Film Etching Method For Etching Film App 20200234970 - HOSHI; Takayuki ;   et al. | 2020-07-23 |
Processing method and plasma processing apparatus Grant 10,707,100 - Tabata , et al. | 2020-07-07 |
Apparatus For Selectively Etching First Region Made Of Silicon Nitride Against Second Region Made Of Silicon Oxide App 20200185238 - Tabata; Masahiro ;   et al. | 2020-06-11 |
Film forming method Grant 10,672,605 - Kumakura , et al. | 2020-06-02 |
Method Of Processing Target Object App 20200144071 - Kihara; Yoshihide ;   et al. | 2020-05-07 |
Workpiece Processing Method App 20200135480 - TABATA; Masahiro ;   et al. | 2020-04-30 |
Etching Method App 20200111679 - TABATA; Masahiro ;   et al. | 2020-04-09 |
Method of selectively etching first region made of silicon nitride against second region made of silicon oxide Grant 10,600,660 - Tabata , et al. | 2020-03-24 |
Method And Apparatus For Etching Target Object App 20200058512 - Kumakura; Sho ;   et al. | 2020-02-20 |
Workpiece processing method Grant 10,559,472 - Tabata , et al. Feb | 2020-02-11 |
Method of processing target object Grant 10,553,446 - Kihara , et al. Fe | 2020-02-04 |
Plasma Processing Method And Plasma Processing Apparatus App 20200035503 - TABATA; Masahiro | 2020-01-30 |
Plasma Processing Method And Plasma Processing Apparatus App 20200035501 - TABATA; Masahiro ;   et al. | 2020-01-30 |
Etching method Grant 10,541,147 - Tabata , et al. Ja | 2020-01-21 |
Processing Method And Plasma Processing Apparatus App 20190393031 - TABATA; Masahiro ;   et al. | 2019-12-26 |
Method And Apparatus For Processing Substrate App 20190382897 - TABATA; Masahiro | 2019-12-19 |
Processing Method And Plasma Processing Apparatus App 20190378730 - TABATA; Masahiro ;   et al. | 2019-12-12 |
Semiconductor manufacturing method and plasma processing apparatus Grant 10,504,741 - Nakaya , et al. Dec | 2019-12-10 |
Etching method Grant 10,483,118 - Kumakura , et al. Nov | 2019-11-19 |
Method of processing target object Grant 10,475,659 - Tabata , et al. Nov | 2019-11-12 |
Method Of Processing Target Object App 20190326125 - Kihara; Yoshihide ;   et al. | 2019-10-24 |
Plasma Processing Method App 20190326104 - ASAKO; Ryuichi ;   et al. | 2019-10-24 |
Method For Etching Organic Region App 20190326106 - ASAKO; Ryuichi ;   et al. | 2019-10-24 |
Method For Processing Workpiece App 20190259627 - TABATA; Masahiro ;   et al. | 2019-08-22 |
Etching Method And Plasma Processing Apparatus App 20190259626 - TABATA; Masahiro ;   et al. | 2019-08-22 |
Method Of Selectively Etching First Region Made Of Silicon Nitride Against Second Region Made Of Silicon Oxide App 20190252217 - Tabata; Masahiro ;   et al. | 2019-08-15 |
Method of processing target object Grant 10,381,236 - Kihara , et al. A | 2019-08-13 |
Method Of Processing Target Object App 20190214265 - Tabata; Masahiro ;   et al. | 2019-07-11 |
Method Of Processing Substrate App 20190198350 - Tabata; Masahiro ;   et al. | 2019-06-27 |
Method of selectively etching first region made of silicon nitride against second region made of silicon oxide Grant 10,319,613 - Tabata , et al. | 2019-06-11 |
Etching method Grant 10,269,578 - Kumakura , et al. | 2019-04-23 |
Method Of Processing Target Object App 20190088496 - Tabata; Masahiro ;   et al. | 2019-03-21 |
Workpiece Processing Method App 20190067019 - TABATA; Masahiro ;   et al. | 2019-02-28 |
Workpiece Processing Method App 20190067009 - TABATA; Masahiro | 2019-02-28 |
Method of processing target object Grant 10,217,643 - Tabata , et al. Feb | 2019-02-26 |
Etching Method App 20180330958 - Kumakura; Sho ;   et al. | 2018-11-15 |
Etching Method App 20180301346 - Kumakura; Sho ;   et al. | 2018-10-18 |
Film Forming Method App 20180301332 - Kumakura; Sho ;   et al. | 2018-10-18 |
Method Of Processing Target Object App 20180301347 - Kihara; Yoshihide ;   et al. | 2018-10-18 |
Semiconductor Manufacturing Method And Plasma Processing Apparatus App 20180247827 - NAKAYA; Michiko ;   et al. | 2018-08-30 |
Method Of Selectively Etching First Region Made Of Silicon Nitride Against Second Region Made Of Silicon Oxide App 20180166303 - Tabata; Masahiro ;   et al. | 2018-06-14 |
Method Of Processing Target Object App 20180061655 - Tabata; Masahiro ;   et al. | 2018-03-01 |
Etching Method App 20170011939 - TABATA; Masahiro ;   et al. | 2017-01-12 |
Sealing device, rolling bearing and rolling bearing for wheel Grant 8,678,660 - Tabata , et al. March 25, 2 | 2014-03-25 |
Sealing device Grant 8,557,904 - Tabata , et al. October 15, 2 | 2013-10-15 |
Sealing device, rolling bearing, and rolling bearing for wheel Grant 8,202,006 - Tabata , et al. June 19, 2 | 2012-06-19 |
Rolling device and rolling device manufacturing method Grant 8,063,002 - Kitahata , et al. November 22, 2 | 2011-11-22 |
Sealing apparatus and bearing apparatus having the same Grant 7,926,817 - Yamamoto , et al. April 19, 2 | 2011-04-19 |
Sealing device App 20100295254 - Tabata; Masahiro ;   et al. | 2010-11-25 |
Sealing Device, Rolling Bearing And Rolling Bearing For Wheel App 20100272382 - Yamamoto; Kazutoshi ;   et al. | 2010-10-28 |
Sealing Device, Rolling Bearing And Rolling Bearing For Wheel App 20100254647 - Tabata; Masahiro ;   et al. | 2010-10-07 |
Roller bearing cage and tapered roller bearing Grant 7,722,257 - Tabata , et al. May 25, 2 | 2010-05-25 |
Sealing Device, Rolling Bearing, And Rolling Bearing For Wheel App 20100104232 - Tabata; Masahiro ;   et al. | 2010-04-29 |
Rolling device and rolling device manufacturing method App 20080293598 - Kitahata; Kouji ;   et al. | 2008-11-27 |
Sealing apparatus and bearing apparatus having the same App 20080203670 - Yamamoto; Kazutoshi ;   et al. | 2008-08-28 |
Roller bearing cage and tapered roller bearing App 20070230852 - Tabata; Masahiro ;   et al. | 2007-10-04 |
Magneto-optical recording medium having multiple magnetic layers Grant 7,126,884 - Tabata October 24, 2 | 2006-10-24 |
Magneto-optical recording medium having a plurality of magnetic layers Grant 7,092,318 - Tabata August 15, 2 | 2006-08-15 |
Magneto-optical recording medium App 20030133366 - Tabata, Masahiro | 2003-07-17 |
Magneto-optical recording medium App 20030133367 - Tabata, Masahiro | 2003-07-17 |
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