Szuma; Liang
Patent Applications and Registrations
Patent applications and USPTO patent grants for Szuma; Liang.The latest application filed is for "method to prevent delamination of spin-on-glass and plasma nitride layers using ion implantation".
- Szuma; Liang - Hsin-Chu TW
- Szuma; Liang - Taipei TW
| Patent | Date |
|---|---|
| Method to prevent delamination of spin-on-glass and plasma nitride layers using ion implantation Grant 6,184,123 - Ge , et al. February 6, 2 | 2001-02-06 |
| Method for fabricating tungsten polycide contacts Grant 5,926,728 - Lee , et al. July 20, 1 | 1999-07-20 |
| Ion implantation for preventing polycide void Grant 5,924,001 - Yang , et al. July 13, 1 | 1999-07-13 |
| Use of WEE (wafer edge exposure) to prevent polyimide contamination Grant 5,824,457 - Liu , et al. October 20, 1 | 1998-10-20 |
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