Syomin; Denis
Patent Applications and Registrations
Patent applications and USPTO patent grants for Syomin; Denis.The latest application filed is for "method and apparatus for silicon oxide residue removal".
- Syomin; Denis - San Jose CA
- Syomin; Denis - Villach AT
- Syomin; Denis - Fremont CA
| Patent | Date |
|---|---|
| Method and apparatus for pattern collapse free wet processing of semiconductor devices Grant 8,440,573 - Mikhaylichenko , et al. May 14, 2 | 2013-05-14 |
| Method and apparatus for silicon oxide residue removal Grant 8,324,114 - Mikhaylichenko , et al. December 4, 2 | 2012-12-04 |
| Method And Apparatus For Silicon Oxide Residue Removal App 20110294299 - Mikhaylichenko; Katrina ; et al. | 2011-12-01 |
| Method And Apparatus For Pattern Collapse Free Wet Processing Of Semiconductor Devices App 20110183522 - Mikhaylichenko; Katrina ; et al. | 2011-07-28 |
| System And Method Of Preventing Pattern Collapse Using Low Surface Tension Fluid App 20110139183 - Mikhaylichenko; Katrina ; et al. | 2011-06-16 |
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