Swenberg; Johanes S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Swenberg; Johanes S..The latest application filed is for "argon addition to remote plasma oxidation".

Company Profile

16.15.20

Swenberg; Johanes S. - Los Gatos CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Argon addition to remote plasma oxidation Grant 11,081,340 - Lo , et al. August 3, 2	2021-08-03
Thin film treatment process Grant 10,971,357 - Liu , et al. April 6, 2	2021-04-06
Argon Addition To Remote Plasma Oxidation App 20200251331 - Kind Code	2020-08-06
Argon addition to remote plasma oxidation Grant 10,636,650 - Lo , et al.	2020-04-28
Thin Film Treatment Process App 20200111659 - LIU; Wei ; et al.	2020-04-09
Fluorination during ALD high-k, fluorination post high-k and use of a post fluorination anneal to engineer fluorine bonding and incorporation Grant 10,580,643 - Swenberg , et al.	2020-03-03
Hydrogenation and nitridization processes for modifying effective oxide thickness of a film Grant 10,510,545 - Graoui , et al. Dec	2019-12-17
Hydrogenation and nitridization processes for reducing oxygen content in a film Grant 10,504,779 - Swenberg , et al. Dec	2019-12-10
Hydrogenation and nitridization processes for modifying effective oxide thickness of a film Grant 10,431,466 - Swenberg , et al. O	2019-10-01
Modifying Work Function Of A Metal Film With A Plasma Process App 20190287805 - HUNG; Steven C. H. ; et al.	2019-09-19
Argon Addition To Remote Plasma Oxidation App 20190221427 - LO; Hansel ; et al.	2019-07-18
Modifying work function of a metal film with a plasma process Grant 10,347,492 - Hung , et al. July 9, 2	2019-07-09
Hydrogenation And Nitridization Processes For Modifying Effective Oxide Thickness Of A Film App 20190172716 - Graoui; Houda ; et al.	2019-06-06
Hydrogenation And Nitridization Processes For Reducing Oxygen Content In A Film App 20190157143 - SWENBERG; Johanes S. ; et al.	2019-05-23
Hydrogenation And Nitridization Processes For Modifying Effective Oxide Thickness Of A Film App 20190115219 - SWENBERG; Johanes S. ; et al.	2019-04-18
Gas Injector With Baffle App 20190105614 - PANDEY; Vishwas Kumar ; et al.	2019-04-11
Hydrogenation and nitridization processes for reducing oxygen content in a film Grant 10,236,207 - Swenberg , et al.	2019-03-19
Hydrogenation and nitridization processes for modifying effective oxide thickness of a film Grant 10,103,027 - Swenberg , et al. October 16, 2	2018-10-16
Modifying Work Function Of A Metal Film With A Plasma Process App 20180218911 - HUNG; Steven C. H. ; et al.	2018-08-02
Hydrogenation And Nitridization Processes For Reducing Oxygen Content In A Film App 20170365512 - SWENBERG; Johanes S. ; et al.	2017-12-21
Hydrogenation And Nitridization Processes For Modifying Effective Oxide Thickness Of A Film App 20170365480 - SWENBERG; Johanes S. ; et al.	2017-12-21
Fluorination During Ald High-k, Fluorination Post High-k And Use Of A Post Fluorination Anneal To Engineer Fluorine Bonding And Incorporation App 20170236702 - SWENBERG; Johanes S. ; et al.	2017-08-17
Method and apparatus for single step selective nitridation Grant 9,023,700 - Ganguly , et al. May 5, 2	2015-05-05
Method And Apparatus For Single Step Selective Nitridation App 20140342543 - GANGULY; Udayan ; et al.	2014-11-20
Remote radical hydride dopant incorporation for delta doping in silicon Grant 8,846,509 - Olsen , et al. September 30, 2	2014-09-30
Method and apparatus for single step selective nitridation Grant 8,748,259 - Ganguly , et al. June 10, 2	2014-06-10
Remote Radical Hydride Dopant Incorporation For Delta Doping In Silicon App 20130137249 - Olsen; Christopher S. ; et al.	2013-05-30
Method And Apparatus For Cleaning A Substrate Surface App 20130068390 - SANCHEZ; Errol Antonio C. ; et al.	2013-03-21
Dual Plasma Source, Lamp Heated Plasma Chamber App 20120222618 - Olsen; Christopher ; et al.	2012-09-06
Dual Zone Gas Injection Nozzle App 20120164845 - Liu; Wei ; et al.	2012-06-28
Dual zone gas injection nozzle Grant 8,137,463 - Liu , et al. March 20, 2	2012-03-20
Method And Apparatus For Single Step Selective Nitridation App 20110217834 - Ganguly; Udayan ; et al.	2011-09-08
Dual Zone Gas Injection Nozzle App 20090159424 - Liu; Wei ; et al.	2009-06-25

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