Swedek; Bogdan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Swedek; Bogdan.The latest application filed is for "apparatus and methods for acoustical monitoring and control of through-silicon-via reveal processing".
- Swedek; Bogdan - Sunnyvale CA
- Swedek; Bogdan - Cupertino CA
| Patent | Date |
|---|---|
| Apparatus And Methods For Acoustical Monitoring And Control Of Through-silicon-via Reveal Processing App 20140329439 - Chew; Xiong Yeu ; et al. | 2014-11-06 |
| Peak-based Endpointing For Chemical Mechanical Polishing App 20110287694 - Benvegnu; Dominic J. ; et al. | 2011-11-24 |
| Method Of Making Polishing Pad Assembly With Glass Or Crystalline Window App 20110209412 - Benvegnu; Dominic J. ; et al. | 2011-09-01 |
| Peak-based endpointing for chemical mechanical polishing Grant 7,998,358 - Benvegnu , et al. August 16, 2 | 2011-08-16 |
| Polishing pad assembly with glass or crystalline window Grant 7,938,714 - Benvegnu , et al. May 10, 2 | 2011-05-10 |
| Removable optical monitoring system for chemical mechanical polishing Grant 7,931,522 - Benvegnu , et al. April 26, 2 | 2011-04-26 |
| Spectrum Based Endpointing For Chemical Mechanical Polishing App 20100284007 - Benvegnu; Dominic J. ; et al. | 2010-11-11 |
| Spectrum based endpointing for chemical mechanical polishing Grant 7,764,377 - Benvegnu , et al. July 27, 2 | 2010-07-27 |
| Friction sensor for polishing system Grant 7,727,049 - Benvegnu , et al. June 1, 2 | 2010-06-01 |
| Polishing Pad Assembly With Glass Or Crystalline Window App 20100075582 - Benvegnu; Dominic J. ; et al. | 2010-03-25 |
| Removable Optical Monitoring System For Chemical Mechanical Polishing App 20100035519 - Benvegnu; Dominic J. ; et al. | 2010-02-11 |
| Polishing system with optical head Grant 7,651,385 - Benvegnu , et al. January 26, 2 | 2010-01-26 |
| Polishing pad assembly with glass or crystalline window Grant 7,614,933 - Benvegnu , et al. November 10, 2 | 2009-11-10 |
| Spectrum based endpointing for chemical mechanical polishing Grant 7,614,936 - Benvegnu , et al. November 10, 2 | 2009-11-10 |
| Peak-based Endpointing For Chemical Mechanical Polishing App 20080099443 - Benvegnu; Dominic J. ; et al. | 2008-05-01 |
| Polishing Pad Assembly With Glass Or Crystalline Window App 20080102734 - Benvegnu; Dominic J. ; et al. | 2008-05-01 |
| Optical head for chemical mechanical polishing App 20080009227 - Benvegnu; Dominic J. ; et al. | 2008-01-10 |
| Polishing pad assembly with glass or crystalline window Grant 7,306,507 - Benvegnu , et al. December 11, 2 | 2007-12-11 |
| Spectrum Based Endpointing For Chemical Mechanical Polishing App 20070218812 - Benvegnu; Dominic J. ; et al. | 2007-09-20 |
| Spectrum based endpointing for chemical mechanical polishing Grant 7,226,339 - Benvegnu , et al. June 5, 2 | 2007-06-05 |
| Sealed polishing pad, system and methods Grant 7,210,980 - Swedek , et al. May 1, 2 | 2007-05-01 |
| Friction Sensor For Polishing System App 20070087662 - Benvegnu; Dominic J. ; et al. | 2007-04-19 |
| Sealed Polishing Pad, System And Methods App 20070049167 - Swedek; Bogdan ; et al. | 2007-03-01 |
| Spectrum based endpointing for chemical mechanical polishing App 20070042681 - Benvegnu; Dominic J. ; et al. | 2007-02-22 |
| Spectrum based endpointing for chemical mechanical polishing App 20070042675 - Benvegnu; Dominic J. ; et al. | 2007-02-22 |
| Spectrum based endpointing for chemical mechanical polishing App 20070042680 - Benvegnu; Dominic J. ; et al. | 2007-02-22 |
| System with sealed polishing pad Grant 7,163,437 - Swedek , et al. January 16, 2 | 2007-01-16 |
| Sealed polishing pad methods Grant 7,112,119 - Swedek , et al. September 26, 2 | 2006-09-26 |
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