Svizher; Alexander
Patent Applications and Registrations
Patent applications and USPTO patent grants for Svizher; Alexander.The latest application filed is for "metrology targets and methods with oblique periodic structures".
- Svizher; Alexander - Haifa IL
| Patent | Date |
|---|---|
| Misregistration metrology by using fringe Moire and optical Moire effects Grant 11,164,307 - Feler , et al. November 2, 2 | 2021-11-02 |
| Metrology targets and methods with oblique periodic structures Grant 11,137,692 - Feler , et al. October 5, 2 | 2021-10-05 |
| Rotated boundaries of stops and targets Grant 10,761,022 - Grunzweig , et al. Sep | 2020-09-01 |
| Quick adjustment of metrology measurement parameters according to process variation Grant 10,699,969 - Peled , et al. | 2020-06-30 |
| Metrology Targets And Methods With Oblique Periodic Structures App 20200124982 - Feler; Yoel ; et al. | 2020-04-23 |
| Symmetric target design in scatterometry overlay metrology Grant 10,591,406 - Bringoltz , et al. | 2020-03-17 |
| Fault discrimination and calibration of scatterometry overlay targets Grant 10,527,952 - Grunzweig , et al. J | 2020-01-07 |
| Quick Adjustment Of Metrology Measurement Parameters According To Process Variation App 20190074227 - Peled; Einat ; et al. | 2019-03-07 |
| Systems for providing illumination in optical metrology Grant 10,203,247 - Brady , et al. Feb | 2019-02-12 |
| Fault Discrimination and Calibration of Scatterometry Overlay Targets App 20180373167 - Grunzweig; Tzahi ; et al. | 2018-12-27 |
| Decreasing inaccuracy due to non-periodic effects on scatterometric signals Grant 9,851,300 - Bringoltz , et al. December 26, 2 | 2017-12-26 |
| Symmetric target design in scatterometry overlay metrology Grant 9,739,702 - Bringoltz , et al. August 22, 2 | 2017-08-22 |
| Systems for Providing Illumination in Optical Metrology App 20170146399 - Brady; Gregory R. ; et al. | 2017-05-25 |
| Phase characterization of targets Grant 9,581,430 - Manassen , et al. February 28, 2 | 2017-02-28 |
| Systems for providing illumination in optical metrology Grant 9,512,985 - Brady , et al. December 6, 2 | 2016-12-06 |
| Symmetric Target Design In Scatterometry Overlay Metrology App 20160216197 - Bringoltz; Barak ; et al. | 2016-07-28 |
| Rotated Boundaries Of Stops And Targets App 20160209327 - Grunzweig; Tzahi ; et al. | 2016-07-21 |
| Optics symmetrization for metrology Grant 9,164,397 - Manassen , et al. October 20, 2 | 2015-10-20 |
| Symmetric Target Design In Scatterometry Overlay Metrology App 20150204664 - Bringoltz; Barak ; et al. | 2015-07-23 |
| Metrology systems and methods Grant 9,080,971 - Kandel , et al. July 14, 2 | 2015-07-14 |
| Metrology Systems and Methods App 20150036142 - Kandel; Daniel ; et al. | 2015-02-05 |
| Discrete polarization scatterometry Grant 8,896,832 - Hill , et al. November 25, 2 | 2014-11-25 |
| Metrology systems and methods Grant 8,873,054 - Kandel , et al. October 28, 2 | 2014-10-28 |
| Systems for Providing Illumination in Optical Metrology App 20140240951 - Brady; Gregory R. ; et al. | 2014-08-28 |
| Phase Characterization Of Targets App 20140111791 - Manassen; Amnon ; et al. | 2014-04-24 |
| Metrology Systems and Methods App 20130229661 - Kandel; Daniel ; et al. | 2013-09-05 |
| Metrology systems and methods Grant 8,441,639 - Kandel , et al. May 14, 2 | 2013-05-14 |
| Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Grant 8,390,808 - Levinski , et al. March 5, 2 | 2013-03-05 |
| Enhanced OVL dummy field enabling "on-the-fly" OVL measurement methods Grant 8,243,273 - Levinski , et al. August 14, 2 | 2012-08-14 |
| Optics Symmetrization For Metrology App 20120033226 - Manassen; Amnon ; et al. | 2012-02-09 |
| Discrete Polarization Scatterometry App 20110310388 - Hill; Andrew V. ; et al. | 2011-12-22 |
| Metrology Systems And Methods App 20110069312 - Kandel; Daniel ; et al. | 2011-03-24 |
| Enhanced Ovl dummy field enabling "on-the-fly" ovl measurement methods App 20090303482 - Levinski; Vladimir ; et al. | 2009-12-10 |
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