Patent | Date |
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Gas Concentration Detection Method, Gas Concentration Detection Device, And Gas Generation System App 20220113271 - KATO; Takeshi ;   et al. | 2022-04-14 |
Condenser microphone array chip Grant 8,416,970 - Sakurauchi , et al. April 9, 2 | 2013-04-09 |
Condenser Microphone Array Chip App 20120082325 - Sakurauchi; Kazushi ;   et al. | 2012-04-05 |
Condenser microphone Grant 8,126,167 - Hirade , et al. February 28, 2 | 2012-02-28 |
Capacitor microphone Grant 8,059,842 - Suzuki , et al. November 15, 2 | 2011-11-15 |
MEMS transducer Grant 7,888,754 - Omura , et al. February 15, 2 | 2011-02-15 |
Method of making capacitance sensor Grant 7,805,821 - Suzuki October 5, 2 | 2010-10-05 |
Method of manufacturing semiconductor device having side wall spacers Grant 7,611,952 - Suzuki November 3, 2 | 2009-11-03 |
Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith Grant 7,584,662 - Suzuki September 8, 2 | 2009-09-08 |
Mems transducer and manufacturing method therefor App 20090200620 - Omura; Masayoshi ;   et al. | 2009-08-13 |
Vibration transducer App 20090190782 - Suzuki; Tamito ;   et al. | 2009-07-30 |
Vibration transducer and manufacturing method therefor App 20090136064 - Suzuki; Tamito ;   et al. | 2009-05-28 |
Condenser microphone App 20090060232 - Hirade; Seiji ;   et al. | 2009-03-05 |
Micro structure with interlock configuration Grant 7,492,020 - Suzuki February 17, 2 | 2009-02-17 |
Sensor, and method for measuring physical quantity by use of the sensor Grant 7,443,158 - Oohashi , et al. October 28, 2 | 2008-10-28 |
Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith Grant 7,434,463 - Suzuki October 14, 2 | 2008-10-14 |
Capacitance Sensor And Its Manufacturing Method App 20080047128 - SUZUKI; Tamito | 2008-02-28 |
Condenser Microphone App 20070286438 - Hirade; Seiji ;   et al. | 2007-12-13 |
Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith App 20070220975 - Suzuki; Tamito | 2007-09-27 |
Capacitor Microphone And Diaphragm Therefor App 20070121972 - Suzuki; Yukitoshi ;   et al. | 2007-05-31 |
Capacitor Microphone App 20070058825 - Suzuki; Yukitoshi ;   et al. | 2007-03-15 |
Acceleration measurement method using electrostatic-capacity-type acceleration sensor Grant 7,150,192 - Suzuki December 19, 2 | 2006-12-19 |
Method of manufacturing semiconductor device having side wall spacers App 20060157752 - Suzuki; Tamito | 2006-07-20 |
Micro structure with interlock configuration Grant 7,071,017 - Suzuki July 4, 2 | 2006-07-04 |
Sensor, and method for measuring physical quantity by use of the sensor App 20060066303 - Oohashi; Toshiyuki ;   et al. | 2006-03-30 |
Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith Grant 7,004,027 - Suzuki February 28, 2 | 2006-02-28 |
Micro structure with interlock configuration App 20060038301 - Suzuki; Tamito | 2006-02-23 |
Polysilicon etching method Grant 6,995,093 - Suzuki February 7, 2 | 2006-02-07 |
Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith App 20050279167 - Suzuki, Tamito | 2005-12-22 |
Micro structure with interlock configuration App 20050032266 - Suzuki, Tamito | 2005-02-10 |
Acceleration measurement method using electrostatic-capacity-type acceleration sensor App 20050022599 - Suzuki, Tamito | 2005-02-03 |
Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith App 20040226375 - Suzuki, Tamito | 2004-11-18 |
Polysilicon etching method App 20040082184 - Suzuki, Tamito | 2004-04-29 |