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Patent applications and USPTO patent grants for Suzukawa; Hiroki.The latest application filed is for "exposure apparatus and device manufacturing method".
Patent | Date |
---|---|
Exposure Apparatus And Device Manufacturing Method App 20120274916 - Shiroiwa; Masataro ;   et al. | 2012-11-01 |
Exposure apparatus and device manufacturing method Grant 8,248,584 - Shiroiwa , et al. August 21, 2 | 2012-08-21 |
Exposure Apparatus And Device Manufacturing Method App 20090225292 - Shiroiwa; Masataro ;   et al. | 2009-09-10 |
Exposure method and exposure apparatus Grant 6,784,974 - Suzukawa August 31, 2 | 2004-08-31 |
Apparatus including user interface and method regarding user interface App 20040128005 - Suzukawa, Hiroki | 2004-07-01 |
Parameter editing method and semiconductor exposure system Grant 6,499,007 - Kuroki , et al. December 24, 2 | 2002-12-24 |
Mark detecting method and apparatus Grant 4,962,423 - Yamada , et al. October 9, 1 | 1990-10-09 |
Method of detecting position of a mark Grant 4,933,715 - Yamada , et al. June 12, 1 | 1990-06-12 |
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