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Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device And Vaporizer App 20220186368 - MORIKAWA; Atsushi ;   et al. | 2022-06-16 |
Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer Grant 11,293,096 - Morikawa , et al. April 5, 2 | 2022-04-05 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium App 20220093386 - NONOMURA; Kazuki ;   et al. | 2022-03-24 |
Vaporizer, Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20210292895 - LI; Gen ;   et al. | 2021-09-23 |
Cleaning Method, Method Of Manufacturing Semiconductor Device, And Substrate Processing Apparatus App 20210193486 - LI; Gen ;   et al. | 2021-06-24 |
Substrate processing apparatus and precursor gas nozzle Grant 11,020,760 - Fujino , et al. June 1, 2 | 2021-06-01 |
Vaporizer, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20210079523 - YAMAZAKI; Hirohisa ;   et al. | 2021-03-18 |
Substrate Processing Apparatus, Substrate Support, And Method Of Manufacturing Semiconductor Device App 20210035835 - Suzaki; Kenichi | 2021-02-04 |
Substrate processing apparatus, liquid precursor replenishment system, and method of manufacturing semiconductor device Grant 10,876,207 - Isobe , et al. December 29, 2 | 2020-12-29 |
Substrate Processing Apparatus, Liquid Precursor Replenishment System, And Method Of Manufacturing Semiconductor Device App 20190211449 - ISOBE; Noriyuki ;   et al. | 2019-07-11 |
Gas supply nozzle Grant D828,091 - Fujino , et al. September 11, 2 | 2018-09-11 |
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device And Vaporizer App 20180135176 - MORIKAWA; Atsushi ;   et al. | 2018-05-17 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 9,970,112 - Koshi , et al. May 15, 2 | 2018-05-15 |
Substrate Processing Apparatus And Precursor Gas Nozzle App 20170232457 - FUJINO; Toshiki ;   et al. | 2017-08-17 |
Method of manufacturing semiconductor device Grant 9,708,708 - Isobe , et al. July 18, 2 | 2017-07-18 |
Method of Manufacturing Semiconductor Device App 20170067159 - ISOBE; Noriyuki ;   et al. | 2017-03-09 |
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium Grant 9,390,916 - Hirose , et al. July 12, 2 | 2016-07-12 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium App 20150287594 - HIROSE; Yoshiro ;   et al. | 2015-10-08 |
Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium Grant 9,093,270 - Hirose , et al. July 28, 2 | 2015-07-28 |
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20150176130 - KOSHI; Yasunobu ;   et al. | 2015-06-25 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,999,858 - Koshi , et al. April 7, 2 | 2015-04-07 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium App 20140179085 - HIROSE; Yoshiro ;   et al. | 2014-06-26 |
Producing method of semiconductor device and substrate processing apparatus Grant 8,636,882 - Suzaki , et al. January 28, 2 | 2014-01-28 |
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20130164943 - Koshi; Yasunobu ;   et al. | 2013-06-27 |
Substrate processing apparatus Grant 8,231,731 - Suzaki , et al. July 31, 2 | 2012-07-31 |
Method of manufacturing semiconductor device and apparatus for processing substrate Grant 8,227,030 - Noda , et al. July 24, 2 | 2012-07-24 |
Method of manufacturing semiconductor device and apparatus for processing substrate Grant 8,221,835 - Noda , et al. July 17, 2 | 2012-07-17 |
Substrate treating apparatus and method for manufacturing semiconductor device Grant 8,211,798 - Ozaki , et al. July 3, 2 | 2012-07-03 |
Substrate Processing Apparatus And Method Of Processing Substrate App 20120052203 - Miyashita; Tomoyasu ;   et al. | 2012-03-01 |
Producing Method Of Semiconductor Device And Substrate Processing Apparatus App 20110239936 - SUZAKI; Kenichi ;   et al. | 2011-10-06 |
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20110217852 - SUZAKI; Kenichi ;   et al. | 2011-09-08 |
Substrate treating apparatus and method for manufacturing semiconductor device App 20110131804 - Ozaki; Takashi ;   et al. | 2011-06-09 |
Producing method of a semiconductor device using CVD processing Grant 7,955,991 - Suzaki , et al. June 7, 2 | 2011-06-07 |
Substrate treating apparatus and method for manufacturing semiconductor device Grant 7,915,165 - Ozaki , et al. March 29, 2 | 2011-03-29 |
Substrate treating apparatus and method for manufacturing semiconductor device App 20100201055 - Ozaki; Takashi ;   et al. | 2010-08-12 |
Substrate treating apparatus and method for manufacturing semiconductor device Grant 7,737,034 - Ozaki , et al. June 15, 2 | 2010-06-15 |
Substrate treating apparatus and semiconductor device manufacturing method Grant 7,731,797 - Nakashima , et al. June 8, 2 | 2010-06-08 |
Producing Method Of Semiconductor Device And Substrate Processing Apparatus App 20090239386 - SUZAKI; Kenichi ;   et al. | 2009-09-24 |
Method of manufacturing semiconductor device and apparatus for processing substrate App 20090205567 - Noda; Takaaki ;   et al. | 2009-08-20 |
Method of manufacturing semiconductor device and apparatus for processing substrate App 20090181523 - Noda; Takaaki ;   et al. | 2009-07-16 |
Method of manufacturing semiconductor device and apparatus for processing substrate App 20090181524 - Noda; Takaaki ;   et al. | 2009-07-16 |
Method of manufacturing semiconductor device and apparatus for processing substrate Grant 7,556,839 - Noda , et al. July 7, 2 | 2009-07-07 |
Manufacturing Method Of Semiconductor Device And Substrate Processing Apparatus App 20080268644 - Kameda; Kenji ;   et al. | 2008-10-30 |
Substrate Treating Apparatus and Semiconductor Device Manufacturing Method App 20080134977 - Nakashima; Seiyo ;   et al. | 2008-06-12 |
Producing Method of Semiconductor Device and Substrate Processing Apparatus App 20070259532 - Suzaki; Kenichi ;   et al. | 2007-11-08 |
Method of manufacturing semiconductor device and apparatus for processing substrate App 20070178669 - Noda; Takaaki ;   et al. | 2007-08-02 |
Substrate treating apparatus and method for manufacturing semiconductor device App 20060205213 - Ozaki; Takashi ;   et al. | 2006-09-14 |
Method for manufacturing semiconductor device Grant 6,790,793 - Nishino , et al. September 14, 2 | 2004-09-14 |
Method for fabricating a semiconductor device and a substrate processing apparatus Grant 6,720,274 - Ozaki , et al. April 13, 2 | 2004-04-13 |
Method for manufacturing semiconductor device App 20030224615 - Nishino, Yutaka ;   et al. | 2003-12-04 |
Method for fabricating a semiconductor device and a substrate processing apparatus App 20030092283 - Ozaki, Takashi ;   et al. | 2003-05-15 |