Suuronen; David E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Suuronen; David E..The latest application filed is for "system and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station".

Company Profile

3.16.12

Suuronen; David E. - Newburyport MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and method for reduced workpiece adhesion due to electrostatic charge during removal from a processing station Grant 10,825,645 - Wilson , et al. November 3, 2	2020-11-03
Platen for reducing particle contamination on a substrate and a method thereof Grant 10,658,207 - Suuronen , et al.	2020-05-19
System And Method For Reduced Workpiece Adhesion Due To Electrostatic Charge During Removal From A Processing Station App 20190057835 - Wilson; Eric D. ; et al.	2019-02-21
System and method for in situ temperature measurement Grant 10,113,917 - Suuronen October 30, 2	2018-10-30
Platen For Reducing Particle Contamination On A Substrate and a Method Thereof App 20180233386 - Suuronen; David E. ; et al.	2018-08-16
Platen for reducing particle contamination on a substrate and a method thereof Grant 9,953,849 - Suuronen , et al. April 24, 2	2018-04-24
Method for implantation of semiconductor wafers having high bulk resistivity Grant 9,824,857 - Osborne , et al. November 21, 2	2017-11-21
Method For Implantation Of Semiconductor Wafers Having High Bulk Resistivity App 20170207063 - Osborne; Michael W. ; et al.	2017-07-20
System And Method For In Situ Temperature Measurement App 20170131154 - Suuronen; David E.	2017-05-11
System and method for analyzing voltage breakdown in electrostatic chucks Grant 9,417,280 - Suuronen , et al. August 16, 2	2016-08-16
Platen For Reducing Particle Contamination On A Substrate And A Method Thereof App 20150279704 - Suuronen; David E. ; et al.	2015-10-01
System And Method For Analyzing Voltage Breakdown In Electrostatic Chucks App 20140324372 - Suuronen; David E. ; et al.	2014-10-30
Platen ground pin for connecting substrate to ground Grant 8,681,472 - Suuronen , et al. March 25, 2	2014-03-25
Platen clamping surface monitoring Grant 8,592,786 - Suuronen , et al. November 26, 2	2013-11-26
Platen Clamping Surface Monitoring App 20130248738 - Suuronen; David E. ; et al.	2013-09-26
Removal of charge between a substrate and an electrostatic clamp Grant 8,531,814 - Stone , et al. September 10, 2	2013-09-10
Platen To Control Charge Accumulation App 20110036990 - Stone; Dale K. ; et al.	2011-02-17
Removal Of Charge Between A Substrate And An Electrostatic Clamp App 20100265631 - Stone; Dale K. ; et al.	2010-10-21
Platen For Reducing Particle Contamination On A Substrate And A Method Thereof App 20090317964 - SUURONEN; David E. ; et al.	2009-12-24
Clamp for use in processing semiconductor workpieces Grant 7,595,972 - Muka , et al. September 29, 2	2009-09-29
Clamp for use in processing semiconductor workpieces App 20060171094 - Muka; Richard ; et al.	2006-08-03
Clamp for use in processing semiconductor workpieces App 20060012939 - Suuronen; David E. ; et al.	2006-01-19
Current limiting fuse Grant 5,426,411 - Pimpis , et al. June 20, 1	1995-06-20
Fuse with thin film fusible element supported on a substrate Grant 5,115,220 - Suuronen , et al. May 19, 1	1992-05-19
Thin film fusible element Grant 5,091,712 - Suuronen February 25, 1	1992-02-25
Cartridge fuse terminal adapter Grant 4,950,195 - Perreault , et al. August 21, 1	1990-08-21

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