Suto; Yasunari

Patent Applications and Registrations

Patent applications and USPTO patent grants for Suto; Yasunari.The latest application filed is for "substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus".

Company Profile

0.9.11

Suto; Yasunari - Tokyo JP
Suto; Yasunari - Kanagawa JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus Grant 10,134,614 - Tada , et al. November 20, 2	2018-11-20
Substrate Peripheral Portion Measuring Device, And Substrate Peripheral Portion Polishing Apparatus App 20150101752 - TADA; Mitsuo ; et al.	2015-04-16
Substrate polishing apparatus and substrate polishing method Grant 7,854,646 - Togawa , et al. December 21, 2	2010-12-21
Method of detecting characteristics of films using eddy current Grant 7,714,572 - Tada , et al. May 11, 2	2010-05-11
Substrate Polishing Apparatus And Substrate Polishing Method App 20100112901 - TOGAWA; Tetsuji ; et al.	2010-05-06
Substrate polishing apparatus and substrate polishing method Grant 7,670,206 - Togawa , et al. March 2, 2	2010-03-02
Eddy current sensor Grant 7,508,201 - Tada , et al. March 24, 2	2009-03-24
Substrate Peripheral Portion Measuring Device, and Substrate Peripheral Portion Polishing Apparatus App 20080274670 - Tada; Mitsuo ; et al.	2008-11-06
Substrate Polishing Apparatus And Substrate Polishing Method App 20080139087 - Togawa; Tetsuji ; et al.	2008-06-12
Eddy current sensor App 20070103150 - Tada; Mitsuo ; et al.	2007-05-10
Polishing device using eddy current sensor App 20060214657 - Tada; Mitsuo ; et al.	2006-09-28
Measuring apparatus App 20060164104 - Tada; Mitsuo ; et al.	2006-07-27
Polishing device using eddy current sensor Grant 7,078,894 - Tada , et al. July 18, 2	2006-07-18
Frequency measuring device, polishing device using the same and eddy current sensor Grant 7,046,001 - Tada , et al. May 16, 2	2006-05-16
Measuring apparatus Grant 6,935,935 - Tada , et al. August 30, 2	2005-08-30
Measuring apparatus App 20040203328 - Tada, Mitsuo ; et al.	2004-10-14
Measuring apparatus Grant 6,746,319 - Tada , et al. June 8, 2	2004-06-08
Frequency measuring device, polishing device using the same and eddy current sensor App 20040032256 - Tada, Mitsuo ; et al.	2004-02-19
Measuring apparatus App 20030032377 - Tada, Mitsuo ; et al.	2003-02-13
Frequency measuring device, polishing device using the same and eddy current sensor App 20020047705 - Tada, Mitsuo ; et al.	2002-04-25

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