loadpatents
Patent applications and USPTO patent grants for SUTO; Takeshi.The latest application filed is for "template, workpiece, and alignment method".
Patent | Date |
---|---|
Template, Workpiece, And Alignment Method App 20220308440 - SATO; Takashi ;   et al. | 2022-09-29 |
Imprint method, imprint apparatus, and template Grant 10,782,621 - Shimizu , et al. Sept | 2020-09-22 |
Imprint Method, Imprint Apparatus, And Template App 20190302614 - SHIMIZU; Mitsuko ;   et al. | 2019-10-03 |
Imprint apparatus and imprint method Grant 10,290,498 - Mitsugi , et al. | 2019-05-14 |
Imprint Apparatus And Imprint Method App 20190080899 - MITSUGI; Satoshi ;   et al. | 2019-03-14 |
Imprint Method, Imprint Apparatus, And Template App 20170235239 - SHIMIZU; Mitsuko ;   et al. | 2017-08-17 |
Pattern formation method and exposure apparatus Grant 9,500,961 - Sato , et al. November 22, 2 | 2016-11-22 |
Pattern Formation Method And Exposure Apparatus App 20160238947 - SATO; Takashi ;   et al. | 2016-08-18 |
Removable pressure-sensitive adhesive and adhesive sheet of the same Grant 6,869,678 - Yamanaka , et al. March 22, 2 | 2005-03-22 |
Removable pressure-sensitive adhesive and adhesive sheet of the same App 20030124346 - Yamanaka, Takeshi ;   et al. | 2003-07-03 |
Projection exposure apparatus Grant 4,931,830 - Suwa , et al. June 5, 1 | 1990-06-05 |
Apparatus for measuring dimensions of micropattern Grant 4,744,662 - Suto , et al. May 17, 1 | 1988-05-17 |
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