Patent | Date |
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Image processor, method for generating pattern using self-organizing lithographic techniques and computer program Grant 10,732,512 - Sutani , et al. | 2020-08-04 |
Image Processor, Method for Generating Pattern Using Self-Organizing Lithographic Techniques and Computer Program App 20180181009 - SUTANI; Takumichi ;   et al. | 2018-06-28 |
Image Processor, Method For Generating Pattern Using Self- Organizing Lithographic Techniques And Computer Program App 20150277237 - Sutani; Takumichi ;   et al. | 2015-10-01 |
Method and apparatus for creating imaging recipe Grant RE45,224 - Miyamoto , et al. October 28, 2 | 2014-10-28 |
Method and apparatus for creating imaging recipe Grant RE45,204 - Miyamoto , et al. October 21, 2 | 2014-10-21 |
Method of OPC model building, information-processing apparatus, and method of determining process conditions of semiconductor device Grant 8,788,981 - Kijima , et al. July 22, 2 | 2014-07-22 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 8,577,124 - Toyoda , et al. November 5, 2 | 2013-11-05 |
Pattern measuring method and pattern measuring device Grant 8,507,856 - Sutani , et al. August 13, 2 | 2013-08-13 |
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus Grant 8,338,804 - Morokuma , et al. December 25, 2 | 2012-12-25 |
Method and apparatus for inspecting defect of pattern formed on semiconductor device Grant 8,331,651 - Nishiura , et al. December 11, 2 | 2012-12-11 |
Pattern Measuring Method And Pattern Measuring Device App 20120211653 - SUTANI; Takumichi ;   et al. | 2012-08-23 |
Pattern matching method and computer program for executing pattern matching Grant 8,244,042 - Sugiyama , et al. August 14, 2 | 2012-08-14 |
Electron microscope for inspecting dimension and shape of a pattern formed on a wafer Grant 8,199,191 - Sato , et al. June 12, 2 | 2012-06-12 |
Pattern displacement measuring method and pattern measuring device Grant 8,173,962 - Sutani , et al. May 8, 2 | 2012-05-08 |
Method And Apparatus Of Pattern Inspection And Semiconductor Inspection System Using The Same App 20120099781 - TOYODA; Yasutaka ;   et al. | 2012-04-26 |
Defect inspection device and defect inspection method for inspecting whether a product has defects Grant 8,131,059 - Taguchi , et al. March 6, 2 | 2012-03-06 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 8,115,169 - Toyoda , et al. February 14, 2 | 2012-02-14 |
Method and Apparatus For Inspecting Defect Of Pattern Formed On Semiconductor Device App 20120002861 - Nishiura; Tomofumi ;   et al. | 2012-01-05 |
Method and apparatus for inspecting defect of pattern formed on semiconductor device Grant 8,045,789 - Nishiura , et al. October 25, 2 | 2011-10-25 |
Method, device and computer program of length measurement Grant 8,019,161 - Morokuma , et al. September 13, 2 | 2011-09-13 |
Pattern matching apparatus and semiconductor inspection system using the same Grant 7,991,218 - Toyoda , et al. August 2, 2 | 2011-08-02 |
Pattern inspection apparatus and semiconductor inspection system Grant 7,978,904 - Toyoda , et al. July 12, 2 | 2011-07-12 |
Sample Dimension Inspecting/measuring Method And Sample Dimension Inspecting/measuring Apparatus App 20110158543 - Morokuma; Hidetoshi ;   et al. | 2011-06-30 |
Pattern Matching Method And Computer Program For Executing Pattern Matching App 20110150345 - SUGIYAMA; Akiyuki ;   et al. | 2011-06-23 |
Pattern matching method and computer program for executing pattern matching Grant 7,925,095 - Sugiyama , et al. April 12, 2 | 2011-04-12 |
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus Grant 7,923,703 - Morokuma , et al. April 12, 2 | 2011-04-12 |
Pattern matching method and pattern matching program Grant 7,889,909 - Shindo , et al. February 15, 2 | 2011-02-15 |
Pattern measurement method and pattern measurement system Grant 7,800,060 - Sato , et al. September 21, 2 | 2010-09-21 |
Pattern Displacement Measuring Method And Pattern Measuring Device App 20100140472 - SUTANI; Takumichi ;   et al. | 2010-06-10 |
System and Method for Detecting a Defect App 20100138801 - MATSUOKA; Ryoichi ;   et al. | 2010-06-03 |
Pattern displacement measuring method and pattern measuring device Grant 7,679,055 - Sutani , et al. March 16, 2 | 2010-03-16 |
System and method for detecting defects in a semiconductor during manufacturing thereof Grant 7,681,159 - Matsuoka , et al. March 16, 2 | 2010-03-16 |
Sample Dimension Inspecting/measuring Method And Sample Dimension Inspecting/measuring Apparatus App 20090218491 - Morokuma; Hidetoshi ;   et al. | 2009-09-03 |
Method And Apparatus For Inspecting Defect Of Pattern Formed On Semiconductor Device App 20090208090 - NISHIURA; Tomofumi ;   et al. | 2009-08-20 |
Pattern Measuring Method And Pattern Measuring Device App 20090200465 - SUTANI; Takumichi ;   et al. | 2009-08-13 |
Method and apparatus for creating imaging recipe Grant 7,559,047 - Miyamoto , et al. July 7, 2 | 2009-07-07 |
Method And Apparatus Of Pattern Inspection And Semiconductor Inspection System Using The Same App 20090152463 - TOYODA; Yasutaka ;   et al. | 2009-06-18 |
Pattern measuring method and pattern measuring device Grant 7,518,110 - Sutani , et al. April 14, 2 | 2009-04-14 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 7,507,961 - Toyoda , et al. March 24, 2 | 2009-03-24 |
Pattern Measurement Method And Pattern Measurement System App 20090032707 - SATO; Hidetoshi ;   et al. | 2009-02-05 |
Defect inspection device and defect inspection method App 20080310702 - Taguchi; Junichi ;   et al. | 2008-12-18 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method Grant 7,449,689 - Nagatomo , et al. November 11, 2 | 2008-11-11 |
Method of OPC Model Building, Information-Processing Apparatus, and Method of Determining Process Conditions of Semiconductor Device App 20080250380 - Kijima; Mihoko ;   et al. | 2008-10-09 |
Pattern displacement measuring method and pattern measuring device App 20080224035 - Sutani; Takumichi ;   et al. | 2008-09-18 |
Pattern Inspection Apparatus and Semiconductor Inspection System App 20080175469 - TOYODA; Yasutaka ;   et al. | 2008-07-24 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern Grant 7,365,322 - Miyamoto , et al. April 29, 2 | 2008-04-29 |
Pattern matching method and computer program for executing pattern matching App 20080037830 - Sugiyama; Akiyuki ;   et al. | 2008-02-14 |
Electron microscope App 20080024601 - Sato; Hidetoshi ;   et al. | 2008-01-31 |
System and method for detecting a defect App 20080016481 - Matsuoka; Ryoichi ;   et al. | 2008-01-17 |
Pattern matching method and pattern matching program App 20070223803 - Shindo; Hiroyuki ;   et al. | 2007-09-27 |
Workpiece size measurement method and apparatus App 20070221842 - Morokuma; Hidetoshi ;   et al. | 2007-09-27 |
Pattern matching apparatus and semiconductor inspection system using the same App 20070098248 - Toyoda; Yasutaka ;   et al. | 2007-05-03 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same App 20070023653 - Toyoda; Yasutaka ;   et al. | 2007-02-01 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern App 20060284081 - Miyamoto; Atsushi ;   et al. | 2006-12-21 |
Method and apparatus for measuring dimension of a pattern formed on a semiconductor wafer App 20060288325 - Miyamoto; Atsushi ;   et al. | 2006-12-21 |
Photomask having a focus monitor pattern Grant 7,108,945 - Sutani , et al. September 19, 2 | 2006-09-19 |
Pattern measuring method and pattern measuring device App 20060193508 - Sutani; Takumichi ;   et al. | 2006-08-31 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method App 20060108524 - Nagatomo; Wataru ;   et al. | 2006-05-25 |
Focus monitoring method, exposure apparatus, and exposure mask Grant 6,701,512 - Sutani , et al. March 2, 2 | 2004-03-02 |
Photomask having a focus monitor pattern App 20030219655 - Sutani, Takumichi ;   et al. | 2003-11-27 |
Focus monitoring method, exposure apparatus, and exposure mask App 20020100012 - Sutani, Takumichi ;   et al. | 2002-07-25 |