| Patent | Date |
|---|
Bonding Device As Well As Method For Bonding Substrates
App 20220230895 - GREGORY; George | 2022-07-21 |
Method for coating a substrate with a lacquer and device for planarising a lacquer layer
Grant 11,247,229 - Fischer , et al. February 15, 2 | 2022-02-15 |
Adapter, Connection Device And Supply System
App 20220037168 - BRAUN; Michael ; et al. | 2022-02-03 |
Wet Process Module And Method Of Operation
App 20210402431 - BRAUN; Michael ; et al. | 2021-12-30 |
Holding Apparatus And Method For Holding A Substrate
App 20210394340 - GRUND; Thomas ; et al. | 2021-12-23 |
System and related techniques for handling aligned substrate pairs
Grant 11,183,401 - Johnson , et al. November 23, 2 | 2021-11-23 |
Holding apparatus and method for holding a substrate
Grant 11,148,258 - Grund , et al. October 19, 2 | 2021-10-19 |
Positioning device
Grant 11,075,102 - Hansen , et al. July 27, 2 | 2021-07-27 |
Substrate cassette
Grant 11,049,746 - Bogner June 29, 2 | 2021-06-29 |
Nozzle tip adapter, nozzle assembly as well as nozzle
Grant 10,953,415 - Grund , et al. March 23, 2 | 2021-03-23 |
Method and test system for assessing the quality of a multi-channel micro- and/or subwavelength-optical projection unit
App 20210063863 - AGIREEN; Isabel ; et al. | 2021-03-04 |
Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner
Grant 10,937,681 - Amano , et al. March 2, 2 | 2021-03-02 |
Apparatus, System, And Method For Handling Aligned Wafer Pairs
App 20210013079 - Johnson; Hale ; et al. | 2021-01-14 |
Stamp Replication Device And Method For Producing A Holding Means For A Stamp Replication Device As Well As A Stamp
App 20200353650 - VOGLER; Uwe ; et al. | 2020-11-12 |
Framework for a replication device, replication device as well as method for producing nanostructured and/or microstructured components by means of a replication device
App 20200348588 - KIRNER; Raoul ; et al. | 2020-11-05 |
Baking device for a wafer coated with a coating containing a solvent
Grant 10,825,701 - George , et al. November 3, 2 | 2020-11-03 |
Apparatus, system, and method for handling aligned wafer pairs
Grant 10,825,705 - Johnson , et al. November 3, 2 | 2020-11-03 |
Replication Device And Method For Reproducing A Structure On A Substrate
App 20200341372 - MAY; Christian | 2020-10-29 |
Method for coating a substrate and coating device
Grant 10,688,524 - Fischer , et al. | 2020-06-23 |
Substrate Cassette
App 20200194282 - BOGNER; Bernhard | 2020-06-18 |
Apparatus For Measuring A Fluid Flow Through A Pipe Of A Semiconductor Manufacturing Device
App 20200173825 - MEKIAS; Kader | 2020-06-04 |
Fixation System, Support Plate And Method For Production Thereof
App 20200122302 - STIEVENARD; Philippe ; et al. | 2020-04-23 |
Edge Bead Removal System And Method Of Treating A Substrate
App 20200096867 - LATTARD; Ludovic ; et al. | 2020-03-26 |
Method for coating a substrate and also a coating system
Grant 10,596,592 - Southworth , et al. | 2020-03-24 |
Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing
Grant 10,580,678 - Johnson , et al. | 2020-03-03 |
Dispensing Nozzle for a Coater
App 20190388912 - KADER; Mekias | 2019-12-26 |
Holding Apparatus And Method For Holding A Substrate
App 20190366517 - GRUND; Thomas ; et al. | 2019-12-05 |
End effector
Grant 10,343,292 - Bogner July 9, 2 | 2019-07-09 |
Semiconductor bonding apparatus and related techniques
Grant 10,319,615 - George , et al. | 2019-06-11 |
Method for coating a substrate with a lacquer and device for planarising a lacquer layer
App 20190151889 - FISCHER; Katrin ; et al. | 2019-05-23 |
Wafer treating device and sealing ring for a wafer treating device
Grant 10,295,063 - Albert , et al. | 2019-05-21 |
Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector
Grant 10,259,124 - Bogner | 2019-04-16 |
Wafer Support System, Wafer Support Device, System Comprising A Wafer And A Wafer Support Device As Well As Mask Aligner
App 20190096733 - AMANO; Yasuaki ; et al. | 2019-03-28 |
Light source arrangement for a photolithography exposure system and photolithography exposure system
Grant 10,241,415 - Kaiser | 2019-03-26 |
Method for coating a substrate with a lacquer and device for planarising a lacquer layer
Grant 10,232,405 - Fischer , et al. | 2019-03-19 |
Nozzle tip adapter, nozzle assembly as well as nozzle
App 20180361403 - GRUND; Thomas ; et al. | 2018-12-20 |
Method And Device For Aligning A First Substrate With A Second Substrate
App 20180323069 - Schindler; Katrin | 2018-11-08 |
Device for treating a disc-shaped substrate and support adapter
Grant 10,101,672 - Hansen , et al. October 16, 2 | 2018-10-16 |
Method and apparatus for preventing the deformation of a substrate supported at its edge area
Grant 10,103,049 - Bogner October 16, 2 | 2018-10-16 |
End Effector
App 20180215048 - BOGNER; Bernhard | 2018-08-02 |
Suction Apparatus For An End Effector, End Effector For Holding Substrates And Method Of Producing An End Effector
App 20180215049 - BOGNER; Bernhard | 2018-08-02 |
Positioning Device
App 20180138070 - Hansen; Sven ; et al. | 2018-05-17 |
Spacer displacement device for a wafer illumination unit and wafer illumination unit
Grant 9,958,795 - Conradi , et al. May 1, 2 | 2018-05-01 |
Method and device for curing at least in part a photoresist applied to a substrate
Grant 9,960,061 - Fakhr , et al. May 1, 2 | 2018-05-01 |
Semiconductor Bonding Apparatus and Related Techniques
App 20180108547 - George; Gregory ; et al. | 2018-04-19 |
Apparatus and Method for Semiconductor Wafer Leveling, Force Balancing and Contact Sensing
App 20180102270 - Johnson; Hale ; et al. | 2018-04-12 |
Semiconductor bonding apparatus and related techniques
Grant 9,875,917 - George , et al. January 23, 2 | 2018-01-23 |
Light source arrangement for a photolithography exposure system and photolithography exposure system
App 20180017877 - Kaiser; Paul | 2018-01-18 |
Method for regulating a light source of a photolithography exposure system and exposure assembly for a photolithography device
Grant 9,864,277 - Kaiser January 9, 2 | 2018-01-09 |
Apparatus and method for aligning and centering wafers
Grant 9,859,141 - Johnson , et al. January 2, 2 | 2018-01-02 |
System And Related Techniques For Handling Aligned Substrate Pairs
App 20170372925 - Johnson; Hale ; et al. | 2017-12-28 |
Method for coating a substrate and also a coating system
App 20170368567 - Southworth; Darren ; et al. | 2017-12-28 |
Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing
Grant 9,837,295 - Johnson , et al. December 5, 2 | 2017-12-05 |
Chuck, in particular for use in a mask aligner
Grant 9,824,909 - Hansen , et al. November 21, 2 | 2017-11-21 |
Method for coating a substrate
Grant 9,799,554 - Fischer , et al. October 24, 2 | 2017-10-24 |
Semiconductor Bonding Apparatus and Related Techniques
App 20170243769 - George; Gregory ; et al. | 2017-08-24 |
Apparatus, system, and method for handling aligned wafer pairs
Grant 9,640,418 - Johnson , et al. May 2, 2 | 2017-05-02 |
Debonding temporarily bonded semiconductor wafers
Grant 9,583,374 - George , et al. February 28, 2 | 2017-02-28 |
Spacer Displacement Device for a Wafer Illumination Unit and Wafer Illumination Unit
App 20170017169 - Conradi; Matthias ; et al. | 2017-01-19 |
Device for Treating a Disc-Shaped Substrate and Support Adapter
App 20160370715 - Hansen; Sven ; et al. | 2016-12-22 |
Method and Apparatus for Preventing the Deformation of a Substrate Supported at its Edge Area
App 20160358807 - Bogner; Bernhard | 2016-12-08 |
Apparatus, System, And Method For Handling Aligned Wafer Pairs
App 20160336208 - Johnson; Hale ; et al. | 2016-11-17 |
Apparatus, System, And Method For Handling Aligned Wafer Pairs
App 20160336212 - Johnson; Hale ; et al. | 2016-11-17 |
Method and Device for Curing at least in Part a Photoresist Applied to a Substrate
App 20160306280 - Fakhr; Omar ; et al. | 2016-10-20 |
Debonding temporarily bonded semiconductor wafers
Grant 9,472,437 - George , et al. October 18, 2 | 2016-10-18 |
Method for Coating a Substrate
App 20160300759 - Fischer; Katrin ; et al. | 2016-10-13 |
Wafer Treating Device and Sealing Ring for a Wafer Treating Device
App 20160300751 - Albert; Dieter ; et al. | 2016-10-13 |
Method and Device for Applying a Coating to a Substrate
App 20160296968 - Fakhr; Omar | 2016-10-13 |
Debonding Temporarily Bonded Semiconductor Wafers
App 20160300747 - George; Gregory ; et al. | 2016-10-13 |
Method for Regulating a Light Source of a Photolithography Exposure System and Exposure Assembly for a Photolithography Device
App 20160291480 - Kaiser; Paul | 2016-10-06 |
Bottle supply system and bottle cap adapter
Grant 9,458,002 - Treichel , et al. October 4, 2 | 2016-10-04 |
Chuck for Suction and Holding a Wafer
App 20160240414 - Conradi; Matthias ; et al. | 2016-08-18 |
Baking Device For A Wafer Coated With A Coating Containing A Solvent
App 20160148823 - George; Gregory ; et al. | 2016-05-26 |
Method and device for active wedge error compensation between two objects that can be positioned substantially to parallel to each other
Grant 9,329,473 - Hansen , et al. May 3, 2 | 2016-05-03 |
Method For Coating A Substrate With A Lacquer And Device For Planarising A Lacquer Layer
App 20160089693 - Fischer; Katrin ; et al. | 2016-03-31 |
Method For Coating A Substrate And Coating Device
App 20160089691 - Fischer; Katrin ; et al. | 2016-03-31 |
Method for thermal-slide debonding of temporary bonded semiconductor wafers
Grant 9,281,229 - George , et al. March 8, 2 | 2016-03-08 |
Bottle Supply System And Bottle Cap Adapter
App 20150293453 - TREICHEL; Oliver ; et al. | 2015-10-15 |
Thin wafer carrier
Grant 9,159,595 - Hurley , et al. October 13, 2 | 2015-10-13 |
Method And Apparatus For Temporary Bonding Of Ultra Thin Wafers
App 20150251396 - GEORGE; GREGORY ; et al. | 2015-09-10 |
System Amd Method For Substrate Holding
App 20150206783 - JOHNSON; HALE ; et al. | 2015-07-23 |
Method and apparatus for temporary bonding of ultra thin wafers
Grant 9,064,686 - George , et al. June 23, 2 | 2015-06-23 |
Debonding Temporarily Bonded Semiconductor Wafers
App 20150101744 - George; Gregory ; et al. | 2015-04-16 |
Method For Thermal-slide Debonding Of Temporary Bonded Semiconductor Wafers
App 20150083342 - GEORGE; GREGORY ; et al. | 2015-03-26 |
Debonding temporarily bonded semiconductor wafers
Grant 8,950,459 - George , et al. February 10, 2 | 2015-02-10 |
Apparatus for thermal-slide debonding of temporary bonded semiconductor wafers
Grant 08919412 - | 2014-12-30 |
Apparatus for thermal-slide debonding of temporary bonded semiconductor wafers
Grant 8,919,412 - George , et al. December 30, 2 | 2014-12-30 |
Apparatus And Method For Semiconductor Wafer Leveling, Force Balancing And Contact Sensing
App 20140318683 - JOHNSON; HALE ; et al. | 2014-10-30 |
Apparatus And Method For Aligning And Centering Wafers
App 20140319786 - JOHNSON; HALE ; et al. | 2014-10-30 |
Device for centering wafers
Grant 8,764,026 - George , et al. July 1, 2 | 2014-07-01 |
Methos and device for keeping mask dimensions constant
Grant 8,647,797 - Ishii , et al. February 11, 2 | 2014-02-11 |
Apparatus and method for detaping an adhesive layer from the surface of ultra thin wafers
Grant 8,574,398 - George November 5, 2 | 2013-11-05 |
Debonding equipment and methods for debonding temporary bonded wafers
Grant 8,551,291 - George October 8, 2 | 2013-10-08 |
Method And Apparatus For Temporary Bonding Of Ultra Thin Wafers
App 20130244400 - GEORGE; GREGORY ; et al. | 2013-09-19 |
Apparatus for high throughput wafer bonding
Grant 8,425,715 - George April 23, 2 | 2013-04-23 |
Debonding equipment and methods for debonding temporary bonded wafers
Grant 8,366,873 - George February 5, 2 | 2013-02-05 |
Device for coating a substrate
Grant 8,353,255 - Beyer , et al. January 15, 2 | 2013-01-15 |
Automated thermal slide debonder
Grant 8,343,300 - Hermanowski January 1, 2 | 2013-01-01 |
Apparatus for mechanically debonding temporary bonded semiconductor wafers
Grant 8,267,143 - George , et al. September 18, 2 | 2012-09-18 |
Methos And Device For Keeping Mask Dimensions Constant
App 20120141928 - Ishii; Takaaki ; et al. | 2012-06-07 |
Apparatus for temporary wafer bonding and debonding
Grant 8,181,688 - Johnson , et al. May 22, 2 | 2012-05-22 |
Apparatus For High Throughput Wafer Bonding
App 20120080146 - George; Gregory | 2012-04-05 |
Method and apparatus for wafer bonding with enhanced wafer mating
Grant 8,147,630 - George April 3, 2 | 2012-04-03 |
Apparatus and method for semiconductor wafer alignment
Grant 8,139,219 - George March 20, 2 | 2012-03-20 |
Apparatus And Method For Detaping An Adhesive Layer From The Surface Of Ultra Thin Wafers
App 20110290415 - GEORGE; GREGORY | 2011-12-01 |
Debonding Equipment And Methods For Debonding Temporary Bonded Wafers
App 20110253314 - GEORGE; GREGORY | 2011-10-20 |
Debonding Equipment And Methods For Debonding Temporary Bonded Wafers
App 20110253315 - GEORGE; GREGORY | 2011-10-20 |
Rotatable device for holding a substrate
Grant 7,950,347 - Weilermann , et al. May 31, 2 | 2011-05-31 |
Apparatus and method for semiconductor bonding
Grant 7,948,034 - George , et al. May 24, 2 | 2011-05-24 |
Device for coating a substrate
App 20100192843 - Beyer; Ralph ; et al. | 2010-08-05 |
Method and device for adjusting an alignment microscope by means of a reflective alignment mask
Grant 7,057,707 - Hansen June 6, 2 | 2006-06-06 |
Device for fixing thin and flexible substrates
Grant 6,966,560 - Demel , et al. November 22, 2 | 2005-11-22 |
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