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Patent applications and USPTO patent grants for Superion Limited.The latest application filed is for "apparatus for and method of producing ion beams".
Patent | Date |
---|---|
Apparatus for and method of producing ion beams Grant 5,300,785 - Aitken April 5, 1 | 1994-04-05 |
Method and apparatus relating to ion implantation Grant 5,194,748 - Aitken March 16, 1 | 1993-03-16 |
Apparatus and methods relating to ion implantation and heat transfer Grant 5,124,557 - Aitken June 23, 1 | 1992-06-23 |
Apparatus and methods relating to scanning ion beams Grant 5,099,130 - Aitken March 24, 1 | 1992-03-24 |
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