Sung; Young-Su
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sung; Young-Su.The latest application filed is for "apparatus and method for performing multi-beam based lithography".
- Sung; Young-Su - Chuncheon-si KR
- Sung; Young-Su - Gyeonggi-do KR
- Sung; Young-su - Gangwon-do KR
| Patent | Date |
|---|---|
| Apparatus And Method For Performing Multi-beam Based Lithography App 20140233001 - CHOI; JIN ; et al. | 2014-08-21 |
| Reflective extreme ultraviolet mask and method of manufacturing the same Grant 8,568,944 - Kim , et al. October 29, 2 | 2013-10-29 |
| Reflective Extreme Ultraviolet Mask And Method Of Manufacturing The Same App 20120237860 - KIM; Hoon ; et al. | 2012-09-20 |
| Method for inspecting critical dimension uniformity at high speed measurement Grant 8,213,722 - Kim , et al. July 3, 2 | 2012-07-03 |
| Method of manufacturing photomask Grant 8,137,870 - Lee , et al. March 20, 2 | 2012-03-20 |
| Photomask Grant 8,007,963 - Lee , et al. August 30, 2 | 2011-08-30 |
| Photomask App 20100173230 - Lee; Myoung-soo ; et al. | 2010-07-08 |
| Method for Inspecting Critical Dimension Uniformity at High Speed Measurement App 20100111427 - Kim; Hee-Bom ; et al. | 2010-05-06 |
| Method of manufacturing photomask App 20090191475 - Lee; Myoung-soo ; et al. | 2009-07-30 |
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