loadpatents
name:-0.0098471641540527
name:-0.0059220790863037
name:-0.00035905838012695
Sung; Junghwan Patent Filings

Sung; Junghwan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sung; Junghwan.The latest application filed is for "deposition of tungsten nitride".

Company Profile
0.6.5
  • Sung; Junghwan - Los Altos CA
  • Sung; Junghwan - Santa Clara CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Deposition of tungsten nitride
Grant 7,691,749 - Levy , et al. April 6, 2
2010-04-06
Method of forming low-resistivity tungsten interconnects
Grant 7,262,125 - Wongsenakhum , et al. August 28, 2
2007-08-28
Method for reducing tungsten film roughness and improving step coverage
Grant 7,141,494 - Lee , et al. November 28, 2
2006-11-28
Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatus
Grant 7,107,998 - Greer , et al. September 19, 2
2006-09-19
Deposition of tungsten nitride
App 20060094238 - Levy; Karl B. ;   et al.
2006-05-04
Deposition of tungsten nitride
Grant 7,005,372 - Levy , et al. February 28, 2
2006-02-28
Methods of forming tungsten nucleation layer
Grant 6,905,543 - Fair , et al. June 14, 2
2005-06-14
Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatus
App 20050081882 - Greer, Harold F.R. ;   et al.
2005-04-21
Method for reducing tungsten film roughness and improving step coverage
App 20050031786 - Lee, Sang-Hyeob ;   et al.
2005-02-10
Method of forming low-resistivity tungsten interconnects
App 20040202786 - Wongsenakhum, Panya ;   et al.
2004-10-14
Deposition of tungsten nitride
App 20040142557 - Levy, Karl B. ;   et al.
2004-07-22

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