SUNG; DOUG YONG

Patent Applications and Registrations

Patent applications and USPTO patent grants for SUNG; DOUG YONG.The latest application filed is for "inductively coupled plasma processing apparatus".

Company Profile

14.13.24

SUNG; DOUG YONG - SEOUL KR
Sung; Doug Yong - Suwon-si KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inductively Coupled Plasma Processing Apparatus App 20220005671 - SHIM; SEUNG BO ; et al.	2022-01-06
Apparatus for monitoring process chamber Grant 10,971,343 - Vladimir , et al. April 6, 2	2021-04-06
Semiconductor manufacturing device and method of operating the same Grant 10,964,511 - Shim , et al. March 30, 2	2021-03-30
Plasma processing apparatus Grant 10,903,053 - Kim , et al. January 26, 2	2021-01-26
Electrostatic chuck and plasma apparatus for processing substrates having the same Grant 10,629,467 - Kwon , et al.	2020-04-21
Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system Grant 10,566,176 - Oh , et al. Feb	2020-02-18
Plasma Processing Apparatus App 20190378693 - Kim; Hak Young ; et al.	2019-12-12
Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same Grant 10,481,005 - Oh , et al. Nov	2019-11-19
Semiconductor Substrate Measuring Apparatus And Plasma Treatment Apparatus Using The Same App 20190323893 - OH; SE JIN ; et al.	2019-10-24
Plasma Processing Equipment App 20190304754 - SHIM; SEUNG BO ; et al.	2019-10-03
Plasma processing apparatus Grant 10,395,900 - Kim , et al. A	2019-08-27
Apparatus For Monitoring Process Chamber App 20190164731 - VLADIMIR; Protopopov ; et al.	2019-05-30
Plasma processing device Grant 10,276,349 - Kim , et al.	2019-04-30
Apparatus for monitoring process chamber Grant 10,229,818 - Vladimir , et al.	2019-03-12
Methods for Fabricating Semiconductor Devices Using a Fringe Signal App 20190043768 - Oh; Se Jin ; et al.	2019-02-07
Semiconductor Manufacturing Device And Method Of Operating The Same App 20190006150 - SHIM; Seung Bo ; et al.	2019-01-03
Plasma Processing Apparatus App 20170365444 - Kim; Hak Young ; et al.	2017-12-21
Electrostatic Chuck And Plasma Apparatus For Processing Substrates Having The Same App 20170358475 - KWON; Ohyung ; et al.	2017-12-14
Apparatus For Monitoring Process Chamber App 20170213710 - VLADIMIR; Protopopov ; et al.	2017-07-27
Microwave Probe, Plasma Monitoring System Including The Microwave Probe, And Method For Fabricating Semiconductor Device Using The System App 20170148613 - Oh; Se-jin ; et al.	2017-05-25
Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system Grant 9,601,397 - Oh , et al. March 21, 2	2017-03-21
Microwave Probe, Plasma Monitoring System Including The Microwave Probe, And Method For Fabricating Semiconductor Device Using The System App 20170069553 - Oh; Se-jin ; et al.	2017-03-09
Diagnosis system for pulsed plasma Grant 9,564,295 - Lee , et al. February 7, 2	2017-02-07
Pulse plasma apparatus and drive method thereof Grant 9,378,931 - Kwon , et al. June 28, 2	2016-06-28
Diagnosis System For Pulsed Plasma App 20160126068 - LEE; Dong-soo ; et al.	2016-05-05
Pulse Plasma Apparatus And Drive Method Thereof App 20160126069 - KWON; Ohyung ; et al.	2016-05-05
Plasma Processing Device App 20160104604 - Kim; Hak-Young ; et al.	2016-04-14
Plasma Generating Apparatus App 20150206716 - KIM; HYUNGJOON ; et al.	2015-07-23
Etching apparatus and method for semiconductor device Grant 8,062,538 - Sung , et al. November 22, 2	2011-11-22
Plasma generating device App 20100083902 - Kim; Su Hong ; et al.	2010-04-08
Plasma processing apparatus and method thereof App 20100048003 - Sung; Doug Yong ; et al.	2010-02-25
Deposition Apparatus and Deposition Method Using the Same App 20100009097 - Sung; Doug-Yong ; et al.	2010-01-14
Apparatus for HDP-CVD and method of forming insulating layer using the same App 20090064932 - Kim; Ki Hyun ; et al.	2009-03-12
Plasma etching apparatus and chamber cleaning method using the same App 20080314408 - Jeong; Sang Min ; et al.	2008-12-25
Plasma processing apparatus and method thereof App 20080314318 - Han; Kyung Hyun ; et al.	2008-12-25
Plasma processing apparatus and method App 20080317965 - Son; Gil Su ; et al.	2008-12-25
Plasma Etching Method And Apparatus App 20080119049 - SUNG; Doug Yong ; et al.	2008-05-22

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