Sundaram; Ganesh M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sundaram; Ganesh M..The latest application filed is for "atomic layer deposition head".
- Sundaram; Ganesh M. - Concord MA
| Patent | Date |
|---|---|
| Atomic layer deposition head Grant 9,783,888 - Sershen , et al. October 10, 2 | 2017-10-10 |
| ALD systems and methods Grant 9,777,371 - Coutu , et al. October 3, 2 | 2017-10-03 |
| Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range Grant 9,567,670 - Sershen , et al. February 14, 2 | 2017-02-14 |
| Atomic Layer Deposition Head App 20160115596 - Sershen; Michael J. ; et al. | 2016-04-28 |
| Method For High-velocity And Atmospheric-pressure Atomic Layer Deposition With Substrate And Coating Head Separation Distance In The Millimeter Range App 20150275363 - Sershen; Michael J. ; et al. | 2015-10-01 |
| Ald Coating System App 20120141676 - Sershen; Michael J. ; et al. | 2012-06-07 |
| Ald Systems And Methods App 20120064245 - Coutu; Roger R. ; et al. | 2012-03-15 |
| Method And Apparatus For Precursor Delivery App 20110311726 - Liu; Guo ; et al. | 2011-12-22 |
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