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High Aspect Ratio Via Etch Using Atomic Layer Deposition Protection Layer App 20190181041 - Lu; Yen-Tien ;   et al. | 2019-06-13 |
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Manufacturing Methods To Protect Ulk Materials From Damage During Etch Processing To Obtain Desired Features App 20180061700 - Sun; Xinghua ;   et al. | 2018-03-01 |
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