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Wafer level spectrometer
Grant 9,964,440 - Jensen , et al. May 8, 2 | 2018-05-08 |
Wafer Level Spectrometer
App 20160011046 - Jensen; Earl M. ; et al. | 2016-01-14 |
Process Condition Measuring Device
App 20130029433 - Sun; Mei H. ; et al. | 2013-01-31 |
Process condition measuring device
Grant 8,104,342 - Sun , et al. January 31, 2 | 2012-01-31 |
Process condition sensing wafer and data analysis system
Grant 8,033,190 - Renken , et al. October 11, 2 | 2011-10-11 |
Temperature effects on overlay accuracy
Grant 7,924,408 - DiBiase , et al. April 12, 2 | 2011-04-12 |
Integrated process condition sensing wafer and data analysis system
Grant 7,855,549 - Renken , et al. December 21, 2 | 2010-12-21 |
Process Condition Sensing Wafer And Data Analysis System
App 20100294051 - Renken; Wayne G. ; et al. | 2010-11-25 |
Process condition sensing wafer and data analysis system
Grant 7,757,574 - Renken , et al. July 20, 2 | 2010-07-20 |
Pressure sensing device
Grant 7,698,952 - Renken , et al. April 20, 2 | 2010-04-20 |
Process Condition Measuring Device
App 20090056441 - Sun; Mei H. ; et al. | 2009-03-05 |
Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process
Grant 7,497,134 - Renken , et al. March 3, 2 | 2009-03-03 |
Temperature effects on overlay accuracy
App 20080204678 - DiBiase; Tony ; et al. | 2008-08-28 |
Pressure Sensing Device
App 20080087069 - Renken; Wayne G. ; et al. | 2008-04-17 |
Shear Force Sensing Device
App 20080087105 - Renken; Wayne G. ; et al. | 2008-04-17 |
Integrated Process Condition Sensing Wafer and Data Analysis System
App 20070046284 - Renken; Wayne Glenn ; et al. | 2007-03-01 |
Integrated process condition sensing wafer and data analysis system
Grant 7,135,852 - Renken , et al. November 14, 2 | 2006-11-14 |
Process condition sensing wafer and data analysis system
App 20060174720 - Renken; Wayne G. ; et al. | 2006-08-10 |
Sensor positioning systems and methods
Grant 6,915,589 - Sun , et al. July 12, 2 | 2005-07-12 |
Sensor positioning systems and methods
App 20050081398 - Sun, Mei H. ; et al. | 2005-04-21 |
Integrated process condition sensing wafer and data analysis system
App 20040225462 - Renken, Wayne Glenn ; et al. | 2004-11-11 |
Optical techniques for measuring parameters such as temperature across a surface
Grant 6,616,332 - Renken , et al. September 9, 2 | 2003-09-09 |
Integrated wafer temperature sensors
Grant 6,325,536 - Renken , et al. December 4, 2 | 2001-12-04 |
Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool
Grant 6,190,040 - Renken , et al. February 20, 2 | 2001-02-20 |
In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link
Grant 6,010,538 - Sun , et al. January 4, 2 | 2000-01-04 |
Measuring system employing a luminescent sensor and methods of designing the system
Grant 5,414,266 - Sun May 9, 1 | 1995-05-09 |
Modular luminescence-based measuring system using fast digital signal processing
Grant 5,351,268 - Jensen , et al. September 27, 1 | 1994-09-27 |
Method of making a fiberoptic sensor of a microwave field
Grant 5,109,595 - Wickersheim , et al. May 5, 1 | 1992-05-05 |
Fiberoptic techniques for measuring the magnitude of local microwave fields and power
Grant 5,110,216 - Wickersheim , et al. May 5, 1 | 1992-05-05 |
Modular luminescence-based measuring system using fast digital signal processing
Grant 5,107,445 - Jensen , et al. April 21, 1 | 1992-04-21 |
Fiberoptic sensing of temperature and/or other physical parameters
Grant 4,988,212 - Sun , et al. January 29, 1 | 1991-01-29 |
Three-parameter optical fiber sensor and system
Grant 4,986,671 - Sun , et al. January 22, 1 | 1991-01-22 |
Fiberoptic sensing of temperature and/or other physical parameters
Grant 4,883,354 - Sun , et al. November 28, 1 | 1989-11-28 |
Optical system using a luminescent material sensor for measuring very high temperatures
Grant 4,859,079 - Wickersheim , et al. August 22, 1 | 1989-08-22 |
Optical temperature measurement techniques
Grant 4,789,992 - Wickersheim , et al. * December 6, 1 | 1988-12-06 |
Optical fiber probe for measuring the temperature of an ultrasonically heated object
Grant 4,785,824 - Wickersheim , et al. * November 22, 1 | 1988-11-22 |
Fiberoptic sensing of temperature and/or other physical parameters
Grant 4,752,141 - Sun , et al. June 21, 1 | 1988-06-21 |
Optical temperature measurement techniques
Grant 4,652,143 - Wickersheim , et al. March 24, 1 | 1987-03-24 |
Technique for optically measuring the temperature of an ultrasonically heated object
Grant 4,626,110 - Wickersheim , et al. December 2, 1 | 1986-12-02 |
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