Sun; Jongwoo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sun; Jongwoo.The latest application filed is for "plasma processing apparatus and semiconductor device manufacturing method using the same".

Company Profile

11.12.22

Sun; Jongwoo - Hwaseong-si KR
Sun; Jongwoo - Seoul KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same Grant 11,450,545 - Sun , et al. September 20, 2	2022-09-20
Semiconductor manufacturing apparatus Grant 11,430,679 - Kim , et al. August 30, 2	2022-08-30
Plasma Processing Apparatus And Semiconductor Device Manufacturing Method Using The Same App 20220223385 - Oh; Sejin ; et al.	2022-07-14
Method And System For Monitoring Substrate Processing Apparatus App 20220199374 - OH; SEJIN ; et al.	2022-06-23
Semiconductor Processing Equipment Including Electrostatic Chuck For Plasma Processing App 20220189746 - MUN; JEONGIL ; et al.	2022-06-16
Plasma processing apparatus and method of manufacturing semiconductor device using the same Grant 11,348,760 - Koshiishi , et al. May 31, 2	2022-05-31
Plasma Processing Apparatus And Methods Of Manufacturing Semiconductor Device Using The Same App 20220165550 - Kim; Kyoungchon ; et al.	2022-05-26
Sensor device and etching apparatus having the same Grant 11,264,291 - Yang , et al. March 1, 2	2022-03-01
Gas supply assembly and substrate processing apparatus including the same Grant 11,251,022 - Jeon , et al. February 15, 2	2022-02-15
Method Of Forming Plasma Processing Apparatus, Related Apparatus, And Method Of Forming Semiconductor Device Using The Same App 20220044912 - MUN; Jeongil ; et al.	2022-02-10
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method Grant 11,215,506 - Kim , et al. January 4, 2	2022-01-04
Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device Grant 11,092,495 - Mun , et al. August 17, 2	2021-08-17
Substrate Processing Apparatus, Substrate Processing Module, And Semiconductor Device Fabrication Method App 20210148760 - KIM; Kyeonghun ; et al.	2021-05-20
Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Same App 20210142985 - KOSHIISHI; AKIRA ; et al.	2021-05-13
Gas Supply Assembly And Substrate Processing Apparatus Including The Same App 20210104381 - JEON; Kangmin ; et al.	2021-04-08
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method Grant 10,935,429 - Kim , et al. March 2, 2	2021-03-02
Semiconductor Manufacturing Apparatus App 20210035830 - KIM; Kwangnam ; et al.	2021-02-04
Substrate Treating Apparatus And Substrate Treating System Having The Same App 20210027993 - KIM; Sungyeon ; et al.	2021-01-28
Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the same Grant 10,892,145 - Oh , et al. January 12, 2	2021-01-12
Sensor Device And Etching Apparatus Having The Same App 20200411390 - YANG; SEEYUB ; et al.	2020-12-31
Substrate inspection apparatus and substrate processing system including the same Grant 10,861,724 - Sun , et al. December 8, 2	2020-12-08
Capacitively-coupled Plasma Substrate Processing Apparatus Including A Focus Ring And A Substrate Processing Method Using The Same App 20200335376 - SUN; Jongwoo ; et al.	2020-10-22
Substrate Processing Apparatus, Substrate Processing Module, And Semiconductor Device Fabrication Method App 20200209063 - KIM; Kyeonghun ; et al.	2020-07-02
Substrate Processing Apparatus, Substrate Processing Method, And Method Of Fabricating Semiconductor Device Using The Same App 20200168443 - OH; SEJIN ; et al.	2020-05-28
Method of etching substrate Grant 10,643,858 - Lee , et al.	2020-05-05
Optical Emission Spectroscopy System, Method Of Calibrating The Same, And Method Of Fabricating Semiconductor Device App 20200049560 - MUN; Jeongil ; et al.	2020-02-13
Plasma treatment system including cover plate to insulate window Grant 10,431,432 - Sun , et al. O	2019-10-01
Method Of Etching Substrate App 20190109010 - LEE; EUNWOO ; et al.	2019-04-11
Plasma Processing Apparatus, Plasma Processing Method And Method Of Manufacturing Semiconductor Device Using The Same App 20190096636 - NAM; Sang Ki ; et al.	2019-03-28
Substrate Inspection Apparatus And Substrate Processing System Including The Same App 20190080944 - SUN; Jongwoo ; et al.	2019-03-14
Cover Plate, Plasma Treatment System Including the Same and Plasma Treatment Method of the Plasma Treatment System App 20170047235 - Sun; Jongwoo ; et al.	2017-02-16
Plasma Treatment Apparatus App 20170032988 - PARK; Myoung Soo ; et al.	2017-02-02
Plasma Process Apparatus Having View Port App 20160141148 - SUN; Jongwoo ; et al.	2016-05-19

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