Sun; Jong-Woo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sun; Jong-Woo.The latest application filed is for "substrate processing apparatus and method of processing a substrate".

Company Profile

23.17.24

Sun; Jong-Woo - Hwaseong-si KR
Sun; Jong Woo - Suwon-si KR
Sun; Jong-Woo - Seoul KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma processing apparatus and method of manufacturing semiconductor device using the same Grant 11,437,222 - Hong , et al. September 6, 2	2022-09-06
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device Grant 11,437,264 - Sung , et al. September 6, 2	2022-09-06
Device for providing gas to a plasma chamber and a plasma processing device including the same Grant 11,289,309 - Kim , et al. March 29, 2	2022-03-29
Method of controlling uniformity of plasma and plasma processing system Grant 11,282,678 - Na , et al. March 22, 2	2022-03-22
Substrate Processing Apparatus And Method Of Processing A Substrate App 20210272838 - SUN; Jong Woo ; et al.	2021-09-02
Loadlock Module and Semiconductor Manufacturing Apparatus Including the Same App 20210202283 - Kim; Kwang-nam ; et al.	2021-07-01
Plasma Processing Method, Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20210202276 - SONG; Seung-Yoon ; et al.	2021-07-01
Substrate support apparatus and plasma processing apparatus having the same Grant 11,037,766 - Kim , et al. June 15, 2	2021-06-15
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus Grant 11,037,806 - Song , et al. June 15, 2	2021-06-15
Apparatus For Manufacturing Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20210175110 - SUNG; Jung Mo ; et al.	2021-06-10
Substrate processing apparatus including edge ring Grant 11,018,046 - Sun , et al. May 25, 2	2021-05-25
Loadlock module and semiconductor manufacturing apparatus including the same Grant 10,971,382 - Kim , et al. April 6, 2	2021-04-06
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device Grant 10,964,578 - Sung , et al. March 30, 2	2021-03-30
Plasma processing apparatus Grant 10,903,053 - Kim , et al. January 26, 2	2021-01-26
Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Same App 20200395196 - HONG; JUNG-PYO ; et al.	2020-12-17
Plasma monitoring apparatus and plasma processing system Grant 10,825,666 - Kim , et al. November 3, 2	2020-11-03
Substrate Processing Apparatus Including Edge Ring App 20200328105 - SUN; Jong Woo ; et al.	2020-10-15
Plasma processing apparatus and method of manufacturing semiconductor device using the same Grant 10,790,122 - Hong , et al. September 29, 2	2020-09-29
Calibrator of an optical emission spectroscopy Grant 10,753,800 - Mun , et al. A	2020-08-25
Plasma monitoring apparatus, and plasma processing apparatus including the same Grant 10,748,749 - Mun , et al. A	2020-08-18
Method Of Controlling Uniformity Of Plasma And Plasma Processing System App 20200227240 - NA; DONG-HYEON ; et al.	2020-07-16
Plasma Processing Method, Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20200227289 - Song; Seung-Yoon ; et al.	2020-07-16
Plasma Processing Apparatus App 20200152427 - Lee; Eun-Woo ; et al.	2020-05-14
Apparatus For Manufacturing Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20200135527 - SUNG; Jung Mo ; et al.	2020-04-30
Device For Providing Gas To A Plasma Chamber And A Plasma Processing Device Including The Same App 20200135433 - KIM; HYUNG JUN ; et al.	2020-04-30
Plasma Monitoring Apparatus And Plasma Processing System App 20200066499 - KIM; Kyeong-Hun ; et al.	2020-02-27
Substrate Support Apparatus And Plasma Processing Apparatus Having The Same App 20200027705 - KIM; Kwang-Nam ; et al.	2020-01-23
Loadlock Module and Semiconductor Manufacturing Apparatus Including the Same App 20200020555 - Kim; Kwang-nam ; et al.	2020-01-16
Plasma Processing Apparatus App 20190378693 - Kim; Hak Young ; et al.	2019-12-12
Plasma Processing Apparatus Including Gas Distribution Plate App 20190304751 - Park; Chan Hoon ; et al.	2019-10-03
Calibrator Of An Optical Emission Spectroscopy App 20190301937 - MUN; Jeong-Il ; et al.	2019-10-03
Plasma processing apparatus Grant 10,395,900 - Kim , et al. A	2019-08-27
Plasma Processing Apparatus App 20190148119 - SUNG; Jung-mo ; et al.	2019-05-16
Plasma Processing Apparatus And Method Of Manufacturing Semiconductor Device Using The Same App 20190074165 - HONG; JUNG-PYO ; et al.	2019-03-07
Substrate processing apparatus Grant 10,062,550 - Hong , et al. August 28, 2	2018-08-28
Plasma Processing Apparatus App 20170365444 - Kim; Hak Young ; et al.	2017-12-21
Focus Ring Assembly And A Method Of Processing A Substrate Using The Same App 20170301578 - HONG; Jung-Pyo ; et al.	2017-10-19
Substrate Processing Apparatus App 20170062245 - Hong; Jung-Pyo ; et al.	2017-03-02
Etching Apparatus Using Inductively Coupled Plasma App 20150359079 - Sun; Jong-Woo	2015-12-10
Apparatus and method for controlling ion beam Grant 7,629,589 - Hwang , et al. December 8, 2	2009-12-08
Apparatus and method for controlling ion beam App 20070181820 - Hwang; Sung-Wook ; et al.	2007-08-09

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