Sun; David P.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sun; David P..The latest application filed is for "gas flow control by differential pressure measurements".
- Sun; David P. - Mountain View CA
| Patent | Date |
|---|---|
| Side RF coil and side heater for plasma processing apparatus Grant 7,776,156 - Long , et al. August 17, 2 | 2010-08-17 |
| Gas baffle and distributor for semiconductor processing chamber Grant 7,722,719 - Lei , et al. May 25, 2 | 2010-05-25 |
| Gas Flow Control By Differential Pressure Measurements App 20080000530 - SUN; DAVID P. ; et al. | 2008-01-03 |
| Gas baffle and distributor for semiconductor processing chamber App 20060196603 - Lei; Lawrence Chung-Lai ; et al. | 2006-09-07 |
| Side RF coil and side heater for plasma processing apparatus App 20060174834 - Long; Maolin ; et al. | 2006-08-10 |
| Anti-clogging nozzle for semiconductor processing App 20050218115 - Lei, Lawrence Chung-Lai ; et al. | 2005-10-06 |
| Method for achieving process uniformity by modifying thermal coupling between heater and substrate App 20040016745 - Sun, David P. ; et al. | 2004-01-29 |
| Method for achieving a desired process uniformity by modifying surface topography of substrate heater App 20040011780 - Sun, David P. ; et al. | 2004-01-22 |
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