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Patent applications and USPTO patent grants for Sun; Bingxi.The latest application filed is for "method of cleaning a surface of a material layer".
Patent | Date |
---|---|
Integrated deposition process for copper metallization Grant 6,881,673 - Ding , et al. April 19, 2 | 2005-04-19 |
Method of cleaning a surface of a material layer App 20040168705 - Sun, Bingxi ;   et al. | 2004-09-02 |
Method of cleaning a surface of a material layer App 20040018715 - Sun, Bingxi ;   et al. | 2004-01-29 |
Integrated deposition process for copper metallization App 20030194863 - Ding, Peijun ;   et al. | 2003-10-16 |
Integrated deposition process for copper metallization Grant 6,566,259 - Ding , et al. May 20, 2 | 2003-05-20 |
Copper alloy seed layer for copper metallization Grant 6,387,805 - Ding , et al. May 14, 2 | 2002-05-14 |
Ionized metal plasma Ta, TaNx, W, and WNx liners for gate electrode applications Grant 6,313,033 - Chiang , et al. November 6, 2 | 2001-11-06 |
Integrated deposition process for copper metallization Grant 6,174,811 - Ding , et al. January 16, 2 | 2001-01-16 |
Copper alloy via structure Grant 6,160,315 - Chiang , et al. December 12, 2 | 2000-12-12 |
Copper alloy seed layer for copper metallization in an integrated circuit Grant 6,066,892 - Ding , et al. May 23, 2 | 2000-05-23 |
Sputter deposition and annealing of copper alloy metallization Grant 6,037,257 - Chiang , et al. March 14, 2 | 2000-03-14 |
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