Sumiya; Masahiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sumiya; Masahiro.The latest application filed is for "plasma processing method".

Company Profile

15.30.51

Sumiya; Masahiro - Tokyo JP
Sumiya; Masahiro - Hikari JP
Sumiya; Masahiro - Nagoya JP
Sumiya; Masahiro - Nagoya-city JP
Sumiya; Masahiro - Kudamatsu JP
Sumiya; Masahiro - Kudamatsu-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma processing apparatus Grant 11,424,108 - Ikenaga , et al. August 23, 2	2022-08-23
Plasma Processing Method App 20220262606 - Hirota; Kosa ; et al.	2022-08-18
Plasma processing method Grant 11,355,324 - Hirota , et al. June 7, 2	2022-06-07
Diagnosis Apparatus, Plasma Processing Apparatus And Diagnosis Method App 20220157580 - Umeda; Shota ; et al.	2022-05-19
Plasma Processing Apparatus App 20220139678 - Ishiguro; Masaki ; et al.	2022-05-05
Plasma processing apparatus and plasma processing method Grant 11,315,792 - Ishiguro , et al. April 26, 2	2022-04-26
Plasma processing apparatus Grant 11,257,661 - Ishiguro , et al. February 22, 2	2022-02-22
Plasma Processing Apparatus App 20210358722 - Pandey; Anil ; et al.	2021-11-18
Method For Releasing Sample And Plasma Processing Apparatus Using Same App 20210358758 - ISHIGURO; Masaki ; et al.	2021-11-18
Plasma processing apparatus and prediction apparatus of the condition of plasma processing apparatus Grant 11,107,664 - Kamaji , et al. August 31, 2	2021-08-31
Method for releasing sample and plasma processing apparatus using same Grant 11,107,694 - Ishiguro , et al. August 31, 2	2021-08-31
Plasma Processing Apparatus And Prediction Method Of The Condition Of Plasma Processing Apparatus App 20210082673 - Kamaji; Yoshito ; et al.	2021-03-18
Plasma Processing Apparatus And Method For Releasing Sample App 20210013060 - ISHIGURO; Masaki ; et al.	2021-01-14
Plasma processing apparatus and prediction method of the condition of plasma processing apparatus Grant 10,886,110 - Kamaji , et al. January 5, 2	2021-01-05
Plasma processing apparatus and method for releasing sample Grant 10,825,700 - Ishiguro , et al. November 3, 2	2020-11-03
Plasma Processing Method App 20200294777 - HIROTA; Kosa ; et al.	2020-09-17
State Prediction Apparatus And Semiconductor Manufacturing Apparatus App 20200064820 - ISHIGURO; Masaki ; et al.	2020-02-27
Plasma Processing Apparatus And Data Analysis Apparatus App 20200066500 - ASAKURA; Ryoji ; et al.	2020-02-27
Method For Releasing Sample And Plasma Processing Apparatus Using Same App 20200058511 - ISHIGURO; Masaki ; et al.	2020-02-20
Plasma processing apparatus and data analysis apparatus Grant 10,510,519 - Asakura , et al. Dec	2019-12-17
Method for releasing sample and plasma processing apparatus using same Grant 10,490,412 - Ishiguro , et al. Nov	2019-11-26
Plasma Processing Apparatus And Plasma Processing Method App 20190333772 - ISHIGURO; Masaki ; et al.	2019-10-31
Plasma Processing Apparatus And Member Of Plasma Processing Chamber App 20190326101 - UEDA; Kazuhiro ; et al.	2019-10-24
Plasma processing apparatus and plasma processing method Grant 10,395,935 - Ishiguro , et al. A	2019-08-27
Plasma Processing Apparatus And Prediction Apparatus Of The Condition Of Plasma Processing Apparatus App 20190237309 - KAMAJI; Yoshito ; et al.	2019-08-01
Plasma Processing Apparatus And Prediction Method Of The Condition Of Plasma Processing Apparatus App 20190088455 - KAMAJI; Yoshito ; et al.	2019-03-21
Plasma processing method Grant 10,184,173 - Yonemoto , et al. Ja	2019-01-22
Plasma Processing Apparatus And Plasma Processing Method App 20180190502 - ISHIGURO; Masaki ; et al.	2018-07-05
Plasma processing apparatus and plasma processing method Grant 9,960,031 - Sumiya , et al. May 1, 2	2018-05-01
Plasma processing apparatus and plasma processing method Grant 9,941,133 - Ishiguro , et al. April 10, 2	2018-04-10
Plasma Processing Method App 20180082855 - SASAKI; Junya ; et al.	2018-03-22
Availability prediction apparatus for electric power storage device Grant 9,915,928 - Ito , et al. March 13, 2	2018-03-13
Plasma Processing Apparatus And Method For Releasing Sample App 20180040491 - ISHIGURO; Masaki ; et al.	2018-02-08
Method For Releasing Sample And Plasma Processing Apparatus Using Same App 20170194157 - ISHIGURO; Masaki ; et al.	2017-07-06
Power supply system Grant 9,597,975 - Ito , et al. March 21, 2	2017-03-21
Plasma Processing Apparatus And Plasma Processing Method App 20170032955 - Sumiya; Masahiro ; et al.	2017-02-02
Plasma Processing Apparatus And Data Analysis Apparatus App 20160379896 - ASAKURA; Ryoji ; et al.	2016-12-29
Plasma Processing Apparatus And Plasma Processing Method App 20160336185 - ISHIGURO; Masaki ; et al.	2016-11-17
Plasma processing apparatus and plasma processing method Grant 9,496,147 - Sumiya , et al. November 15, 2	2016-11-15
Plasma Processing Apparatus App 20160172161 - IKENAGA; Kazuyuki ; et al.	2016-06-16
Plasma Processing Apparatus App 20160027615 - ISHIGURO; Masaki ; et al.	2016-01-28
Plasma Processing Apparatus And Plasma Processing Method App 20160027618 - Kawakami; Masatoshi ; et al.	2016-01-28
Plasma Processing Apparatus And Plasma Processing Method App 20150024599 - SUMIYA; Masahiro ; et al.	2015-01-22
Plasma Processing Method And Vacuum Processing Apparatus App 20140377958 - Tanaka; Kazuumi ; et al.	2014-12-25
Availability Prediction Apparatus For Electric Power Storage Device App 20140094981 - Ito; Akira ; et al.	2014-04-03
Plasma Processing Apparatus And Plasma Processing Method App 20140053983 - SUMIYA; Masahiro ; et al.	2014-02-27
Plasma processing apparatus and plasma processing method Grant 8,557,709 - Sumiya , et al. October 15, 2	2013-10-15
Power Supply System App 20130024035 - ITO; Akira ; et al.	2013-01-24
Plasma Processing Apparatus And Plasma Processing Method App 20120252200 - Sumiya; Masahiro ; et al.	2012-10-04
Plasma processing apparatus and plasma processing method Grant 8,236,701 - Sumiya , et al. August 7, 2	2012-08-07
Plasma Processing Apparatus And Plasma Processing Method App 20110226734 - SUMIYA; MASAHIRO ; et al.	2011-09-22
Plasma processing method and apparatus Grant 7,771,608 - Sumiya , et al. August 10, 2	2010-08-10
Plasma Processing Apparatus And Plasma Processing Method App 20100197137 - SUMIYA; Masahiro ; et al.	2010-08-05
Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method Grant 7,615,132 - Yasui , et al. November 10, 2	2009-11-10
Dry etching method of insulating film Grant 7,585,776 - Negishi , et al. September 8, 2	2009-09-08
Plasma Processing Apparatus And Method With Controlled Biasing Functions App 20090165955 - SUMIYA; Masahiro ; et al.	2009-07-02
Plasma processing apparatus using active matching Grant 7,373,899 - Sumiya , et al. May 20, 2	2008-05-20
Dry Etching Method Of Insulating Film App 20080085605 - Negishi; Nobuyuki ; et al.	2008-04-10
Plasma processing method and apparatus App 20080068774 - Sumiya; Masahiro ; et al.	2008-03-20
Plasma Processing Apparatus Having High Frequency Power Source With Sag Compensation Function And Plasma Processing Method App 20070186856 - YASUI; NAOKI ; et al.	2007-08-16
Plasma processing apparatus with resonance countermeasure function App 20070181254 - Iida; Tsutomu ; et al.	2007-08-09
Plasma processing apparatus Grant 7,169,255 - Yasui , et al. January 30, 2	2007-01-30
Method and apparatus for plasma processing App 20060196605 - Ikegami; Eiji ; et al.	2006-09-07
Plasma processing method Grant 7,029,594 - Yasui , et al. April 18, 2	2006-04-18
Plasma processing apparatus and method with controlled biasing functions App 20050155711 - Sumiya, Masahiro ; et al.	2005-07-21
Plasma processing method App 20050126712 - Sumiya, Masahiro ; et al.	2005-06-16
Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method App 20050081999 - Yasui, Naoki ; et al.	2005-04-21
Plasma processing apparatus and method with controlled biasing functions Grant 6,875,366 - Sumiya , et al. April 5, 2	2005-04-05
Plasma processing apparatus using active matching App 20050034813 - Sumiya, Masahiro ; et al.	2005-02-17
Plasma processing method and apparatus App 20040238490 - Sumiya, Masahiro ; et al.	2004-12-02
Plasma processing apparatus and method using active matching Grant 6,806,201 - Sumiya , et al. October 19, 2	2004-10-19
Plasma processing method and apparatus Grant 6,777,037 - Sumiya , et al. August 17, 2	2004-08-17
Plasma processing apparatus and plasma processing method App 20040050495 - Sumiya, Masahiro ; et al.	2004-03-18
Plasma processing apparatus and plasma processing method App 20040045673 - Yasui, Naoki ; et al.	2004-03-11
Plasma processing apparatus and plasma processing method App 20030155075 - Yasui, Naoki ; et al.	2003-08-21
Plasma processing method and apparatus App 20020114897 - Sumiya, Masahiro ; et al.	2002-08-22
Plasma processing apparatus and method using active matching App 20020038631 - Sumiya, Masahiro ; et al.	2002-04-04
Plasma processing apparatus and method with controlled biasing functions App 20020031617 - Sumiya, Masahiro ; et al.	2002-03-14