Sumida; Shigeki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sumida; Shigeki.The latest application filed is for "halftone phase shift photomask and blank for halftone phase shift photomask".
- Sumida; Shigeki - Tokyo-to JP
| Patent | Date |
|---|---|
| Halftone phase shift photomask and blank for halftone phase shift photomask Grant 6,869,736 - Nakagawa , et al. March 22, 2 | 2005-03-22 |
| Halftone phase shift photomask and blank for halftone phase shift photomask App 20030186135 - Nakagawa, Hiro-o ; et al. | 2003-10-02 |
| Halftone phase shift photomask and blank for halftone phase shift photomask Grant 6,599,667 - Yusa , et al. July 29, 2 | 2003-07-29 |
| Halftone phase shift photomask and blank for halftone phase shift photomask App 20020039689 - Yusa, Satoshi ; et al. | 2002-04-04 |
| Blank for halftone phase shift photomask and halftone phase shift photomask App 20010005564 - Motonaga, Toshiaki ; et al. | 2001-06-28 |
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