Patent | Date |
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Method and device for polishing semiconductor wafer Grant 10,553,420 - Yamashita Fe | 2020-02-04 |
Producing method and apparatus of silicon single crystal, and silicon single crystal ingot Grant 10,294,583 - Narushima , et al. | 2019-05-21 |
Method for producing single crystal, and method for producing silicon wafer Grant 10,233,562 - Narushima , et al. | 2019-03-19 |
Manufacturing method of silicon monocrystal Grant 10,227,710 - Narushima , et al. | 2019-03-12 |
Scattering plate, grinding wheel, and grinding device Grant 9,975,217 - Nishimura May 22, 2 | 2018-05-22 |
Method for slicing semiconductor single crystal ingot Grant 9,876,078 - Noguchi January 23, 2 | 2018-01-23 |
Manufacturing method of silicon single crystal having low-resistivity electrical characteristics Grant 9,758,899 - Fukuda September 12, 2 | 2017-09-12 |
Method and apparatus for manufacturing epitaxial silicon wafer Grant 9,758,871 - Narahara September 12, 2 | 2017-09-12 |
Epitaxial silicon wafer having reduced stacking faults Grant 9,755,022 - Kawashima , et al. September 5, 2 | 2017-09-05 |
Manufacturing Method Of Silicon Monocrystal App 20170029975 - NARUSHIMA; Yasuhito ;   et al. | 2017-02-02 |
Method for growing an epitaxial film on a phosphorous-doped silicon wafer Grant 9,425,264 - Kawashima , et al. August 23, 2 | 2016-08-23 |
Method And Device For Polishing Semiconductor Wafer App 20160196966 - YAMASHITA; Kenji | 2016-07-07 |
Scattering Plate, Grinding Wheel, And Grinding Device App 20160176020 - NISHIMURA; Yoshinobu | 2016-06-23 |
Method For Producing Single Crystal, And Method For Producing Silicon Wafer App 20160102418 - NARUSHIMA; Yasuhito ;   et al. | 2016-04-14 |
Etching method and etching apparatus of semiconductor wafer Grant 9,305,850 - Kozasa , et al. April 5, 2 | 2016-04-05 |
Semiconductor wafer manufacturing method Grant 9,293,318 - Yamashita March 22, 2 | 2016-03-22 |
Manufacturing Method Of Epitaxial Silicon Wafer, And Epitaxial Silicon Wafer App 20150380493 - KAWASHIMA; Tadashi ;   et al. | 2015-12-31 |
Silicon single crystal pulling device and graphite member used therein Grant 9,212,431 - Kawazoe , et al. December 15, 2 | 2015-12-15 |
Silicon crystalline material and method for manufacturing the same Grant 9,181,631 - Togawa , et al. November 10, 2 | 2015-11-10 |
Single crystal silicon pulling device, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt Grant 9,080,251 - Kamogawa , et al. July 14, 2 | 2015-07-14 |
Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot Grant 9,074,298 - Kawazoe , et al. July 7, 2 | 2015-07-07 |
Semiconductor Wafer Manufacturing Method App 20150162181 - Yamashita; Kenji | 2015-06-11 |
Susceptor for vapor phase epitaxial growth device Grant 9,017,483 - Fujikawa , et al. April 28, 2 | 2015-04-28 |
Silicon Single Crystal Pulling Apparatus And Manufacturing Method Of Silicon Single Crystal App 20150107509 - FUKUDA; Tomohiro | 2015-04-23 |
Method of cleaning semiconductor wafer and semiconductor wafer Grant 8,992,791 - Kozasa , et al. March 31, 2 | 2015-03-31 |
Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up device Grant 8,961,686 - Kawazoe , et al. February 24, 2 | 2015-02-24 |
Method of manufacturing epitaxial silicon wafer and epitaxial silicon wafer manufactured by the method Grant 8,956,927 - Kawashima , et al. February 17, 2 | 2015-02-17 |
Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt Grant 08920561 - | 2014-12-30 |
Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt Grant 8,920,561 - Narushima , et al. December 30, 2 | 2014-12-30 |
Methods for evaluating and manufacturing semiconductor wafer Grant 8,906,777 - Iriguchi , et al. December 9, 2 | 2014-12-09 |
Method of manufacturing epitaxial silicon wafer and apparatus therefor Grant 8,888,913 - Narahara , et al. November 18, 2 | 2014-11-18 |
Method of producing single crystal silicon Grant 8,888,911 - Uto , et al. November 18, 2 | 2014-11-18 |
Method for manufacturing semiconductor wafer Grant 8,853,103 - Sadohara October 7, 2 | 2014-10-07 |
Method for manufacturing single crystal Grant 8,852,340 - Narushima , et al. October 7, 2 | 2014-10-07 |
Method For Slicing Semiconductor Single Crystal Ingot App 20140295126 - NOGUCHI; Hiroshi | 2014-10-02 |
Method of manufacturing silicon single crystal Grant 8,840,721 - Narushima , et al. September 23, 2 | 2014-09-23 |
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate Grant 8,747,551 - Kawazoe , et al. June 10, 2 | 2014-06-10 |
Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus Grant 8,715,416 - Narushima , et al. May 6, 2 | 2014-05-06 |
Manufacturing method of epitaxial silicon wafer and substrate cleaning apparatus Grant 8,696,809 - Kozasa , et al. April 15, 2 | 2014-04-15 |
Polishing pad seasoning method, seasoning plate, and semiconductor polishing device Grant 8,662,961 - Maruoka , et al. March 4, 2 | 2014-03-04 |
Method For Manufacturing Single Crystal App 20140033967 - NARUSHIMA; Yasuhito ;   et al. | 2014-02-06 |
Process For Production Of Silicon Single Crystal, And Highly Doped N-type Semiconductor Substrate App 20140020617 - KAWAZOE; Shinichi ;   et al. | 2014-01-23 |
Manufacturing Method Of Epitaxial Silicon Wafer, And Epitaxial Silicon Wafer App 20140001605 - Kawashima; Tadashi ;   et al. | 2014-01-02 |
Method Of Manufacturing Epitaxial Silicon Wafer And Epitaxial Silicon Wafer Manufactured By The Method App 20130337638 - KAWASHIMA; Tadashi ;   et al. | 2013-12-19 |
Method for manufacturing single crystal Grant 8,580,032 - Narushima , et al. November 12, 2 | 2013-11-12 |
Method For Manufacturing Semiconductor Wafer App 20130295780 - SADOHARA; Shinya | 2013-11-07 |
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate Grant 8,574,363 - Kawazoe , et al. November 5, 2 | 2013-11-05 |
Silicon wafer heat treatment method Grant 8,573,969 - Sadohara , et al. November 5, 2 | 2013-11-05 |
Semiconductor wafer manufacturing method Grant 8,545,712 - Takai , et al. October 1, 2 | 2013-10-01 |
Manufacturing method for silicon single crystal Grant 8,535,439 - Narushima , et al. September 17, 2 | 2013-09-17 |
Silicon single crystal pull-up apparatus having a sliding sample tube Grant 8,518,180 - Narushima , et al. August 27, 2 | 2013-08-27 |
Method for manufacturing semiconductor wafer Grant 8,426,297 - Sadohara April 23, 2 | 2013-04-23 |
Method of dopant injection, N-type silicon single-crystal, doping apparatus and pull-up device Grant 8,409,347 - Kawazoe , et al. April 2, 2 | 2013-04-02 |
Single crystal silicon pulling apparatus, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt Grant 8,404,046 - Kamogawa , et al. March 26, 2 | 2013-03-26 |
Silicon single crystal manufacturing method, silicon single crystal, silicon wafer, apparatus for controlling manufacture of silicon single crystal, and program Grant 8,382,895 - Togawa , et al. February 26, 2 | 2013-02-26 |
Susceptor device, manufacturing apparatus of epitaxial wafer, and manufacturing method of epitaxial wafer Grant 8,372,196 - Nakamura , et al. February 12, 2 | 2013-02-12 |
Method for measuring liquid level in single crystal pulling apparatus employing CZ method Grant 8,361,223 - Hayashida , et al. January 29, 2 | 2013-01-29 |
Semiconductor wafer processing method and apparatus Grant 8,334,222 - Gotou , et al. December 18, 2 | 2012-12-18 |
Etching Method And Etching Apparatus Of Semiconductor Wafer App 20120305187 - Kozasa; Kazuaki ;   et al. | 2012-12-06 |
Slurry supplying apparatus and method of polishing semiconductor wafer utilizing same Grant 8,303,373 - Kozasa November 6, 2 | 2012-11-06 |
Dopant implanting method and doping apparatus Grant 8,283,241 - Narushima , et al. October 9, 2 | 2012-10-09 |
Etching method and etching apparatus of semiconductor wafer Grant 8,273,260 - Kozasa , et al. September 25, 2 | 2012-09-25 |
Double-side grinding apparatus for wafer and double-side grinding method Grant 8,251,778 - Futamura August 28, 2 | 2012-08-28 |
Silicon single crystal substrate and manufacture thereof Grant 8,241,423 - Ikubo , et al. August 14, 2 | 2012-08-14 |
Single crystal manufacturing apparatus and method Grant 8,216,371 - Iida , et al. July 10, 2 | 2012-07-10 |
Device and method for manufacturing a semiconductor wafer Grant 8,196,545 - Kurosawa June 12, 2 | 2012-06-12 |
Semiconductor single crystal manufacturing device and manufacturing method Grant 8,187,383 - Kubota , et al. May 29, 2 | 2012-05-29 |
Control system and method for controlled object in time variant system with dead time, such as single crystal production device by czochralski method Grant 8,150,784 - Bandoh , et al. April 3, 2 | 2012-04-03 |
Position measuring method Grant 8,130,386 - Hayashida , et al. March 6, 2 | 2012-03-06 |
Position measuring device and position measuring method in semiconductor single crystal manufacturing device Grant 8,115,908 - Hayashida , et al. February 14, 2 | 2012-02-14 |
Method for manufacturing single crystal Grant 8,110,042 - Narushima , et al. February 7, 2 | 2012-02-07 |
Method Of Manufacturing Epitaxial Silicon Wafer And Apparatus Therefor App 20120015454 - Narahara; Kazuhiro ;   et al. | 2012-01-19 |
Process for production of silicon single crystal Grant 8,043,428 - Kawazoe , et al. October 25, 2 | 2011-10-25 |
Semiconductor wafer inspection method Grant 8,045,150 - Torii , et al. October 25, 2 | 2011-10-25 |
Method of manufacturing epitaxial silicon wafer and apparatus therefor Grant 8,021,484 - Narahara , et al. September 20, 2 | 2011-09-20 |
Method of manufacturing epitaxial silicon wafer Grant 7,993,452 - Hayashida , et al. August 9, 2 | 2011-08-09 |
Processes For Production Of Silicon Ingot, Silicon Wafer And Epitaxial Wafer , And Silicon Ingot App 20110140241 - Kawazoe; Shinichi ;   et al. | 2011-06-16 |
Method For Manufacturing Semiconductor Wafer App 20110143526 - Sadohara; Shinya | 2011-06-16 |
Silicon Single Crystal Pull-up Apparatus App 20110132257 - Narushima; Yasuhito ;   et al. | 2011-06-09 |
Silicon Single Crystal Pull-up Apparatus App 20110120367 - Narushima; Yasuhito ;   et al. | 2011-05-26 |
Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingot Grant 7,918,934 - Shiraishi , et al. April 5, 2 | 2011-04-05 |
Method of predicting internal gettering behavior in silicon substrates and storage medium storing program for predicting internal gettering behavior Grant 7,920,999 - Nakamura April 5, 2 | 2011-04-05 |
Silicon Single Crystal Pulling Apparatus And Manufacturing Method Of Silicon Single Crystal App 20110017948 - Fukuda; Tomohiro | 2011-01-27 |
Silicon single crystal producing method, annealed wafer, and method of producing annealed wafer Grant 7,875,116 - Sadohara , et al. January 25, 2 | 2011-01-25 |
Nitrogen doped silicon wafer and manufacturing method thereof Grant 7,875,117 - Nakamura , et al. January 25, 2 | 2011-01-25 |
Producing Method And Apparatus Of Silicon Single Crystal, And Silicon Single Crystal Ingot App 20100294999 - Narushima; Yasuhito ;   et al. | 2010-11-25 |
Semiconductor Wafer Manufacturing Method App 20100285665 - Takai; Hiroshi ;   et al. | 2010-11-11 |
Film Formation Reactive Apparatus And Method For Producing Film-formed Substrate App 20100272892 - KOBAYASHI; Hidenori ;   et al. | 2010-10-28 |
Method Of Manufacturing Monocrystal, Flow Straightening Cylinder, And Monocrystal Pulling-up Device App 20100212580 - Kawazoe; Shinichi ;   et al. | 2010-08-26 |
Semiconductor Single Crystal Production Apparatus App 20100212588 - Suda; Ayumi ;   et al. | 2010-08-26 |
Clamp App 20100207385 - Nishimura; Tomokazu | 2010-08-19 |
Method and apparatus for measuring spectroscopic absorbance Grant 7,767,969 - Nagai , et al. August 3, 2 | 2010-08-03 |
Method for manufacturing single crystal semiconductor Grant 7,767,020 - Inagaki , et al. August 3, 2 | 2010-08-03 |
Silicon semiconductor substrate heat-treatment method and silicon semiconductor substrate treated by the method Grant 7,759,227 - Maeda , et al. July 20, 2 | 2010-07-20 |
Manufacturing Method For Silicon Single Crystal App 20100175612 - NARUSHIMA; Yasuhito ;   et al. | 2010-07-15 |
Method of heat treatment of silicon wafer doped with boron Grant 7,754,585 - Sato , et al. July 13, 2 | 2010-07-13 |
Dopant Implanting Method And Doping Apparatus App 20100151667 - Narushima; Yasuhito ;   et al. | 2010-06-17 |
Method And Apparatus For Manufacturing Epitaxial Silicon Wafer App 20100143579 - NARAHARA; Kazuhiro | 2010-06-10 |
Double-side Grinding Apparatus For Wafer And Double-side Grinding Method App 20100144248 - FUTAMURA; Hiroyasu | 2010-06-10 |
Process For Production Of Silicon Single Crystal, And Silicon Single Crystal Substrate App 20100133485 - Kawazoe; Shinichi ;   et al. | 2010-06-03 |
Apparatus for pulling single crystal by CZ method Grant 7,727,334 - Inagaki , et al. June 1, 2 | 2010-06-01 |
Silicon Crystalline Material And Method For Manufacturing The Same App 20100116194 - Togawa; Shinji ;   et al. | 2010-05-13 |
Susceptor Device, Manufacturing Apparatus Of Epitaxial Wafer, And Manufacturing Method Of Epitaxial Wafer App 20100112213 - NAKAMURA; Motonori ;   et al. | 2010-05-06 |
Polishing Pad Seasoning Method, Seasoning Plate, And Semiconductor Polishing Device App 20100105295 - MARUOKA; Daisuke ;   et al. | 2010-04-29 |
Control System and Method for Controlled Object in Time Variant System With Dead Time, Such As Single Crystal Production Device by Czochralski Method App 20100100217 - Bandoh; Kenichi ;   et al. | 2010-04-22 |
Epitaxial wafer production apparatus and susceptor structure Grant 7,699,934 - Kai April 20, 2 | 2010-04-20 |
Method Of Cleaning Semiconductor Wafer And Semiconductor Wafer App 20100093177 - KOZASA; Kazuaki ;   et al. | 2010-04-15 |
Method and apparatus for collecting chemicals from semiconductor wafer Grant 7,686,891 - Wakuda , et al. March 30, 2 | 2010-03-30 |
Semiconductor Wafer Inspection Method App 20100060891 - TORII; Kantarou ;   et al. | 2010-03-11 |
Method For Manufacturing Single Crystal App 20100050931 - Narushima; Yasuhito ;   et al. | 2010-03-04 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer Grant 7,666,063 - Kozasa , et al. February 23, 2 | 2010-02-23 |
Polishing apparatus, polishing head and polishing method Grant 7,654,883 - Kitahashi , et al. February 2, 2 | 2010-02-02 |
Method For Heat-treating Silicon Wafer App 20100009548 - Nakamura; Kozo ;   et al. | 2010-01-14 |
Method for manufacturing a semiconductor wafer App 20090311862 - Tajiri; Tomoaki ;   et al. | 2009-12-17 |
Slurry Supplying Apparatus And Method Of Polishing Semiconductor Wafer Utilizing Same App 20090298393 - Kozasa; Kazuaki | 2009-12-03 |
Wafer Conveyance Method And Wafer Conveyance Device App 20090297302 - Sakamoto; Shinji | 2009-12-03 |
Single crystal manufacturing apparatus and method App 20090293800 - Iida; Tetsuhiro ;   et al. | 2009-12-03 |
Etching Method And Etching Apparatus Of Semiconductor Wafer App 20090286333 - Kozasa; Kazuaki ;   et al. | 2009-11-19 |
Semiconductor Wafer Processing Method And Apparatus App 20090275213 - Gotou; Isamu ;   et al. | 2009-11-05 |
Device and method for manufacturing a semiconductor wafer App 20090269861 - Kurosawa; Yoshiaki | 2009-10-29 |
Single Crystal Silicon Pulling Apparatus, Method for Preventing Contamination of Silicon Melt, and Device for Preventing Contamination of Silicon Melt App 20090229512 - Kamogawa; Makato ;   et al. | 2009-09-17 |
Methods For Evaluating And Manufacturing Semiconductor Wafer App 20090197359 - Iriguchi; Kazuhiro ;   et al. | 2009-08-06 |
Method and apparatus for measuring spectroscopic absorbance App 20090173884 - Nagai; Kiyoshi ;   et al. | 2009-07-09 |
Method Of Injecting Dopant Gas App 20090145350 - Narushima; Yasuhito ;   et al. | 2009-06-11 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer Grant 7,540,800 - Kozasa , et al. June 2, 2 | 2009-06-02 |
Method for producing epitaxial silicon wafer Grant 7,537,658 - Nasu , et al. May 26, 2 | 2009-05-26 |
Method for manufacturing defect-free silicon single crystal Grant 7,524,371 - Yokoyama , et al. April 28, 2 | 2009-04-28 |
Polishing apparatus, polishing head and polishing method Grant 7,507,148 - Kitahashi , et al. March 24, 2 | 2009-03-24 |
Method Of Recycling Abrasive Slurry App 20090053981 - Kozasa; Kazuaki ;   et al. | 2009-02-26 |
Method and apparatus for etching disk-like member Grant 7,494,597 - Miyazaki , et al. February 24, 2 | 2009-02-24 |
Rough Polishing Method Of Semiconductor Wafer And Polishing Apparatus Of Semiconductor Wafer App 20090042482 - KOZASA; Kazuaki ;   et al. | 2009-02-12 |
Silicon Single Crystal Substrate And Manufacture Thereof App 20080224270 - Ikubo; Eisyun ;   et al. | 2008-09-18 |
Semiconductor single crystal manufacturing apparatus Grant 7,413,609 - Umeki August 19, 2 | 2008-08-19 |
Single crystal semiconductor manufacturing apparatus and method Grant 7,396,406 - Inagaki , et al. July 8, 2 | 2008-07-08 |
Semiconductor single crystal manufacturing apparatus and graphite crucible Grant 7,390,361 - Iida , et al. June 24, 2 | 2008-06-24 |
Method For Producing Epitaxial Silicon Wafer App 20080131605 - Nasu; Yuichi ;   et al. | 2008-06-05 |
Silicon Single Crystal Pulling Device And Graphite Member Used Therein App 20080078322 - Kawazoe; Shinichi ;   et al. | 2008-04-03 |
Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer App 20080081541 - Kozasa; Kazuaki ;   et al. | 2008-04-03 |
Apparatus and method for depositing layer on substrate App 20070281084 - Hirosawa; Atsuhiko ;   et al. | 2007-12-06 |
Polishing method for semiconductor wafer Grant 7,303,691 - Kozasa , et al. December 4, 2 | 2007-12-04 |
Method for manufacturing a silicon single crystal App 20070240629 - Kotooka; Toshirou ;   et al. | 2007-10-18 |
Method of manufacturing epitaxial silicon wafer App 20070228524 - Hayashida; Koichiro ;   et al. | 2007-10-04 |
Apparatus for pulling single crystal by CZ method Grant 7,244,309 - Ebi , et al. July 17, 2 | 2007-07-17 |
Single crystal silicon producing method, single crystal silicon wafer producing method, seed crystal for producing single crystal silicon, single crystal silicon ingot, and single crystal silicon wafer Grant 7,226,506 - Iida , et al. June 5, 2 | 2007-06-05 |
Method for vanishing defects in single crystal silicon and single crystal silicon Grant 7,226,505 - Ando , et al. June 5, 2 | 2007-06-05 |
Epitaxial silicon wafer App 20070113778 - Komiya; Satoshi ;   et al. | 2007-05-24 |