Patent | Date |
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Multi-spot scanning collection optics Grant 9,970,883 - Sullivan , et al. May 15, 2 | 2018-05-15 |
System and method for oblique incidence scanning with 2D array of spots Grant 9,891,175 - Sullivan , et al. February 13, 2 | 2018-02-13 |
Systems and methods for run-time alignment of a spot scanning wafer inspection system Grant 9,864,173 - Sullivan , et al. January 9, 2 | 2018-01-09 |
System and method for apodization in a semiconductor device inspection system Grant 9,645,093 - Sullivan , et al. May 9, 2 | 2017-05-09 |
Multi-spot Scanning Collection Optics App 20170115232 - Sullivan; Jamie M. ;   et al. | 2017-04-27 |
Multi-spot scanning collection optics Grant 9,546,962 - Sullivan , et al. January 17, 2 | 2017-01-17 |
System and Method for Oblique Incidence Scanning with 2D Array of Spots App 20160327493 - Sullivan; Jamie M. ;   et al. | 2016-11-10 |
Systems and Methods for Run-Time Alignment of a Spot Scanning Wafer Inspection System App 20160313256 - Sullivan; Jamie M. ;   et al. | 2016-10-27 |
Enhanced high-speed logarithmic photo-detector for spot scanning system Grant 9,389,166 - Wolf , et al. July 12, 2 | 2016-07-12 |
System and Method for Apodization in a Semiconductor Device Inspection System App 20160054232 - Sullivan; Jamie M. ;   et al. | 2016-02-25 |
Image synchronization of scanning wafer inspection system Grant 9,208,553 - Cao , et al. December 8, 2 | 2015-12-08 |
System and method for apodization in a semiconductor device inspection system Grant 9,176,069 - Sullivan , et al. November 3, 2 | 2015-11-03 |
Multi-spot Scanning Collection Optics App 20150226677 - Sullivan; Jamie M. ;   et al. | 2015-08-13 |
Image Synchronization Of Scanning Wafer Inspection System App 20150170357 - Cao; Kai ;   et al. | 2015-06-18 |
Image synchronization of scanning wafer inspection system Grant 8,995,746 - Cao , et al. March 31, 2 | 2015-03-31 |
Image Synchronization Of Scanning Wafer Inspection System App 20140270471 - Cao; Kai ;   et al. | 2014-09-18 |
System and Method for Apodization in a Semiconductor Device Inspection System App 20140016125 - Sullivan; Jamie M. ;   et al. | 2014-01-16 |
Enhanced High-speed Logarithmic Photo-detector For Spot Scanning System App 20130169957 - Wolf; Ralph C. ;   et al. | 2013-07-04 |
Apparatus and methods for optically inspecting a sample for anomalies Grant 7,012,683 - Wolf , et al. March 14, 2 | 2006-03-14 |
Apparatus and methods for optically inspecting a sample for anomalies App 20050092899 - Wolf, Ralph C. ;   et al. | 2005-05-05 |
Apparatus and methods for optically inspecting a sample for anomalies Grant 6,833,913 - Wolf , et al. December 21, 2 | 2004-12-21 |
UV compatible programmable spatial filter Grant 6,686,994 - Wilk , et al. February 3, 2 | 2004-02-03 |
UV compatible programmable spatial filter App 20030184739 - Wilk, Dieter E. ;   et al. | 2003-10-02 |