Sui; Zhifeng

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sui; Zhifeng.The latest application filed is for "rotational absorption spectra for semiconductor manufacturing process monitoring and control".

Company Profile

0.10.9

Sui; Zhifeng - Fremont CA
Sui; Zhifeng - Milpitas CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods for processing substrates in process systems having shared resources Grant 8,721,798 - Cruse , et al. May 13, 2	2014-05-13
Rotational Absorption Spectra For Semiconductor Manufacturing Process Monitoring And Control App 20130309785 - SUI; ZHIFENG ; et al.	2013-11-21
Methods for processing substrates in process systems having shared resources Grant 8,496,756 - Cruse , et al. July 30, 2	2013-07-30
Methods For Processing Substrates In Process Systems Having Shared Resources App 20110265814 - CRUSE; JAMES P. ; et al.	2011-11-03
Methods For Processing Substrates In Process Systems Having Shared Resources App 20110266256 - Cruse; James P. ; et al.	2011-11-03
Endpoint Detection For A Reactor Chamber Using A Remote Plasma Chamber App 20100224322 - SUI; ZHIFENG ; et al.	2010-09-09
Interferometric endpoint detection in a substrate etching process Grant 6,905,624 - Frum , et al. June 14, 2	2005-06-14
Interferometric endpoint detection in a substrate etching process App 20050006341 - Frum, Coriolan I. ; et al.	2005-01-13
Monitoring substrate processing using reflected radiation Grant 6,831,742 - Sui , et al. December 14, 2	2004-12-14
Monitoring dimensions of features at different locations in the processing of substrates Grant 6,829,056 - Barnes , et al. December 7, 2	2004-12-07
Endpoint detection in substrate fabrication processes Grant 6,813,534 - Sui , et al. November 2, 2	2004-11-02
Monitoring substrate processing with optical emission and polarized reflected radiation Grant 6,559,942 - Sui , et al. May 6, 2	2003-05-06
Endpoint detection in substrate fabrication processes App 20020183977 - Sui, Zhifeng ; et al.	2002-12-05
Monitoring substrate processing with optical emission and polarized reflected radiation App 20020048019 - Sui, Zhifeng ; et al.	2002-04-25
High switching speed digital faraday rotator device and optical switches reduced cross talk and state sensing capability App 20020009254 - Sui, Zhifeng	2002-01-24
High switching speed digital faraday rotator device and optical switches containing the same App 20020003651 - Sui, Zhifeng	2002-01-10
Bandpass photon detector Grant 5,995,235 - Sui , et al. November 30, 1	1999-11-30

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