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Organic Contamination Free Surface Machining
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Remote Plasma Cleaning Of Chambers For Electronics Manufacturing Systems
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Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based Selective Deposition
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Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition
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Detection Of Surface Particles On Chamber Components With Carbon Dioxide
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RPS defect reduction by cyclic clean induced RPS cooling
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Method For Particle Removal From Wafers Through Plasma Modification In Pulsed PVD
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Method and Apparatus for cleaning a substrate
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Arcing Test Vehicle And Method Of Use Thereof
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Substrate Support With Edge Seal
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Substrate support apparatus having reduced substrate particle generation
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Methods And Apparatus For Cryogenic Gas Stream Assisted SAM-Based Selective Deposition
App 20190210061 - Ke; Chang ; et al. | 2019-07-11 |
Methods and apparatus for substrate edge cleaning
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Cleaning of chamber components with solid carbon dioxide particles
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Rps Defect Reduction By Cyclic Clean Induced Rps Cooling
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Methods And Apparatus For Substrate Edge Cleaning
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Methods and Apparatus for Cleaning a Substrate
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Methods and apparatus for substrate edge cleaning
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Substrate transfer robot end effector
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In situ chamber clean with inert hydrogen helium mixture during wafer process
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Two piece shutter disk assembly for a substrate process chamber
Grant 9,252,002 - Tsai , et al. February 2, 2 | 2016-02-02 |
Cleaning Of Chamber Components With Solid Carbon Dioxide Particles
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Substrate Transfer Robot End Effector
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Methods and apparatus for cleaning a substrate
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Finned shutter disk for a substrate process chamber
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Substrate Support Apparatus Having Reduced Substrate Particle Generation
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Methods And Apparatus For Cleaning A Substrate
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Methods And Apparatus For Substrate Edge Cleaning
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Finned Shutter Disk For A Substrate Process Chamber
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Two Piece Shutter Disk Assembly For A Substrate Process Chamber
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In-situ Clean Process For Metal Deposition Chambers
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Substrate Support Components Having Quartz Contact Tips
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Contaminant reducing substrate transport and support system
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