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Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller Grant 9,098,082 - Sugiyama , et al. August 4, 2 | 2015-08-04 |
Device And Method For Supplying Gas While Dividing To Chamber From Gas Supplying Facility Equipped With Flow Controller App 20130340837 - Sugiyama; Kazuhiko ;   et al. | 2013-12-26 |
Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller Grant 8,496,022 - Sugiyama , et al. July 30, 2 | 2013-07-30 |
Internet telephone system ensuring communication quality and path setting method Grant 8,098,672 - Sugiyama , et al. January 17, 2 | 2012-01-17 |
Apparatus and method of dividing and supplying gas to a chamber from a gas supply apparatus equipped with flow-rate control system App 20110094596 - Sugiyama; Kazuhiko ;   et al. | 2011-04-28 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method Grant 7,926,509 - Ohmi , et al. April 19, 2 | 2011-04-19 |
Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device Grant 7,669,455 - Ohmi , et al. March 2, 2 | 2010-03-02 |
Transmission apparatus Grant 7,654,927 - Kimura , et al. February 2, 2 | 2010-02-02 |
Semiconductor device manufacturing method and manufacturing line thereof Grant 7,566,665 - Inoue , et al. July 28, 2 | 2009-07-28 |
Pipe joint Grant 7,497,482 - Sugiyama , et al. March 3, 2 | 2009-03-03 |
Starting apparatus for differential planetary gear apparatus Grant 7,494,438 - Kimura , et al. February 24, 2 | 2009-02-24 |
Display device App 20090031599 - Ogikubo; Konomu ;   et al. | 2009-02-05 |
Transmission apparatus App 20080274850 - Kimura; Katsumi ;   et al. | 2008-11-06 |
Differential pressure type flowmeter and differential pressure type flow controller Grant 7,367,241 - Ohmi , et al. May 6, 2 | 2008-05-06 |
Internet Telephone System Ensuring Communication Quality And Path Setting Method App 20080101583 - Sugiyama; Kazuhiko ;   et al. | 2008-05-01 |
Internet telephone system ensuring communication quality and path setting method Grant 7,336,603 - Sugiyama , et al. February 26, 2 | 2008-02-26 |
Transmission apparatus Grant 7,297,084 - Kimura , et al. November 20, 2 | 2007-11-20 |
Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device App 20070151321 - Ohmi; Tadahiro ;   et al. | 2007-07-05 |
Differential planetary gear apparatus and starting apparatus and method for differential planetary gear apparatus App 20070155570 - Kimura; Katsumi ;   et al. | 2007-07-05 |
Differential planetary gear device, and differential planetary gear device starting device and starting method Grant 7,211,018 - Kimura , et al. May 1, 2 | 2007-05-01 |
Differential pressure type flowmeter and differential pressure type flowmeter controller App 20060236781 - Ohmi; Tadahiro ;   et al. | 2006-10-26 |
Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus Grant 7,085,628 - Ohmi , et al. August 1, 2 | 2006-08-01 |
Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system Grant 7,059,363 - Sugiyama , et al. June 13, 2 | 2006-06-13 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method App 20060076060 - Ohmi; Tadahiro ;   et al. | 2006-04-13 |
Fluid coupling Grant 7,014,021 - Kimura , et al. March 21, 2 | 2006-03-21 |
Semiconductor device manufacturing method and manufacturing line thereof App 20050260824 - Inoue, Junichi ;   et al. | 2005-11-24 |
ATM edge node switching equipment utilized IP-VPN function Grant 6,967,954 - Sugiyama November 22, 2 | 2005-11-22 |
Pressure-type flow rate control apparatus Grant 6,964,279 - Ohmi , et al. November 15, 2 | 2005-11-15 |
Vertical axis windmill App 20050212300 - Kimura, Katsumi ;   et al. | 2005-09-29 |
Pipe joint App 20050179259 - Sugiyama, Kazuhiko ;   et al. | 2005-08-18 |
Transmission apparatus App 20050164818 - Kimura, Katsumi ;   et al. | 2005-07-28 |
Semiconductor device manufacturing method and manufacturing line thereof App 20050112889 - Inoue, Junichi ;   et al. | 2005-05-26 |
Differential planetary gear device, and differential planetary gear device starting device and starting method App 20050113201 - Kimura, Katsumi ;   et al. | 2005-05-26 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus Grant 6,848,470 - Ohmi , et al. February 1, 2 | 2005-02-01 |
Method for supplying gas while dividing to chamber from gas supply facility equipped with flow controller App 20050005994 - Sugiyama, Kazuhiko ;   et al. | 2005-01-13 |
Method of manufacturing semiconductor device and manufacturing line thereof Grant 6,841,485 - Inoue , et al. January 11, 2 | 2005-01-11 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus Grant 6,820,632 - Ohmi , et al. November 23, 2 | 2004-11-23 |
Advance pressure type flow control device App 20040204794 - Ohmi, Tadahiro ;   et al. | 2004-10-14 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus App 20040154664 - Ohmi, Tadahiro ;   et al. | 2004-08-12 |
Pressure sensor, pressure controller and temperature drift corrector of pressure type flow controller App 20040144178 - Ohmi, Tadahiro ;   et al. | 2004-07-29 |
Power transmission device Grant 6,725,657 - Kimura , et al. April 27, 2 | 2004-04-27 |
Fluid coupling App 20040074727 - Kimura, Katsumi ;   et al. | 2004-04-22 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus App 20020179149 - Ohmi, Tadahiro ;   et al. | 2002-12-05 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus Grant 6,422,264 - Ohmi , et al. July 23, 2 | 2002-07-23 |
Integrated fluid supply apparatus, sealing device used there, and semiconductor manufacturing system using it App 20020060360 - Sugiyama, Kazuhiko ;   et al. | 2002-05-23 |
Method and system for selling and buying insurance for damages caused by the internet-related activities App 20020040306 - Sugiyama, Kazuhiko ;   et al. | 2002-04-04 |
Internet telephone system ensuring communication quality and path setting method App 20010024438 - Sugiyama, Kazuhiko ;   et al. | 2001-09-27 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus App 20010004903 - Ohmi, Tadahiro ;   et al. | 2001-06-28 |
ATM edge node switching equipment utilized IP-VPN function App 20010005381 - Sugiyama, Kazuhiko | 2001-06-28 |
Fluid supply apparatus Grant 6,178,995 - Ohmi , et al. January 30, 2 | 2001-01-30 |
Pressure-type flow rate control apparatus Grant 6,152,168 - Ohmi , et al. November 28, 2 | 2000-11-28 |
Amino-acid amide derivatives, processes for preparing the same, agricultural or horticultural fungicides, and method for killing fungi Grant 5,789,428 - Shibata , et al. August 4, 1 | 1998-08-04 |
Plasma processing apparatus capable of detecting and regulating actual RF power at electrode within chamber Grant 5,314,603 - Sugiyama , et al. May 24, 1 | 1994-05-24 |
Process gas supplying apparatus Grant 5,241,987 - Ohmi , et al. September 7, 1 | 1993-09-07 |
Apparatus for oxidation treatment of metal Grant 5,224,998 - Ohmi , et al. July 6, 1 | 1993-07-06 |
Plasma generating apparatus Grant 5,147,493 - Nishimura , et al. September 15, 1 | 1992-09-15 |
Alkanoic acid derivatives and herbicidal compositions Grant 5,087,289 - Kaku , et al. February 11, 1 | 1992-02-11 |
Alkanoic acid derivatives and herbicidal compositions Grant 4,968,340 - Kaku , et al. November 6, 1 | 1990-11-06 |
Cylinder cabinet piping system Grant 4,869,301 - Ohmi , et al. September 26, 1 | 1989-09-26 |
2-(4',6'-di-substituted pyrimidine-2'-yl)oxy- or thio-benzoic acid Grant 4,770,691 - Nezu , et al. September 13, 1 | 1988-09-13 |