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Image processor, method for generating pattern using self-organizing lithographic techniques and computer program Grant 10,732,512 - Sutani , et al. | 2020-08-04 |
Pattern measurement device, and computer program for measuring pattern Grant 10,545,018 - Yamaguchi , et al. Ja | 2020-01-28 |
Image Processor, Method for Generating Pattern Using Self-Organizing Lithographic Techniques and Computer Program App 20180181009 - SUTANI; Takumichi ;   et al. | 2018-06-28 |
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Image Processor, Method For Generating Pattern Using Self- Organizing Lithographic Techniques And Computer Program App 20150277237 - Sutani; Takumichi ;   et al. | 2015-10-01 |
Method of creating template for matching, as well as device for creating template Grant 8,867,818 - Matsuoka , et al. October 21, 2 | 2014-10-21 |
Semiconductor Inspection System App 20140219545 - Sugiyama; Akiyuki ;   et al. | 2014-08-07 |
Pattern measurement apparatus Grant 8,788,242 - Matsuoka , et al. July 22, 2 | 2014-07-22 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 8,577,124 - Toyoda , et al. November 5, 2 | 2013-11-05 |
System and method of image processing, and scanning electron microscope Grant 8,515,153 - Sugiyama , et al. August 20, 2 | 2013-08-20 |
Pattern measuring method and pattern measuring device Grant 8,507,856 - Sutani , et al. August 13, 2 | 2013-08-13 |
Pattern measurement apparatus Grant 8,445,871 - Matsuoka , et al. May 21, 2 | 2013-05-21 |
Pattern Shape Evaluation Method, Pattern Shape Evaluation Device, Pattern Shape Evaluating Data Generation Device And Semiconductor Shape Evaluation System Using The Same App 20130117723 - TOYODA; Yasutaka ;   et al. | 2013-05-09 |
Pattern shape evaluation method Grant 8,355,562 - Toyoda , et al. January 15, 2 | 2013-01-15 |
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus Grant 8,338,804 - Morokuma , et al. December 25, 2 | 2012-12-25 |
Pattern measuring method and pattern measuring device Grant 8,311,314 - Matsuoka , et al. November 13, 2 | 2012-11-13 |
Method and apparatus for computing degree of matching Grant 8,285,056 - Taguchi , et al. October 9, 2 | 2012-10-09 |
Pattern Measuring Method And Pattern Measuring Device App 20120211653 - SUTANI; Takumichi ;   et al. | 2012-08-23 |
Pattern matching method and computer program for executing pattern matching Grant 8,244,042 - Sugiyama , et al. August 14, 2 | 2012-08-14 |
Method Of Creating Template For Matching, As Well As Device For Creating Template App 20120121160 - Matsuoka; Ryoichi ;   et al. | 2012-05-17 |
Pattern displacement measuring method and pattern measuring device Grant 8,173,962 - Sutani , et al. May 8, 2 | 2012-05-08 |
Method And Apparatus Of Pattern Inspection And Semiconductor Inspection System Using The Same App 20120099781 - TOYODA; Yasutaka ;   et al. | 2012-04-26 |
System And Method Of Image Processing, And Scanning Electron Microscope App 20120092483 - SUGIYAMA; Akiyuki ;   et al. | 2012-04-19 |
Pattern Measurement Apparatus App 20120053892 - Matsuoka; Ryoichi ;   et al. | 2012-03-01 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 8,115,169 - Toyoda , et al. February 14, 2 | 2012-02-14 |
System and method of image processing, and scanning electron microscope Grant 8,094,920 - Sugiyama , et al. January 10, 2 | 2012-01-10 |
Method, device and computer program of length measurement Grant 8,019,161 - Morokuma , et al. September 13, 2 | 2011-09-13 |
Sample Dimension Inspecting/measuring Method And Sample Dimension Inspecting/measuring Apparatus App 20110158543 - Morokuma; Hidetoshi ;   et al. | 2011-06-30 |
Pattern Matching Method And Computer Program For Executing Pattern Matching App 20110150345 - SUGIYAMA; Akiyuki ;   et al. | 2011-06-23 |
Pattern search method Grant 7,941,008 - Satou , et al. May 10, 2 | 2011-05-10 |
Pattern matching method and computer program for executing pattern matching Grant 7,925,095 - Sugiyama , et al. April 12, 2 | 2011-04-12 |
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus Grant 7,923,703 - Morokuma , et al. April 12, 2 | 2011-04-12 |
Pattern matching method and pattern matching program Grant 7,889,909 - Shindo , et al. February 15, 2 | 2011-02-15 |
Pattern Measurement Apparatus App 20100202654 - MATSUOKA; Ryoichi ;   et al. | 2010-08-12 |
Charged particle system Grant 7,772,554 - Sugiyama , et al. August 10, 2 | 2010-08-10 |
Pattern Displacement Measuring Method And Pattern Measuring Device App 20100140472 - SUTANI; Takumichi ;   et al. | 2010-06-10 |
Pattern measurement apparatus Grant 7,732,792 - Matsuoka , et al. June 8, 2 | 2010-06-08 |
Pattern displacement measuring method and pattern measuring device Grant 7,679,055 - Sutani , et al. March 16, 2 | 2010-03-16 |
Pattern Measuring Method And Pattern Measuring Device App 20090232385 - MATSUOKA; Ryoichi ;   et al. | 2009-09-17 |
Method And Apparatus For Computing Degree Of Matching App 20090232405 - Taguchi; Junichi ;   et al. | 2009-09-17 |
Sample Dimension Inspecting/measuring Method And Sample Dimension Inspecting/measuring Apparatus App 20090218491 - Morokuma; Hidetoshi ;   et al. | 2009-09-03 |
Pattern Measuring Method And Pattern Measuring Device App 20090200465 - SUTANI; Takumichi ;   et al. | 2009-08-13 |
Method And Apparatus Of Pattern Inspection And Semiconductor Inspection System Using The Same App 20090152463 - TOYODA; Yasutaka ;   et al. | 2009-06-18 |
Pattern measuring method and pattern measuring device Grant 7,518,110 - Sutani , et al. April 14, 2 | 2009-04-14 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same Grant 7,507,961 - Toyoda , et al. March 24, 2 | 2009-03-24 |
Pattern Shape Evaluation Method, Pattern Shape Evaluation Device, Pattern Shape Evaluating Data Generation Device And Semiconductor Shape Evaluation System Using The Same App 20090052765 - TOYODA; Yasutaka ;   et al. | 2009-02-26 |
Pattern Measurement Apparatus App 20090039263 - MATSUOKA; Ryoichi ;   et al. | 2009-02-12 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method Grant 7,449,689 - Nagatomo , et al. November 11, 2 | 2008-11-11 |
Charged Particle System App 20080245965 - Sugiyama; Akiyuki ;   et al. | 2008-10-09 |
Pattern displacement measuring method and pattern measuring device App 20080224035 - Sutani; Takumichi ;   et al. | 2008-09-18 |
Pattern matching method and computer program for executing pattern matching App 20080037830 - Sugiyama; Akiyuki ;   et al. | 2008-02-14 |
Workpiece size measurement method and apparatus App 20070221842 - Morokuma; Hidetoshi ;   et al. | 2007-09-27 |
Pattern matching method and pattern matching program App 20070223803 - Shindo; Hiroyuki ;   et al. | 2007-09-27 |
System and method of image processing, and scanning electron microscope App 20070092129 - Sugiyama; Akiyuki ;   et al. | 2007-04-26 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same App 20070023653 - Toyoda; Yasutaka ;   et al. | 2007-02-01 |
Pattern measuring method and pattern measuring device App 20060193508 - Sutani; Takumichi ;   et al. | 2006-08-31 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method App 20060108524 - Nagatomo; Wataru ;   et al. | 2006-05-25 |
Pattern search method App 20050232493 - Satou, Norio ;   et al. | 2005-10-20 |