| Patent | Date |
|---|
Transfer method and transfer system
Grant 11,380,568 - Sugita , et al. July 5, 2 | 2022-07-05 |
Execution Device And Execution Method
App 20210391195 - SUGITA; Kippei | 2021-12-16 |
Calibration Method And Calibration System
App 20210356324 - Sugita; Kippei ; et al. | 2021-11-18 |
Measuring device and operation method of system for inspecting focus ring
Grant 11,164,729 - Sugita , et al. November 2, 2 | 2021-11-02 |
Transfer System And Transfer Method
App 20210183628 - Sugita; Kippei ; et al. | 2021-06-17 |
Jig, Processing System And Processing Method
App 20210166960 - SUGITA; Kippei ; et al. | 2021-06-03 |
Transfer robot system, teaching method and wafer receptacle
Grant 10,964,575 - Sugita , et al. March 30, 2 | 2021-03-30 |
Measuring device and method for obtaining amount of deviation of measuring device
Grant 10,948,317 - Sugita , et al. March 16, 2 | 2021-03-16 |
Method And System For Inspecting Processing Apparatus
App 20210074564 - Sugita; Kippei ; et al. | 2021-03-11 |
Transfer Method And Transfer System
App 20210057252 - SUGITA; Kippei ; et al. | 2021-02-25 |
Method of obtaining amount of deviation of a measuring device, and method of calibrating transfer position data in a processing system
Grant 10,903,100 - Sugita , et al. January 26, 2 | 2021-01-26 |
Transfer method and transfer system
Grant 10,861,729 - Sugita , et al. December 8, 2 | 2020-12-08 |
Electrostatic capacitance measuring device
Grant 10,837,991 - Sugita , et al. November 17, 2 | 2020-11-17 |
Method for calibrating measuring device and case used in the calibration method
Grant 10,837,810 - Sugita , et al. November 17, 2 | 2020-11-17 |
Transfer Method And Transfer System
App 20200194295 - SUGITA; Kippei ; et al. | 2020-06-18 |
Transfer Robot System, Teaching Method And Wafer Receptacle
App 20200161154 - Sugita; Kippei ; et al. | 2020-05-21 |
Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrument
Grant 10,634,479 - Sugita , et al. | 2020-04-28 |
Ranging Apparatus And Method Using The Ranging Apparatus
App 20200025884 - Sugita; Kippei ; et al. | 2020-01-23 |
Measuring Device And Operation Method Of System For Inspecting Focus Ring
App 20190279848 - SUGITA; Kippei ; et al. | 2019-09-12 |
Measuring Device And Method For Obtaining Amount Of Deviation Of Measuring Device
App 20190277665 - SUGITA; Kippei ; et al. | 2019-09-12 |
Position detection system and processing apparatus
Grant 10,354,896 - Sugita , et al. July 16, 2 | 2019-07-16 |
Method Of Obtaining Amount Of Deviation Of A Measuring Device, And Method Of Calibrating Transfer Position Data In A Processing
App 20190164791 - SUGITA; Kippei ; et al. | 2019-05-30 |
Position detecting system and processing apparatus
Grant 10,199,251 - Sugita , et al. Fe | 2019-02-05 |
Method For Calibrating Measuring Device And Case Used In The Calibration Method
App 20190033103 - Sugita; Kippei ; et al. | 2019-01-31 |
Position Detecting System And Processing Apparatus
App 20180301322 - SUGITA; Kippei ; et al. | 2018-10-18 |
Electrostatic Capacitance Measuring Device
App 20180284171 - SUGITA; Kippei ; et al. | 2018-10-04 |
Method for acquiring data indicating electrostatic capacitance
Grant 10,074,549 - Sugita , et al. September 11, 2 | 2018-09-11 |
Sensor chip for electrostatic capacitance measurement and measuring device having the same
Grant 10,018,484 - Sugita , et al. July 10, 2 | 2018-07-10 |
Sensor Chip For Electrostatic Capacitance Measurement And Measuring Device Having The Same
App 20180136013 - Sugita; Kippei ; et al. | 2018-05-17 |
Position Detection System And Processing Apparatus
App 20180090354 - SUGITA; Kippei ; et al. | 2018-03-29 |
Sensor chip for electrostatic capacitance measurement and measuring device having the same
Grant 9,903,739 - Sugita , et al. February 27, 2 | 2018-02-27 |
Measuring Instrument For Measuring Electrostatic Capacity And Method Of Calibrating Transfer Position Data In Processing System By Using Measuring Instrument
App 20170363407 - SUGITA; Kippei ; et al. | 2017-12-21 |
System of inspecting focus ring and method of inspecting focus ring
Grant 9,841,395 - Sugita , et al. December 12, 2 | 2017-12-12 |
Method For Acquiring Data Indicating Electrostatic Capacitance
App 20170278735 - SUGITA; Kippei ; et al. | 2017-09-28 |
Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method
Grant 9,708,507 - Sugita , et al. July 18, 2 | 2017-07-18 |
System Of Inspecting Focus Ring And Method Of Inspecting Focus Ring
App 20160363556 - Sugita; Kippei ; et al. | 2016-12-15 |
Sensor Chip For Electrostatic Capacitance Measurement And Measuring Device Having The Same
App 20160363433 - Sugita; Kippei ; et al. | 2016-12-15 |
Method for Manufacturing Hollow Structure
App 20160280536 - SUGITA; Kippei ; et al. | 2016-09-29 |
Method for depositing a film and film deposition apparatus
Grant 9,349,584 - Sugita , et al. May 24, 2 | 2016-05-24 |
Film forming apparatus
Grant 9,163,311 - Hasegawa , et al. October 20, 2 | 2015-10-20 |
Film forming apparatus
Grant 9,127,358 - Inoue , et al. September 8, 2 | 2015-09-08 |
Method for Improving Chemical Resistance of Polymerized Film, Polymerized Film Forming Method, Film Forming Apparatus, and Electronic Product Manufacturing Method
App 20150240121 - SUGITA; Kippei ; et al. | 2015-08-27 |
Method For Depositing A Film And Film Deposition Apparatus
App 20150087158 - Sugita; Kippei ; et al. | 2015-03-26 |
Method of manufacturing semiconductor device
Grant 8,716,130 - Sugita , et al. May 6, 2 | 2014-05-06 |
Method Of Manufacturing Semiconductor Device
App 20130089983 - Sugita; Kippei ; et al. | 2013-04-11 |
Cleaning Method And Film Depositing Method
App 20120269970 - IDO; Yasuyuki ; et al. | 2012-10-25 |
Film Forming Apparatus
App 20120180719 - INOUE; Mitsuya ; et al. | 2012-07-19 |
Film Forming Apparatus
App 20120180727 - HASEGAWA; Harunari ; et al. | 2012-07-19 |
Film Forming Apparatus
App 20120160169 - HASEGAWA; Harunari ; et al. | 2012-06-28 |
Evaporator
App 20110023784 - Kashiwagi; Yusaku ; et al. | 2011-02-03 |
Apparatus For Treating Surface And Method Of Treating Surface
App 20110003078 - Sugita; Kippei ; et al. | 2011-01-06 |
Plasma Processing Apparatus
App 20090294063 - HAYASHI; Toshio ; et al. | 2009-12-03 |
Plasma processing apparatus
App 20020170678 - Hayashi, Toshio ; et al. | 2002-11-21 |
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