| Patent | Date |
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Pressure-type flow control device and flow control method
Grant 11,416,011 - Sugita , et al. August 16, 2 | 2022-08-16 |
Liquid level meter, vaporizer equipped with the same, and liquid level detection method
Grant 11,402,250 - Hidaka , et al. August 2, 2 | 2022-08-02 |
Self-diagnosis method for flow rate control device
Grant 11,391,608 - Sugita , et al. July 19, 2 | 2022-07-19 |
Flow Rate Control Device
App 20220197316 - HIRATA; Kaoru ; et al. | 2022-06-23 |
Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device
Grant 11,346,457 - Dohi , et al. May 31, 2 | 2022-05-31 |
Flow rate control method and flow rate control device
Grant 11,269,362 - Hirata , et al. March 8, 2 | 2022-03-08 |
Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller
Grant 11,226,257 - Harada , et al. January 18, 2 | 2022-01-18 |
Fluid control device
Grant 11,226,641 - Hirata , et al. January 18, 2 | 2022-01-18 |
Flow rate control method and flow rate control device
Grant 11,216,016 - Hirata , et al. January 4, 2 | 2022-01-04 |
Fluid control device, method for controlling fluid control device, and fluid control system
Grant 11,137,779 - Hirata , et al. October 5, 2 | 2021-10-05 |
Flow Rate Control Method And Flow Rate Control Device
App 20210240208 - HIRATA; Kaoru ; et al. | 2021-08-05 |
Piezoelectric Driven Valve, Pressure-type Flow Rate Control Device, And Vaporization Supply Device
App 20210239230 - DOHI; Ryousuke ; et al. | 2021-08-05 |
Flow rate control device
Grant 11,079,774 - Sugita , et al. August 3, 2 | 2021-08-03 |
Piezoelectric-element-driven valve and flow rate control device
Grant 11,054,052 - Dohi , et al. July 6, 2 | 2021-07-06 |
Flow Rate Control Method And Flow Rate Control Device
App 20210157341 - HIRATA; Kaoru ; et al. | 2021-05-27 |
Flow Rate Control Device And Flow Rate Control Method
App 20210141399 - SUGITA; Katsuyuki ; et al. | 2021-05-13 |
System, Information Processing Apparatus, And Program
App 20210080270 - SUGITA; Katsuyuki | 2021-03-18 |
Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition
Grant 10,928,813 - Nagase , et al. February 23, 2 | 2021-02-23 |
Flow rate signal correction method and flow rate control device employing same
Grant 10,884,436 - Sugita , et al. January 5, 2 | 2021-01-05 |
Pressure-based flow rate control device and malfunction detection method therefor
Grant 10,883,866 - Sugita , et al. January 5, 2 | 2021-01-05 |
Valve Device
App 20200386342 - YOSHIDA; Toshihide ; et al. | 2020-12-10 |
Pressure-type flow rate control device
Grant 10,838,435 - Hirata , et al. November 17, 2 | 2020-11-17 |
Flow Rate Control Device
App 20200348704 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Self-diagnosis Method For Flow Rate Control Device
App 20200348158 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Image processing apparatus with malicious code detection processing and control program
Grant 10,791,228 - Tamura , et al. September 29, 2 | 2020-09-29 |
Information processing apparatus and data storage program
Grant 10,701,237 - Yamaguchi , et al. | 2020-06-30 |
Vaporization supply apparatus
Grant 10,646,844 - Hidaka , et al. | 2020-05-12 |
Liquid Level Meter, Vaporizer Equipped With The Same, And Liquid Level Detection Method
App 20200088561 - HIDAKA; Atsushi ; et al. | 2020-03-19 |
Pressure-type Flow Control Device And Flow Control Method
App 20200033895 - SUGITA; Katsuyuki ; et al. | 2020-01-30 |
Piezoelectric-element-driven Valve And Flow Rate Control Device
App 20200018413 - DOHI; Ryousuke ; et al. | 2020-01-16 |
Gas divided flow supplying apparatus for semiconductor manufacturing equipment
Grant 10534376 - | 2020-01-14 |
Information Processing Apparatus And Data Storage Program
App 20190394352 - YAMAGUCHI; Takehisa ; et al. | 2019-12-26 |
Anomaly Detection Device for Fluid Controller, Anomaly Detection System, Anamoly Detection Method, and Fluid Controller
App 20190360887 - Harada; Akihiro ; et al. | 2019-11-28 |
Image Processing Apparatus And Control Program
App 20190342460 - Tamura; Atsushi ; et al. | 2019-11-07 |
Pressure-type flow controller
Grant 10,386,863 - Hirata , et al. A | 2019-08-20 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 10,386,861 - Hirata , et al. A | 2019-08-20 |
Pressure-type Flow Rate Control Device
App 20190250648 - HIRATA; Kaoru ; et al. | 2019-08-15 |
Fluid Control Device
App 20190243391 - HIRATA; Kaoru ; et al. | 2019-08-08 |
Pressure-type flow rate control device
Grant 10,372,145 - Hirose , et al. | 2019-08-06 |
Printing System, Printer, Information Processor, and Terminal Device
App 20190235802 - TAMURA; Atsushi ; et al. | 2019-08-01 |
Fluid Control Device, Method For Controlling Fluid Control Device, And Fluid Control System
App 20190129452 - HIRATA; Kaoru ; et al. | 2019-05-02 |
Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container
Grant 10,274,356 - Hirata , et al. | 2019-04-30 |
Pressure-type Flow Rate Control Device And Flow Rate Self-diagnosis Method
App 20190094847 - NAGASE; Masaaki ; et al. | 2019-03-28 |
Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve
Grant 10,174,858 - Hirata , et al. J | 2019-01-08 |
Flow Rate Signal Correction Method And Flow Rate Control Device Employing Same
App 20180314271 - SUGITA; Katsuyuki ; et al. | 2018-11-01 |
Pressure-based Flow Rate Control Device And Malfunction Detection Method Therefor
App 20180283914 - SUGITA; Katsuyuki ; et al. | 2018-10-04 |
Flow meter and flow control device provided therewith
Grant 10,073,469 - Nagase , et al. September 11, 2 | 2018-09-11 |
Flow rate range variable type flow rate control apparatus
Grant 9,921,089 - Ohmi , et al. March 20, 2 | 2018-03-20 |
Vaporization Supply Apparatus
App 20180071702 - HIDAKA; Atsushi ; et al. | 2018-03-15 |
Pressure type flow control system with flow monitoring
Grant 9,870,006 - Hirata , et al. January 16, 2 | 2018-01-16 |
Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device
Grant 9,841,770 - Hirata , et al. December 12, 2 | 2017-12-12 |
Liquid Level Detection Circuit, Liquid Level Meter, Container Provided With Liquid Level Meter, And Vaporizer Using Container
App 20170268919 - HIRATA; Kaoru ; et al. | 2017-09-21 |
Piezoelectric Element-driven Valve And Flow Rate Control Device Including Piezoelectric Element-driven Valve
App 20170254430 - Hirata; Kaoru ; et al. | 2017-09-07 |
Multi-hole orifice plate for flow control, and flow controller using the same
Grant 9,746,856 - Hirata , et al. August 29, 2 | 2017-08-29 |
Pressure Type Flow Control System With Flow Monitoring, And Method For Detecting Anomaly In Fluid Supply System And Handling Method At Abnormal Monitoring Flow Rate Using The Same
App 20170234455 - Hirata; Kaoru ; et al. | 2017-08-17 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 9,632,511 - Hirata , et al. April 25, 2 | 2017-04-25 |
Pressure Type Flow Control System With Flow Monitoring
App 20160370808 - Hirata; Kaoru ; et al. | 2016-12-22 |
Pressure-type Flow Rate Control Device
App 20160349763 - Hirose; Takashi ; et al. | 2016-12-01 |
Pressure type flow control system with flow monitoring
Grant 9,494,947 - Hirata , et al. November 15, 2 | 2016-11-15 |
Pressure-type Flow Control Device And Method For Preventing Overshooting At Start Of Flow Control Performed By Said Device
App 20160327963 - HIRATA; Kaoru ; et al. | 2016-11-10 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160274595 - Ohmi; Tadahiro ; et al. | 2016-09-22 |
Pressure-type Flow Controller
App 20160252913 - HIRATA; Kaoru ; et al. | 2016-09-01 |
Flow Meter And Flow Control Device Provided Therewith
App 20160239026 - NAGASE; Masaaki ; et al. | 2016-08-18 |
Flow rate range variable type flow rate control apparatus
Grant 9,383,758 - Ohmi , et al. July 5, 2 | 2016-07-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160109886 - Ohmi; Tadahiro ; et al. | 2016-04-21 |
Multi-hole Orifice Plate For Flow Control, And Flow Controller Using The Same
App 20160070271 - HIRATA; Kaoru ; et al. | 2016-03-10 |
Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed
Grant 9,133,951 - Ohmi , et al. September 15, 2 | 2015-09-15 |
Gas Divided Flow Supplying Apparatus For Semiconductor Manufacturing Equipment
App 20150192932 - Nishino; Kouji ; et al. | 2015-07-09 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20150160662 - Ohmi; Tadahiro ; et al. | 2015-06-11 |
Flow rate range variable type flow rate control apparatus
Grant 9,010,369 - Ohmi , et al. April 21, 2 | 2015-04-21 |
Pressure Type Flow Control System With Flow Monitoring, And Method For Detecting Anomaly In Fluid Supply System And Handling Method At Abnormal Monitoring Flow Rate Using The Same
App 20140230911 - Hirata; Kaoru ; et al. | 2014-08-21 |
Pressure Type Flow Control System With Flow Monitoring
App 20140182692 - Hirata; Kaoru ; et al. | 2014-07-03 |
Automatic pressure regulator for flow rate regulator
Grant 8,757,197 - Hirata , et al. June 24, 2 | 2014-06-24 |
Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus
Grant 8,606,412 - Nagase , et al. December 10, 2 | 2013-12-10 |
Gas supply system for semiconductor manufacturing facilities
Grant 8,601,976 - Nishino , et al. December 10, 2 | 2013-12-10 |
Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function
Grant 8,587,180 - Sugita , et al. November 19, 2 | 2013-11-19 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20130220451 - Ohmi; Tadahiro ; et al. | 2013-08-29 |
Flow rate range variable type flow rate control apparatus
Grant 8,418,714 - Ohmi , et al. April 16, 2 | 2013-04-16 |
Automatic Pressure Regulator For Flow Rate Regulator
App 20110139271 - Hirata; Kaoru ; et al. | 2011-06-16 |
Discontinuous Switching Fluid Flow Rate Control Method Using Pressure Type Flow Rate Control Device
App 20110120566 - OHMI; Tadahiro ; et al. | 2011-05-26 |
Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor
Grant 7,945,414 - Nagase , et al. May 17, 2 | 2011-05-17 |
Pressure Control Valve Driving Circuit For Pressure Type Flow Rate Control Device With Flow Rate Self-diagnosis Function
App 20110108138 - Sugita; Katsuyuki ; et al. | 2011-05-12 |
Gas Supply System For Semiconductor Manufactruing Facilities
App 20100192854 - Nishino; Kouji ; et al. | 2010-08-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20100139775 - Ohmi; Tadahiro ; et al. | 2010-06-10 |
Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device
Grant 7,669,455 - Ohmi , et al. March 2, 2 | 2010-03-02 |
Method For Detecting Abnormality In Fluid Supply Line Using Fluid Control Apparatus With Pressure Sensor
App 20090326719 - Nagase; Masaaki ; et al. | 2009-12-31 |
Method For Detecting Malfunction Of Valve On The Downstream Side Of Throttle Mechanism Of Pressure Type Flow Control Apparatus
App 20090292399 - Nagase; Masaaki ; et al. | 2009-11-26 |
Gasket Type Orifice And Pressure Type Flow Rate Control Apparatus For Which The Orifice Is Employed
App 20090171507 - Ohmi; Tadahiro ; et al. | 2009-07-02 |
Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device
App 20070151321 - Ohmi; Tadahiro ; et al. | 2007-07-05 |
Apparatus and method for recording and reproducing digital data
Grant 7,206,502 - Kubo , et al. April 17, 2 | 2007-04-17 |
Apparatus and method for recording and reproducing digital data
App 20020067916 - Kubo, Hiroaki ; et al. | 2002-06-06 |
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