| Patent | Date |
|---|
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
Grant 9,424,528 - Kaushal , et al. August 23, 2 | 2016-08-23 |
Autonomous biologically based learning tool
Grant 9,275,335 - Kaushal , et al. March 1, 2 | 2016-03-01 |
Tool performance by linking spectroscopic information with tool operational parameters and material measurement information
Grant 8,954,184 - Kaushal , et al. February 10, 2 | 2015-02-10 |
Biologically Based Chamber Matching
App 20140304196 - Kaushal; Sanjeev ; et al. | 2014-10-09 |
Method And Apparatus For Self-learning And Self-improving A Semiconductor Manufacturing Tool
App 20140229409 - Kaushal; Sanjeev ; et al. | 2014-08-14 |
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
Grant 8,744,607 - Kaushal , et al. June 3, 2 | 2014-06-03 |
Method and system for detection of tool performance degradation and mismatch
Grant 8,725,667 - Kaushal , et al. May 13, 2 | 2014-05-13 |
Biologically based chamber matching
Grant 8,723,869 - Kaushal , et al. May 13, 2 | 2014-05-13 |
Method And Apparatus For Self-learning And Self-improving A Semiconductor Manufacturing Tool
App 20130151447 - Kaushal; Sanjeev ; et al. | 2013-06-13 |
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
Grant 8,396,582 - Kaushal , et al. March 12, 2 | 2013-03-12 |
Biologically Based Chamber Matching
App 20120242667 - Kaushal; Sanjeev ; et al. | 2012-09-27 |
Autonomous Biologically Based Learning Tool
App 20120209798 - Kaushal; Sanjeev ; et al. | 2012-08-16 |
Tool Performance By Linking Spectroscopic Information With Tool Operational Parameters And Material Measurement Information
App 20120185813 - Kaushal; Sanjeev ; et al. | 2012-07-19 |
Autonomous biologically based learning tool
Grant 8,190,543 - Kaushal , et al. May 29, 2 | 2012-05-29 |
Autonomous adaptive system and method for improving semiconductor manufacturing quality
Grant 8,078,552 - Kaushal , et al. December 13, 2 | 2011-12-13 |
Method of monitoring a semiconductor processing system using a wireless sensor network
Grant 8,026,113 - Kaushal , et al. September 27, 2 | 2011-09-27 |
Autonomous Biologically Based Learning Tool
App 20110131162 - Kaushal; Sanjeev ; et al. | 2011-06-02 |
Method and apparatus for monolayer deposition (MLD)
Grant 7,838,072 - Kaushal , et al. November 23, 2 | 2010-11-23 |
Method And Apparatus For Self-learning And Self-improving A Semiconductor Manufacturing Tool
App 20100138026 - Kaushal; Sanjeev ; et al. | 2010-06-03 |
Method of correcting systematic error in a metrology system
Grant 7,710,565 - Kaushal , et al. May 4, 2 | 2010-05-04 |
Method And System For Detection Of Tool Performance Degradation And Mismatch
App 20090240366 - Kaushal; Sanjeev ; et al. | 2009-09-24 |
Autonomous Adaptive Semiconductor Manufacturing
App 20090228408 - Kaushal; Sanjeev ; et al. | 2009-09-10 |
Optical measurement system with systematic error correction
Grant 7,561,269 - Kaushal , et al. July 14, 2 | 2009-07-14 |
Optical Measurement System With Systematic Error Correction
App 20090153842 - Kaushal; Sanjeev ; et al. | 2009-06-18 |
Method Of Correcting Systematic Error In A Metrology System
App 20090157343 - Kaushal; Sanjeev ; et al. | 2009-06-18 |
Method for creating a built-in self test (BIST) table for monitoring a monolayer deposition (MLD) system
Grant 7,526,699 - Kaushal , et al. April 28, 2 | 2009-04-28 |
Monitoring a monolayer deposition (MLD) system using a built-in self test (BIST) table
Grant 7,519,885 - Kaushal , et al. April 14, 2 | 2009-04-14 |
Method for monolayer deposition
Grant 7,459,175 - Kaushal , et al. December 2, 2 | 2008-12-02 |
Wafer curvature estimation, monitoring, and compensation
Grant 7,452,793 - Kaushal , et al. November 18, 2 | 2008-11-18 |
Built-in self test for a thermal processing system
Grant 7,444,572 - Kaushal , et al. October 28, 2 | 2008-10-28 |
Monitoring a thermal processing system
Grant 7,406,644 - Kaushal , et al. July 29, 2 | 2008-07-29 |
Spintronic transistor
Grant 7,342,244 - Kaushal , et al. March 11, 2 | 2008-03-11 |
Monitoring a single-wafer processing system
Grant 7,340,377 - Kaushal , et al. March 4, 2 | 2008-03-04 |
Spintronic Transistor
App 20080017843 - Kaushal; Sanjeev ; et al. | 2008-01-24 |
Monitoring a system during low-pressure processes
Grant 7,302,363 - Kaushal , et al. November 27, 2 | 2007-11-27 |
Method For Creating A Built-in Self Test (bist) Table For Monitoring A Monolayer Deposition (mld) System
App 20070259285 - Kaushal; Sanjeev ; et al. | 2007-11-08 |
Monitoring A Thermal Processing System
App 20070255991 - Kaushal; Sanjeev ; et al. | 2007-11-01 |
Monitoring A System During Low-pressure Processes
App 20070239375 - Kaushal; Sanjeev ; et al. | 2007-10-11 |
Monitoring A Monolayer Deposition (mld) System Using A Built-in Self Test (bist) Table
App 20070234953 - Kaushal; Sanjeev ; et al. | 2007-10-11 |
Monitoring A Single-wafer Processing System
App 20070233427 - Kaushal; Sanjeev ; et al. | 2007-10-04 |
Semiconductor Processing System With Wireless Sensor Network Monitoring System Incorporated Therewith
App 20070221125 - Kaushal; Sanjeev ; et al. | 2007-09-27 |
Method Of Monitoring A Semiconductor Processing System Using A Wireless Sensor Network
App 20070224712 - Kaushal; Sanjeev ; et al. | 2007-09-27 |
Built-in self test for a thermal processing system
App 20070061652 - Kaushal; Sanjeev ; et al. | 2007-03-15 |
Built-in self test for a thermal processing system
Grant 7,165,011 - Kaushal , et al. January 16, 2 | 2007-01-16 |
Wafer curvature estimation, monitoring, and compensation
App 20060241891 - Kaushal; Sanjeev ; et al. | 2006-10-26 |
Methods for adaptive real time control of a thermal processing system
Grant 7,101,816 - Kaushal , et al. September 5, 2 | 2006-09-05 |
Method and apparatus for monolayer deposition (MLD)
App 20060165890 - Kaushal; Sanjeev ; et al. | 2006-07-27 |
Method and apparatus for monolayer deposition
App 20060166501 - Kaushal; Sanjeev ; et al. | 2006-07-27 |
Adaptive real time control of a reticle/mask system
Grant 7,025,280 - Kaushal , et al. April 11, 2 | 2006-04-11 |
Adaptive real time control of a reticle/mask system
App 20050167514 - Kaushal, Sanjeev ; et al. | 2005-08-04 |
Methods for adaptive real time control of a thermal processing system
App 20050149886 - Kaushal, Sanjeev ; et al. | 2005-07-07 |
Pattern inspection apparatus and electron beam apparatus
Grant 5,557,105 - Honjo , et al. September 17, 1 | 1996-09-17 |
Pattern inspection apparatus and electron beam apparatus
Grant 5,384,463 - Honjo , et al. January 24, 1 | 1995-01-24 |
Reticle for photolithographic patterning
Grant 5,126,220 - Tokitomo , et al. June 30, 1 | 1992-06-30 |
Frictionless supporting apparatus
Grant 4,684,315 - Sugishima , et al. August 4, 1 | 1987-08-04 |
Method of making Schottky barrier diode by selective beam-crystallized polycrystalline/amorphous layer
Grant 4,377,031 - Goto , et al. March 22, 1 | 1983-03-22 |
Method of manufacturing a semiconductor device
Grant 4,352,724 - Sugishima , et al. October 5, 1 | 1982-10-05 |
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