SUGIMORI; Katsuhisa
Patent Applications and Registrations
Patent applications and USPTO patent grants for SUGIMORI; Katsuhisa.The latest application filed is for "polishing head, wafer polishing apparatus using the same, and wafer polishing method using the same".
- SUGIMORI; Katsuhisa - Tokyo JP
| Patent | Date |
|---|---|
| Polishing Head, Wafer Polishing Apparatus Using The Same, And Wafer Polishing Method Using The Same App 20210331285 - NAKANO; Yuki ; et al. | 2021-10-28 |
| Silicon Wafer Single-side Polishing Method App 20190030676 - NAKAJIMA; Toshiharu ; et al. | 2019-01-31 |
| Method for manufacturing semiconductor wafer Grant 9,991,110 - Kozasa , et al. June 5, 2 | 2018-06-05 |
| Method for polishing silicon wafer Grant 9,956,663 - Kozasa , et al. May 1, 2 | 2018-05-01 |
| Method For Polishing Silicon Wafer App 20170252891 - KOZASA; Kazuaki ; et al. | 2017-09-07 |
| Method For Manufacturing Semiconductor Wafer App 20170011903 - KOZASA; Kazuaki ; et al. | 2017-01-12 |
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