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Semi-conductor device with test element group for evaluation of interlayer dielectric and process for producing the same App 20020009815 - Sugihara, Tsuyoshi ;   et al. | 2002-01-24 |
Inspection apparatus with improved detection of surface defects over large and curved surfaces Grant 5,237,404 - Tanaka , et al. August 17, 1 | 1993-08-17 |