| Patent | Date |
|---|
Method of forming fine patterns
Grant 8,187,798 - Sugeta , et al. May 29, 2 | 2012-05-29 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
Grant 8,142,980 - Sugeta , et al. March 27, 2 | 2012-03-27 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
Grant 8,124,318 - Sugeta , et al. February 28, 2 | 2012-02-28 |
Method of forming fine patterns
Grant 8,043,798 - Nakamura , et al. October 25, 2 | 2011-10-25 |
Over-coating Agent For Forming Fine Patterns And A Method Of Forming Fine Patterns Using Such Agent
App 20100316802 - Sugeta; Yoshiki ; et al. | 2010-12-16 |
Method Of Forming Fine Patterns
App 20100272909 - SHINBORI; Hiroshi ; et al. | 2010-10-28 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20100139838 - Sugeta; Yoshiki ; et al. | 2010-06-10 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20100086694 - Sugeta; Yoshiki ; et al. | 2010-04-08 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20100075263 - Sugeta; Yoshiki ; et al. | 2010-03-25 |
Method of forming fine patterns
App 20100068662 - Sugeta; Yoshiki ; et al. | 2010-03-18 |
Method for forming micropattern
Grant 7,579,138 - Sugeta , et al. August 25, 2 | 2009-08-25 |
Method of forming fine patterns
App 20090186156 - Sugeta; Yoshiki ; et al. | 2009-07-23 |
Method of forming fine patterns
Grant 7,553,610 - Kaneko , et al. June 30, 2 | 2009-06-30 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20090148611 - Sugeta; Yoshiki ; et al. | 2009-06-11 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20090126855 - Sugeta; Yoshiki ; et al. | 2009-05-21 |
Method of forming fine patterns
App 20090041948 - Shinbori; Hiroshi ; et al. | 2009-02-12 |
Method of forming fine patterns
App 20090029297 - Kaneko; Fumitake ; et al. | 2009-01-29 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20090011601 - Sugeta; Yoshiki ; et al. | 2009-01-08 |
Method of forming fine patterns
App 20080145539 - Sugeta; Yoshiki ; et al. | 2008-06-19 |
Method for forming micropattern
App 20080020328 - Sugeta; Yoshiki ; et al. | 2008-01-24 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20070213447 - Sugeta; Yoshiki ; et al. | 2007-09-13 |
Agent for forming coating for narrowing patterns and method for forming fine pattern using the same
Grant 7,235,345 - Sugeta , et al. June 26, 2 | 2007-06-26 |
Method of forming fine patterns
Grant 7,189,499 - Sugeta , et al. March 13, 2 | 2007-03-13 |
Method of forming fine patterns
App 20060263728 - Shinbori; Hiroshi ; et al. | 2006-11-23 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20060258809 - Sugeta; Yoshiki ; et al. | 2006-11-16 |
Method for reducing pattern dimension in photoresist layer
App 20060099347 - Sugeta; Yoshiki ; et al. | 2006-05-11 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20060079628 - Sugeta; Yoshiki ; et al. | 2006-04-13 |
Method of forming fine patterns
App 20060003601 - Sugeta; Yoshiki ; et al. | 2006-01-05 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20050245663 - Sugeta, Yoshiki ; et al. | 2005-11-03 |
Coating forming agent for reducing pattern dimension and method of forming fine pattern therewith
App 20050175926 - Sugeta, Yoshiki ; et al. | 2005-08-11 |
Coating material for pattern fineness enhancement and method of forming fine pattern with the same
App 20050123851 - Shinbori, Hiroshi ; et al. | 2005-06-09 |
Method for reducing pattern dimension in photoresist layer
App 20050058950 - Sugeta, Yoshiki ; et al. | 2005-03-17 |
Method of forming fine patterns
App 20050009365 - Sugeta, Yoshiki ; et al. | 2005-01-13 |
Method for reducing pattern dimension in photoresist layer
Grant 6,811,817 - Sugeta , et al. November 2, 2 | 2004-11-02 |
Agent for forming coating for narrowing patterns and method for forming fine pattern using the same
App 20040137378 - Sugeta, Yoshiki ; et al. | 2004-07-15 |
Method for forming fine patterns
App 20040137377 - Shinbori, Hiroshi ; et al. | 2004-07-15 |
Method of forming fine patterns
App 20040121615 - Kaneko, Fumitake ; et al. | 2004-06-24 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20040106737 - Sugeta, Yoshiki ; et al. | 2004-06-03 |
Method of forming fine patterns
App 20040104196 - Nakamura, Tsuyoshi ; et al. | 2004-06-03 |
Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent
App 20040067303 - Sugeta, Yoshiki ; et al. | 2004-04-08 |
Method of forming fine patterns
App 20040067452 - Sugeta, Yoshiki ; et al. | 2004-04-08 |
Method for reducing pattern dimension in photoresist layer
App 20030096903 - Sugeta, Yoshiki ; et al. | 2003-05-22 |
Method for reducing pattern dimension in photoresist layer
App 20030087032 - Sugeta, Yoshiki ; et al. | 2003-05-08 |
Method for reducing pattern dimension in photoresist layer
App 20030008968 - Sugeta, Yoshiki ; et al. | 2003-01-09 |
Negative-working photolithographic patterning material and method for the preparation of ion-implanted and metal-plated substrates by using the same
Grant 6,399,275 - Sugeta , et al. June 4, 2 | 2002-06-04 |
Chemical-sensitization photoresist composition
Grant 6,063,953 - Hada , et al. May 16, 2 | 2000-05-16 |
Chemical-sensitization photoresist composition
Grant 6,022,666 - Hada , et al. February 8, 2 | 2000-02-08 |
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