Sugawa; Naoki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sugawa; Naoki.The latest application filed is for "stage and plasma processing apparatus".
- Sugawa; Naoki - Miyagi JP
- Sugawa; Naoki - Yokohama JP
| Patent | Date |
|---|---|
| Workpiece placement apparatus and processing apparatus Grant 11,410,871 - Uchida , et al. August 9, 2 | 2022-08-09 |
| Stage And Plasma Processing Apparatus App 20210210369 - SUGAWA; Naoki | 2021-07-08 |
| Annular Member, Substrate Processing Apparatus And Method Of Controlling Substrate Processing Apparatus App 20210066053 - NAGAIKE; Hiroshi ; et al. | 2021-03-04 |
| Workpiece Placement Apparatus And Processing Apparatus App 20190279894 - UCHIDA; Yohei ; et al. | 2019-09-12 |
| Part For Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Apparatus App 20190164727 - SUGAWA; Naoki ; et al. | 2019-05-30 |
| Digital-to-analog converter Grant 4,827,260 - Sugawa , et al. May 2, 1 | 1989-05-02 |
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